Pressure sensor and chip therefor
First Claim
1. A pressure sensor comprising:
- a first pressure sensor; and
an atmospheric pressure sensor;
wherein each sensor has a respective pressure-sensitive element, and a respective amplifying circuit for amplifying a respective output signal from the respective pressure-sensitive element;
wherein the respective amplifying circuit for the first pressure sensor, and the respective pressure-sensitive element and the respective amplifying circuit for the atmospheric pressure sensor are provided on a single chip; and
wherein the single chip is free of the respective pressure-sensitive element for the first pressure sensor.
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Accused Products
Abstract
A pressure sensor is capable of detecting a certain pressure and an atmospheric pressure individually and independently in real time, with miniaturization and light weight. This is attained by providing a pressure sensor comprising a first pressure sensor; and an atmospheric pressure sensor. Each sensor includes a pressure-sensitive element and a circuit for amplifying an output signal from the pressure-sensitive element. The amplifying circuit for the first pressure sensor, and the pressure-sensitive element and the amplifying circuit for the atmospheric pressure sensor are provided on the same chip. The amplifying circuit compensates for nonuniformity in characteristics of the pressure-sensitive element due to temperatures.
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Citations
5 Claims
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1. A pressure sensor comprising:
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a first pressure sensor; and an atmospheric pressure sensor; wherein each sensor has a respective pressure-sensitive element, and a respective amplifying circuit for amplifying a respective output signal from the respective pressure-sensitive element; wherein the respective amplifying circuit for the first pressure sensor, and the respective pressure-sensitive element and the respective amplifying circuit for the atmospheric pressure sensor are provided on a single chip; and wherein the single chip is free of the respective pressure-sensitive element for the first pressure sensor. - View Dependent Claims (2, 3, 4)
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5. A chip for a pressure sensor, comprising:
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a first circuit for amplifying an output signal corresponding to a certain detected pressure; only one pressure-sensitive element; and a second circuit for amplifying an output signal from the pressure-sensitive element; wherein the pressure-sensitive element detects an atmospheric pressure.
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Specification