Torsional vibrators and light deflectors using the torsional vibrator

• US 5,543,956 A
• Filed: 10/06/1993
• Issued: 08/06/1996
• Est. Priority Date: 10/08/1992
• Status: Expired due to Fees

• Current Assignee: Fuji Electric Company Limited (Fuji Electric Systems Company Limited)
• Original Assignee: Fuji Electric Company Limited (Fuji Electric Systems Company Limited)
• Inventors: Nakagawa, Wataru, Sakaue, Satoru, Tsuruoka, Michihiko
• Primary Examiner(s): Shafer, Ricky D.
• Application Number:
  US08/132,291
• Time in Patent Office: 1,035 Days
• Field of Search: 359/223, 359/224, 359/225, 359/226, 359/280, 359/846, 359/847, 359/849, 359/872, 359/298, 359/278, 310/36, 310/37, 310/38, 73/666, 73/667, 73/668
• US Class Current: 359/225.1
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 26/10 Scanning systems
• CPC Class Codes: G06K 7/10653 using flexible or piezoelectric means

Abstract

A second torsional vibrator having an outer frame and a second torsional spring is formed on the outer side of a first torsional vibrator having a pair of torsional springs and a plate member (reflection mirror), with a second torsional vibrator being fixed by the fixed part. The resonant frequency for the first torsional vibrator is set higher than that for the second torsional vibrator. The outer frame in the second torsional vibrator is driven substantially at the resonant frequency of the first torsional vibrator by an electromagnetic or electrostatic force. As a result, it becomes possible to obtain a stable and large scanning angle by using only a small driving force.

Claims

1. A torsional vibrator with at least two degrees of freedom, comprising:

a first vibrator having a plate member and a first torsional spring, said first vibrator having a first resonant frequency;

a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part connected to said first vibrator, and a second torsional spring, said second torsional spring being coaxial with said first torsional spring; and

,

drive means for rotatingly vibrating said responsively acting part substantially at the first resonant frequency of said first vibrator.

2. A light deflector having a torsional vibrator with at least two degrees of freedom, said light deflector comprising:

a first vibrator having a light reflection mirror and a first torsional spring, said first vibrator having a first resonant frequency;

a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part connected to said first vibrator, and a second torsional spring, said second torsional spring being coaxial with said first torsional spring; and

drive means for rotatingly vibrating said responsively acting part substantially at the first resonant frequency of said first vibrator with at least one driving force.

3. A light deflector as claimed in claim 2, wherein said at least one driving force is an electromagnetic force.

4. A light deflector as claimed in claim 2, wherein said at least one driving force is an electrostatic force.

5. A light deflector having a torsional vibrator with at least two degrees of freedom, said light deflector comprising:

a first vibrator having a light reflection mirror and a first torsional spring, said first vibrator having a first resonant frequency;

a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part connected to said first vibrator, and a second torsional spring, said second torsional spring being coaxial with said first torsional spring; and

drive means for driving said responsively acting part with a pair of driving forces, said second spring as its center as a driving force, said responsively acting part being thereby rotatingly vibrated substantially at the first resonant frequency of said first vibrator.

6. A light deflector as claimed in claim 5, wherein said pair of driving forces are electromagnetic forces.

7. A light deflector as claimed in claim 5, wherein said pair of driving forces are electrostatic forces.

8. A light deflector comprising:

a torsional vibrator with at least two degrees of freedom made of magnetic material, including;

a first vibrator having a light reflection mirror and a pair of first torsional springs, said pair of first torsional springs being formed along a center axis of said light reflection mirror, and

a second vibrator having a responsively acting part provided on an outer side of said first vibrator and a pair of second torsional springs, said pair of second torsional springs being formed along said center axis of said light reflection mirror;

a plurality of fixing parts each attached to a respective second torsional spring;

a substrate for supporting said fixing parts of said torsional vibrator with at least two degrees of freedom; and

an electromagnetic driving means for generating an electromagnetic force to rotate said responsively acting part around said center axis of said light reflection mirror, said electromagnetic driving means including first and second yokes and first and second coils arranged opposite to said responsively acting part and on opposite sides of said center axis of said light reflection mirror, said responsively acting part being rotatingly vibrated by said electromagnetic driving means substantially at a resonant frequency of said first vibrator.

9. A light defelctor comprising:

a torsional vibrator with two degrees of freedom made of electrically conductive material, including;

a first vibrator having a light reflection mirror and a pair of first torsional springs, said pair of first torsional springs being formed along a center axis of said light reflection mirror, said first vibrator having a first resonant frequency, and

a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part provided on an outer side of said first vibrator, and a pair of second torsional springs, said pair of second torsional springs being formed along said center axis of said light reflection mirror so as to be coaxial with said pair of first torsional springs;

a substrate for supporting fixed parts of said torsional vibrator with two degrees of freedom; and

an electrostatic driving means for generating an electrostatic force to rotate said responsively acting part around said center axis of said light reflection mirror, said electrostatic driving means including a pair of fixed electrodes arranged opposite to said responsively acting part and on opposite sides of said center axis of said light reflection mirror, said responsively acting part being rotatingly vibrated by said electrostatic driving means substantially at the first resonant frequency of said first vibrator.

10. A light deflector comprising:

a torsional vibrator with two degrees of freedom made of electrically conductive material, including;

a first vibrator having a light reflection mirror and a pair of first torsional springs, said pair of first torsional springs being formed along a center axis of said light reflection mirror, said first vibrator having a first resonant frequency, and

a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part provided on an outer side of said first vibrator, and a pair of second torsional springs, said pair of second torsional springs being formed along said center axis of said light reflection mirror so as to be coaxial with said pair of first torsional springs;

a substrate for supporting fixed parts of said torsional vibrator with two degrees of freedom; and

an electrostatic driving means for generating a pair of electrostatic forces to rotate said responsively acting part around said center axis of said light reflection mirror, said electrostatic driving means including two pairs of fixed electrodes arranged on opposite sides of front and rear surfaces of said responsively acting part and on opposite sides of said center axis of said light reflecting mirror, said responsively acting part being provided with said pair of electrostatic forces and rotatingly vibrated by said electrostatic driving means substantially at the first resonant frequency of said first vibrator.

11. A light deflector comprising:

a torsional vibrator with two degrees of freedom, including;

a first vibrator having a light reflection mirror and a pair of first torsional springs, said pair of first torsional springs being formed along a center axis of said light reflection mirror, said first vibrator having a first resonant frequency, and

a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part provided on an outer side of said first vibrator, and a pair of second torsional springs, said pair of second torsional springs being formed along said center axis of said light reflection mirror so as to be coaxial with said pair of first torsional springs;

a substrate for supporting fixed parts of said torsional vibrator with two degrees of freedom; and

an electromagnetic driving means for generating a pair of electromagnetic forces to rotate said responsively acting part around said center axis of said light reflection mirror, said electromagnetic driving means including first and second permanent magnets bonded to opposite sides of said responsively acting part, and first and second coils fixed to said substrate and arranged opposite said first and second permanent magnets, responsively, said responsively acting part being provided with said pair of electromagnetic forces and being thereby rotatingly vibrated by said electromagnetic driving means substantially at the first resonant frequency of said first vibrator.