Double blazed binary diffraction optical element beam splitter

• US 5,537,252 A
• Filed: 12/23/1993
• Issued: 07/16/1996
• Est. Priority Date: 12/23/1993
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Rauch, Russell B.
• Primary Examiner(s): Dzierzynski, Paul M.
• Assistant Examiner(s): Juba, Jr., John
• Application Number:
  US08/172,357
• Time in Patent Office: 936 Days
• Field of Search: 359/566, 359/569, 359/571, 359/558, 359/565, 359/621, 359/622, 359/639, 359/640, 359/117, 359/124, 359/576, 385/17, 385/37
• US Class Current: 359/569
• CPC Class Codes: G02B 27/1073 characterized by manufacturing or alignment methods
• CPC Class Codes: G02B 27/1093 for use with monochromatic radiation only, e.g. devices for splitting a single laser source
• CPC Class Codes: G02B 27/145 having sequential partially reflecting surfaces
• CPC Class Codes: G02B 5/1871 Transmissive phase gratings

Abstract

A double blazed binary diffractive optical element beam splitter having alternating and opposing individual blazed diffraction gratings upon a multilevel surface relief phase grating structure for splitting an incident monochromatic light beam into a first and second diffracted light beams. The double blazed binary diffractive optical element and two single blazed binary diffractive optical elements can form either a beam splitting apparatus or a beam combining apparatus. Double blazed binary diffractive optical elements and sets of two single blazed binary diffractive optical elements can form beam splitting and combining apparatuses to produce a single beam or two closely spaced beams.

Claims

1. A beam splitting and beam combining apparatus comprising

a first double blazed binary diffractive optical element beam splitter having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having alternating individual blazed diffraction gratings with opposite blazing for splitting an incident monochromatic light beam into a first diffracted light beam and a second diffracted light beam,

a first single blazed binary diffractive optical element having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having individual blazed diffraction gratings for diffracting said first diffracted light beam from said double blazed binary diffractive optical element beam splitter into a first double diffracted light beam,

a second single blazed binary diffractive optical element having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having individual blazed diffraction gratings for diffracting said second diffracted light beam from said double blazed binary diffractive optical element beam splitter into a second double diffracted light beam,

a third single blazed binary diffractive optical element having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having individual blazed diffraction gratings for diffracting said first double diffracted light beam from said first single blazed binary diffractive optical element into a first thrice diffracted light beam,

a fourth single blazed binary diffractive optical element having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having individual blazed diffraction gratings for diffracting said second double diffracted light beam from said second single blazed binary diffractive optical element into a second thrice diffracted light beam, and

a second double blazed binary diffractive optical element beam splitter having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having alternating individual blazed diffraction gratings with opposite blazing for combining said first thrice diffracted light beam from said third single blazed binary diffractive optical element and said second thrice diffracted light beam from said fourth single blazed binary diffractive optical element into a single light beam.

2. The beam splitting and beam combining apparatus of claim 1 further comprising

optical means for modulating said first double diffracted light beam.

3. The beam splitting and beam combining apparatus apparatus of claim 1 further comprising

optical means for modulating said second double diffracted light beam.

4. The beam splitting and beam combining apparatus apparatus of claim 1 further comprising

first optical means for modulating said first double diffracted light beam and second optical means for modulating said second double diffracted light beam.

5. The beam splitting and beam combining apparatus apparatus of claim 1 wherein said first single blazed binary diffractive optical element and said second single blazed binary diffractive optical element have the same substrate.

6. The beam splitting and beam combining apparatus apparatus of claim 1 wherein said third single blazed binary diffractive optical element and said fourth single blazed binary diffractive optical element have the same substrate.

7. The beam splitting and beam combining apparatus apparatus of claim 1 wherein said first single blazed binary diffractive optical element and said second single blazed binary diffractive optical element have a first substrate and said third single blazed binary diffractive optical element and said fourth single blazed binary diffractive optical element have a second substrate.

8. A beam splitting and beam combining apparatus comprising

a double blazed binary diffractive optical element beam splitter having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having alternating individual blazed diffraction gratings with opposite blazing for splitting an incident monochromatic light beam into a first diffracted light beam and a second diffracted light beam,

a first single blazed binary diffractive optical element having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having individual blazed diffraction gratings for diffracting said first diffracted light beam from said double blazed binary diffractive optical element beam splitter into a first double diffracted light beam,

a second single blazed binary diffractive optical element having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having individual blazed diffraction gratings for diffracting said second diffracted light beam from said double blazed binary diffractive optical element beam splitter into a second double diffracted light beam,

a third single blazed binary diffractive optical element having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having individual blazed diffraction gratings for diffracting said first double diffracted light beam from said first single blazed binary diffractive optical element into a first thrice diffracted light beam,

a fourth single blazed binary diffractive optical element having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having individual blazed diffraction gratings for diffracting said second double diffracted light beam from said second single blazed binary diffractive optical element into a second thrice diffracted light beam,

a fifth single blazed binary diffractive optical element having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having individual blazed diffraction gratings for diffracting said first thrice diffracted light beam from said third single blazed binary diffractive optical element into a first quadruple diffracted light beam, and

a sixth single blazed binary diffractive optical element having a multilevel surface relief phase grating structure upon an optical substrate, said multilevel surface relief phase grating structure having individual blazed diffraction gratings for diffracting said second thrice diffracted light beam from said fourth single blazed binary diffractive optical element into a second quadruple diffracted light beam, wherein said first quadruple diffracted light beam and said second quadruple diffracted light beam are closely spaced.

9. The beam splitting and beam combining apparatus apparatus of claim 8 further comprising

optical means for modulating said first double diffracted light beam.

10. The beam splitting and beam combining apparatus apparatus of claim 8 further comprising

optical means for modulating said second double diffracted light beam.

11. The beam splitting and beam combining apparatus apparatus of claim 8 further comprising

first optical means for modulating said first double diffracted light beam and second optical means for modulating said second double diffracted light beam.

12. The beam splitting and beam combining apparatus apparatus of claim 8 wherein said first single blazed binary diffractive optical element and said second single blazed binary diffractive optical element have the same substrate.

13. The beam splitting and beam combining apparatus apparatus of claim 8 wherein said third single blazed binary diffractive optical element and said fourth single blazed binary diffractive optical element have the same substrate.

14. The beam splitting and beam combining apparatus apparatus of claim 8 wherein said fifth single blazed binary diffractive optical element and said sixth single blazed binary diffractive optical element have the same substrate.

15. The beam splitting and beam combining apparatus apparatus of claim 8 wherein said first single blazed binary diffractive optical element and said second single blazed binary diffractive optical element have a first substrate, said third single blazed binary diffractive optical element and said fourth single blazed binary diffractive optical element have a second substrate, and said fifth single blazed binary diffractive optical element and said sixth single blazed binary diffractive optical element have a third substrate.