Glucose sensitive FET sensor and method of making same
First Claim
1. A glucose sensitive FET sensor, comprising:
- a substrate;
a source electrode formed in said substrate;
a drain electrode formed in said substrate;
a hydrogen ion sensitive film formed on said substrate to cover said source electrode and said drain electrode; and
a thin enzyme immobilized membrane formed on said hydrogen ion sensitive film and containing glucose oxidase and gluconolactonase.
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Abstract
A glucose sensitive FET sensor is provided which includes a substrate, a source electrode formed in the substrate, a drain electrode formed in the substrate, a hydrogen ion sensitive film formed on the substrate to cover the source electrode and the drain electrode, and a thin enzyme immobilized membrane formed on the hydrogen ion sensitive film and containing glucose oxidase and gluconolactonase. Also provided is a method of producing a glucose sensitive FET sensor which includes the steps of preparing an enzyme immobilized membrane as a thin film containing glucose oxidase and gluconolactonase and forming the membrane on a hydrogen ion sensitive film which is formed on a substrate to cover a source electrode and a drain electrode, both of which are formed in the substrate.
43 Citations
11 Claims
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1. A glucose sensitive FET sensor, comprising:
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a substrate; a source electrode formed in said substrate; a drain electrode formed in said substrate; a hydrogen ion sensitive film formed on said substrate to cover said source electrode and said drain electrode; and a thin enzyme immobilized membrane formed on said hydrogen ion sensitive film and containing glucose oxidase and gluconolactonase. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of producing a glucose sensitive FET sensor, comprising the steps of:
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preparing an enzyme immobilized membrane as a thin film containing glucose oxidase and gluconolactonase; and forming said membrane on a hydrogen ion sensitive film which is formed on a substrate to cover a source electrode and a drain electrode both of which are formed in said substrate. - View Dependent Claims (8, 9, 10, 11)
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Specification