X-ray inspection system

• US 5,541,856 A
• Filed: 11/08/1993
• Issued: 07/30/1996
• Est. Priority Date: 11/08/1993
• Status: Expired due to Term

• Current Assignee: ThermoSpectra Corp (Thermo Fisher Scientific Incorporated)
• Original Assignee: Imaging Systems Corporation
• Inventors: Hammermeister, David W.
• Primary Examiner(s): Ramirez, Ellis B.
• Assistant Examiner(s): CHOI, KYLE JAEHUN
• Application Number:
  US08/148,801
• Time in Patent Office: 995 Days
• Field of Search: 364/516, 364/550, 364/551.01, 364/552, 324/501, 348/126, 382/8, 382/145, 382/151, 382/152, 378/193, 378/195-197, 378/205, 378/58, 378/177, 378/167
• US Class Current: 378/196
• CPC Class Codes: G01B 15/00 Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons characterised by the use of optical techniques G01B9/00, G01B11/00
• CPC Class Codes: G01N 23/083 the radiation being X-rays
• CPC Class Codes: G01N 23/16 the material being a moving sheet or film

Abstract

An x-ray inspection machine particularly suited for use on an assembly line has a narrow footprint produced by mounting opposed x-ray tube and camera on independently movable stages locked together by way of a central computer rather than a physical member. The stages are aligned by using position sensors at home positions and a fiduciary mark on the part to be inspected. The independent motion of the stages permits a limited range of angled inspections to be obtained without additional angulation mechanisms.

Claims

1. An x-ray inspection system comprising:

a parts carrier transporting a part along a conveyor axis to an inspection position, the part having a width, measured along a transverse axis, perpendicular to the conveyor axis, of less than a predetermined maximum board width;

a first stage positionable along the transverse axis at a plurality of positions including a first home position;

a first position sensor producing a first home signal when the first stage is in the first home position;

an x-ray source mounted on the first stage to direct a beam of x-rays across the inspection position, the x-ray beam centered along a beam axis substantially orthogonal to the conveyor axis and transverse axis;

the x-ray source mounted so that a width of the x-ray beam along the transverse axis is much less than the maximum board width;

a second stage independently positionable along the transverse axis at a plurality of positions including a second home position;

a second position sensor producing a second home signal when the second stage is in the second home position;

an x-ray camera mounted on the second stage to receive a plurality of x-rays across the inspection position to produce an x-ray image;

an electronic computer connected to separate motive means for moving the first and second stages and the parts carrier, and to the home sensors for receiving the first and second home signals, and to the camera for receiving the x-ray image, the electronic computer operating according to a stored program to control;

(i) a first motive means for moving the part along the conveyor axis to the inspection position;

(ii) a second motive means for moving the first and second stages to the first and second home positions respectively and moving the first and second stages a first and second predetermined distance, respectively, from the first and second home positions to an inspection position, a portion of the part on the carrier subtendable by the x-ray beam when said part is at the inspection position;

iii an analyzer to analyze the image from the camera at the inspection position to determine conformance to a parts standard; and

iv a display to display an indication of whether a part conforms to a parts standard.

2. The inspection system of claim 1 wherein the first and second stages are also independently positionable along the conveyor axis.

3. The inspection system of claim 1 wherein at least one of the first and second stages are independently positionable along an axis parallel to the beam axis.

4. The inspection system of claim 1 wherein the first and second predetermined distances are equal.

5. The inspection system of claim 1 wherein the first and second predetermined distance differ by an amount dependent of the separation of the x-ray source and camera.

6. The inspection system of claim 1 wherein the third and fourth predetermined distance differ by an amount dependent on the separation of the x-ray source and camera.

7. The inspection system of claim 1 wherein the x-ray beam is a conical fan x-ray beam including a plurality of x-rays diverging at various angles from a focal spot, the fan beam centered on the beam axis.

8. The inspection system of claim 7 wherein the first and second predetermined distances differ so that the plurality of x-rays received by the camera diverge from the x-ray beam axis.

9. An x-ray inspection system for a part having a fiducial mark at a fiducial position, the mark being detectable by x-rays and being in a predetermined known position, the inspection system comprising:

a parts carrier transporting a part along a conveyor axis to an inspection position, the part having a width, measured along a transverse axis, perpendicular to the conveyor axis, of less than a predetermined maximum board width;

a first stage positionable along the transverse axis at a plurality of positions including a first home position;

an x-ray source mounted on the first stage to direct a beam of x-rays across the inspection position, the x-ray beam centered along a beam axis substantially orthogonal to the conveyor axis and transverse axis;

the x-ray source being so mounted to present a width along the traverse axis much less than the maximum board width;

a second stage independently positionable along the transverse axis at a plurality of positions including a second home position;

an x-ray camera mounted on the second stage to receive a plurality of x-rays across the inspection position along and axis substantially parallel to the beam axis and to produce an x-ray image;

an electronic computer connected to separate motive means for moving the first and second stages and the parts carrier, and to the camera for receiving the x-ray image, the electronic computer operating according to a stored program to control;

(i) a first motive means for moving the part along the conveyor access to the inspection position;

(ii) a second motive means for moving the first and second stages to the first and second home positions respectively and moving the first and second stages a first and second predetermined distance, respectively, from the source and camera home positions to a fiducial mark position;

iii an analyzer to analyze the image from the camera at the fiducial position to determine a correction factor based on the location of the fiducial mark;

iv a third motive means for moving the first and second stages a third and fourth predetermined distance as modified by the correction factor to a inspection position, a portion of the part on the carrier subtendable by the x-ray beam when said part is at the inspection position;

v a second analyzer to analyze the image from the camera at the inspection position to determine conformance to a parts standard; and

vi a display to display an indication of whether a part conforms to the parts standard.

10. The inspection system of claim 9 wherein the first and second stages are also independently positionable along the conveyor axis.

11. The inspection system of claim 9 wherein at least one of the first and second stages are independently positionable along an axis parallel to the beam axis.

12. The inspection system of claim 9 wherein the third and fourth predetermined distances are equal.