Apparatus for aligning substrates for loading and unloading using a robot mechanism

• US 5,537,311 A
• Filed: 01/23/1995
• Issued: 07/16/1996
• Est. Priority Date: 01/28/1993
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Stevens, Craig L.
• Primary Examiner(s): RUGGIERO, JOSEPH F
• Application Number:
  US08/380,221
• Time in Patent Office: 540 Days
• Field of Search: 364/167.01, 364/478, 364/559, 364/488-491, 395/89, 395/93, 395/94, 901/9, 901/46, 901/47, 348/87, 348/94, 348/95
• US Class Current: 700/57
• CPC Class Codes: G03F 7/7075 Handling workpieces outside exposure position, e.g. SMIF box
• CPC Class Codes: G03F 7/70791 Large workpieces, e.g. glass substrates for flat panel displays or solar panels
• CPC Class Codes: G03F 7/70808 Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection
• CPC Class Codes: H01L 21/68 for positioning, orientation or alignment
• CPC Class Codes: H01L 21/681 using optical controlling means

Abstract

A technique for automatically compensating for differences in orientation of a workpiece, such as a rectangular substrate, a substrate cassette, a loadlock for accessing a vacuum chamber, and a substrate support on a robot mechanism. Sensors on the substrate support detect the position of a front edge of a substrate, a cassette or a loadlock, and measurements taken at the time the sensors are tripped by the edge are used to compute linear, angular and radial position corrections. More specifically, in moving a substrate from a cassette to the loadlock, the substrate support compensates for the orientation of the cassette, compensates for the orientation of the substrate within the cassette, and withdraws the substrate without contact with the cassette walls, and without the need for moving edge guides to orient the substrate. Before placing the substrate in the loadlock, the mechanism translates the substrate past a fixed sensor to determine the substrate position on the substrate support, and makes appropriate corrections to predicted linear and radial positions of the loadlock. The procedure for removing a substrate from the loadlock and placing it in a cassette employs a similar set of steps.

Claims

1. A method for aligning a robot arm with a workpiece having a straight edge, the method comprising:

positioning the robot arm adjacent to a predicted workpiece location;

moving the robot arm toward the workpiece in a direction predicted to be perpendicular to a straight front edge of the workpiece;

sensing the location of the straight front edge with at least two sensors installed on the robot arm, wherein each of the at least two sensors will provide a different location solution if the straight front edge is not perpendicular to the direction of robot arm movement toward the workpiece;

calculating, from the location solutions provided by the at least two sensors, an angular correction needed to be applied to the robot arm such that it will approach the front edge of the workpiece perpendicularly; and

calculating from the angular correction a corresponding linear correction needed to be applied to the robot arm, because of the angular correction, to ensure that the robot arm will approach the workpiece at a desired relative location.

2. A method as defined in claim 1, and further comprising the steps of:

applying the angular and linear corrections to the robot arm; and

moving the robot arm toward the workpiece in the corrected angular direction, to position a workpiece support of the robot arm directly beneath the workpiece.

3. A method as defined in claim 2, and further comprising the steps of:

computing a corrected distance through which to move the robot arm; and

moving the robot arm through the corrected distance, such that the workpiece support is centered under the workpiece.

4. A method for picking up a workpiece having a generally rectangular shape from a workpiece container, wherein the precise orientation of the container, and of the workpiece within the container, are unknown, the method comprising the steps of:

positioning a workpiece support of a robot arm in a location adjacent to a predicted workpiece container location;

detecting a front edge of the container with at least two sensors mounted on the workpiece support;

applying angular and linear corrections to the workpiece support to align it with the detected position of the container;

moving the workpiece support into the container and beneath a workpiece to be picked up;

detecting a front edge of the workpiece within the container;

applying angular and linear corrections to the workpiece support to align it with the detected position of the workpiece;

picking up the workpiece;

applying angular and linear corrections to the workpiece support to move the workpiece into alignment with the container; and

withdrawing the workpiece from the container.

5. A method as defined in claim 4, wherein:

the workpiece support is mounted at the end of the robot arm, for radial and angular movement about an axis;

each step of detecting a front edge includes recording a first radial distance from the axis to a reference point on the workpiece support, when a first sensor on the workpiece support detects the straight edge, and recording a second radial distance from the axis to the reference point when a second sensor on the workpiece support detects the straight edge; and

each step of applying angular and linear corrections is preceded by a step of computing the angular and linear corrections from the first and second radial distances and the spacing between the first and second sensors.

6. A method as defined in claim 5, wherein the step of computing the angular and linear corrections includes:

computing the angular correction from the inverse tangent of the ratio of the difference between the first and second radial distances and the spacing between the first and second sensors; and

computing the linear correction from the product of the product of one of the radial distances and the tangent of the angular correction.

7. A method as defined in claim 4, and further comprising the steps of:

sensing the lateral position of the substrate on the substrate support; and

compensating for any deviation from a predicted lateral position of the substrate on the substrate support.

8. A method as defined in claim 7, wherein:

the step of sensing the lateral position of the substrate includes translating the substrate linearly and detecting the position of a side edge of the substrate as it passes a substrate detector.

9. A method as defined in claim 8, wherein:

the method further comprises the preliminary steps of translating the substrate support linearly and detecting the position of a side edge of the substrate support, and then deriving a predicted lateral position of the substrate edge, based on an assumption of symmetrical positioning of the substrate on the substrate support; and

the step of compensating for any deviation from the predicted lateral position of the substrate includes computing a linear correction from the difference between the predicted and detected positions of the substrate edge, and computing a radial correction from the linear correction and a known orientation of a container in which the substrate is to be placed.

10. A method for moving generally rectangular workpiece from a first container to a second container, using a substrate support capable of angular and radial motion about an axis, which is movable linearly, wherein the precise orientation of the containers, and of the workpiece within the first container, are unknown, the method comprising the steps of:

determining the orientation of the first container, by moving a workpiece support to a predicted linear position adjacent to the container, orienting the workpiece support at a predicted angular position, and advancing the workpiece support radially to detect an edge of the container;

correcting the predicted linear and angular positions of the first container;

performing the foregoing steps for the second container;

moving the workpiece support to the corrected position of the first container and advancing the support radially toward a workpiece in the container;

detecting any orientation error of the workpiece in the first container and adjusting the linear and angular positions of the workpiece support to compensate for the orientation error;

picking up the workpiece with the workpiece support;

re-adjusting, if necessary, the angular and linear positions of the workpiece support to conform with the orientation of the first container;

withdrawing the workpiece and workpiece support from the first container without contact with the container;

moving the workpiece support to the corrected linear and angular position of the second container;

advancing the workpiece support radially into the second container; and

placing the workpiece in the second container.

11. A method as defined in claim 10, and further comprising:

after withdrawing the workpiece from the first container, translating the workpiece support laterally past a workpiece edge sensor, to determine the lateral position of the workpiece with respect to the workpiece support; and

compensating for any difference between the sensed position of the workpiece edge and a predicted position of the workpiece edge, to ensure that the workpiece is placed centrally in the second container.

12. A method as defined in claim 11, wherein:

the workpiece is a rectangular substrate;

the first container is a substrate cassette; and

the second container is a loadlock for access to a vacuum chamber.

13. A method as defined in claim 11, wherein:

the workpiece is a rectangular substrate;

the first container is a loadlock for access to a vacuum chamber; and

the second container is a substrate cassette.

14. Apparatus for aligning a robot arm with a workpiece having a straight edge, the apparatus comprising:

means for positioning the robot arm linearly adjacent to a predicted workpiece location;

means for moving the robot arm toward the workpiece in a direction predicted to be perpendicular to a straight front edge of the workpiece;

at least two sensors installed on the robot arm, for sensing the location of the front edge of the workpiece as the robot arm is moved toward the workpiece, wherein each of the at least two sensors will provide a different location solution if the straight front edge is not perpendicular to the direction of robot arm movement toward the workpiece;

means for calculating, from the location solutions provided by the at least two sensors, an angular correction needed to be applied to the robot arm such that it will approach the front edge of the workpiece perpendicularly; and

means for calculating from the angular correction a corresponding linear correction needed to be applied to the robot arm, because of the angular correction, to ensure that the robot arm will approach the workpiece at a desired relative location.

15. Apparatus as defined in claim 14, and further comprising:

means for applying the angular and linear corrections to the robot arm; and

means for moving the robot arm toward the workpiece in the corrected angular direction, to position a workpiece support of the robot arm directly beneath the workpiece.

16. Apparatus as defined in claim 15, and further comprising:

means for computing a corrected distance through which to move the robot arm; and

means for moving the robot arm through the corrected distance, such that the workpiece support is centered under the workpiece.

17. Apparatus for picking up a workpiece having a generally rectangular shape from a workpiece container, wherein the precise orientation of the container, and of the workpiece within the container, are unknown, the apparatus comprising:

means for positioning a workpiece support of a robot arm in a location adjacent to a predicted workpiece container location;

edge detection means, including at least two sensors mounted on the workpiece support, for detecting a front edge of the container;

means for applying angular and linear corrections to the workpiece support to align it with the detected position of the container;

means for moving the workpiece support into the container and beneath a workpiece to be picked up, wherein the sensors detect a front edge of the workpiece within the container;

means for applying angular and linear corrections to the workpiece support to align it with the detected position of the workpiece and permit picking up the workpiece in alignment with the workpiece support; and

means for applying angular and linear corrections to the workpiece support to move the workpiece into alignment with the container, whereby the workpiece may be withdrawn from the container without unwanted contact.

18. Apparatus as defined in claim 17, wherein:

the workpiece support is mounted at the end of the robot arm, for radial and angular movement about an axis;

the edge detection means include means for recording a first radial distance from the axis to a reference point on the workpiece support, when a first sensor on the workpiece support detects the straight edge, and means for recording a second radial distance from the axis to the reference point when a second sensor on the workpiece support detects the straight edge; and

the apparatus further comprises means for computing the angular and linear corrections from the first and second radial distances and the spacing between the first and second sensors.

19. Apparatus as defined in claim 18, wherein the means for computing the angular and linear corrections includes:

means for computing the angular correction from the inverse tangent of the ratio of the difference between the first and second radial distances and the spacing between the first and second sensors; and

means for computing the linear correction from the product of one of the radial distances and the tangent of the angular correction.

20. Apparatus as defined in claim 17, and further comprising:

means for sensing the lateral position of the substrate on the substrate support; and

means for compensating for any deviation from a predicted lateral position of the substrate on the substrate support.

21. Apparatus as defined in claim 20, wherein:

the means for sensing the lateral position of the substrate includes an additional sensor, for detecting the position of a side edge of the substrate as it is translated linearly.

22. Apparatus as defined in claim 21, wherein:

the apparatus further comprises means for translating the substrate support linearly and detecting the position of a side edge of the substrate support, and means for deriving a predicted lateral position of the substrate edge, based on an assumption of symmetrical positioning of the substrate on the substrate support; and

the means for compensating for any deviation from the predicted lateral position of the substrate includes means for computing a linear correction from the difference between the predicted and detected positions of the substrate edge, and means for computing a radial correction from the linear correction and a known orientation of a container in which the substrate is to be placed.