×

Compact capacitive acceleration sensor

  • US 5,542,296 A
  • Filed: 01/03/1995
  • Issued: 08/06/1996
  • Est. Priority Date: 01/03/1995
  • Status: Expired due to Term
First Claim
Patent Images

1. An acceleration condition responsive sensor comprising a substrate having a top surface, an electrically conductive detect plate mounted on the top surface of the substrate, an electrically conductive blade member having horizontal and vertical axes, first and second ends and opposite sides and having an attachment portion which is located generally at a center of mass of the blade member, an attachment means for attaching said blade means to said substrate, a source plate portion at said first end and integral resilient beam means for supporting and positioning said source plate portion extending between the attachment portion and the source plate portion, the resilient beam means including a pair of elongated beam members formed by a respective slot adjacent the opposite sides of the blade member and extending in the direction of the vertical axis essentially from the first end to the second end of the blade member, the beam members connected at the first end of the blade member to the source plate portion, the source plate portion extending back in a direction toward the attachment portion from the connection with the beam members, the respective slots having a portion extending parallel to the horizontal axis along the second end of the blade member toward the middle of the second end forming a pair of torsion arms connected to the respective elongated beam members at the second end of the blade member, the respective slots having a terminus closely spaced from one another to form a central pivot, the attachment portion being mounted on the substrate with the source plate portion overlying the detect plate in selected spaced relation, circuit paths disposed on the substrate electrically connected to the detect plate and the electrically conductive blade member to form a capacitor, the source plate portion being movable relative to the detect plate in response to an acceleration force to provide an electrical signal.

View all claims
  • 4 Assignments
Timeline View
Assignment View
    ×
    ×