Method of forming a microstructure with bare silicon ground plane

• US 5,543,013 A
• Filed: 12/01/1994
• Issued: 08/06/1996
• Est. Priority Date: 12/01/1994
• Status: Expired due to Term

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Payne, Richard S., Tsang, Robert W. K., Farash, Jeffrey A.
• Primary Examiner(s): Powell, William
• Application Number:
  US08/348,374
• Time in Patent Office: 614 Days
• Field of Search: 156/643.1, 156/647.1, 156/650.1, 156/651.1, 156/653.1, 156/657.1, 156/659.11, 156/661.11, 156/662.1, 156/628.1, 216/2, 216/41, 437/228, 437/238, 437/241, 437/228 SE, 73/517 R, 73/517 AV
• US Class Current: 438/52
• CPC Class Codes: B81C 1/0015 Cantilevers switches using MEMS H01H1/0036; electrostatic relays using micromechanics H01H59/0009; microelectro-mechanical resonators H03H9/02244
• CPC Class Codes: B81C 2201/0136 by doping limited material regions
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

A method for providing a conductive ground plane beneath a suspended microstructure. A conductive region is diffused into a substrate. Two dielectric layers are added: first a thermal silicon dioxide layer and then a silicon nitride layer. A first mask is used to etch a ring partially through the silicon nitride layer. Then, a second mask is used to etch a hole through both dielectric layers in a region having a perimeter that extends between the inner and outer edges of the ring. This leaves the conductive region exposed in an area surrounded by a ring that has the silicon dioxide layer and a narrow silicon nitride layer. The ring is surrounded by an area in which the silicon dioxide and silicon nitride layers have not been reduced. A spacer silicon dioxide layer is deposited over the dielectric and then a polysilicon layer is deposited and formed into the shape of a the suspended microstructure. When the spacer layer is etched away, the silicon dioxide under the narrow silicon nitride layer is removed, along with the narrow silicon nitride layer, leaving an exposed ground plane surrounded by a dielectric with minimal undercutting.

Claims

1. A method for fabricating an electro-mechanical structure having a suspended microstructure comprising the steps of:

providing a substrate;

diffusing a conductive region into a first portion of the substrate;

forming a first dielectric layer over the substrate;

depositing a second dielectric layer, different from the first dielectric layer, over the first dielectric layer;

removing a portion of the second dielectric layer from a ringed first area above the first portion of the substrate, the ringed first area having an outer edge and an inner edge;

removing substantially all of the second dielectric layer from a second area having a perimeter between the outer edge and the inner edge;

depositing a spacer layer over the second dielectric and the second area;

depositing a conductive layer over the spacer layer, from which the suspended microstructure will be formed;

forming the suspended microstructure in the conductive layer substantially over a region within the outer edge; and

removing the spacer layer.

2. The method according to claim 1, wherein the substrate includes a p-silicon substrate.

3. The method according to claim 2, wherein the conductive region includes an n+ diffused region.

4. The method according to claim 1, wherein the first dielectric layer includes silicon dioxide.

5. The method according to claim 4, wherein the second dielectric layer includes silicon nitride.

6. The method according to claim 5, wherein the spacer layer includes silicon dioxide.

7. The method according to claim 1, wherein the spacer layer includes the same material as the first dielectric layer.

8. The method according to claim 1, wherein the conductive layer includes polysilicon.

9. The method according to claim 1, further comprising the step of providing a conductive path from the conductive layer to the conductive region.

10. A method for fabricating an electro-mechanical structure having a suspended microstructure comprising the steps of:

providing a substrate;

diffusing a conductive region into a first portion of the substrate;

forming a first dielectric layer over the substrate;

depositing a second dielectric layer, different from the first dielectric layer, over the first dielectric layer;

removing substantially all of the second dielectric layer from an area above the first portion of the substrate;

depositing a spacer layer over the second dielectric and the area;

depositing a conductive layer over the spacer layer, from which the suspended microstructure will be formed;

forming the suspended microstructure in the polysilicon layer substantially over a region within the area; and

removing the spacer layer.

11. The method according to claim 10, wherein the substrate includes a p-silicon substrate.

12. The method according to claim 11, wherein the conductive region includes an n+ diffused region.

13. The method according to claim 10, wherein the first dielectric layer includes silicon dioxide.

14. The method according to claim 13, wherein the second dielectric layer includes silicon nitride.

15. The method according to claim 14, wherein the spacer layer includes silicon dioxide.

16. The method according to claim 10, wherein the spacer layer includes the same material as the first dielectric layer.

17. The method according to claim 10, wherein the conductive layer includes polysilicon.

18. The method according to claim 10, further comprising the step of providing a conductive path from the conductive layer to the conductive region.