Optically-based chemical detection system

• US 5,545,897 A
• Filed: 10/04/1994
• Issued: 08/13/1996
• Est. Priority Date: 10/04/1994
• Status: Expired due to Fees

• Current Assignee: Raytheon Company (Rtx Corporation)
• Original Assignee: Santa Barbara Research Center
• Inventors: Jack, Michael D.
• Primary Examiner(s): Fields, Carolyn E.
• Assistant Examiner(s): Glick, Edward J.
• Application Number:
  US08/322,447
• Time in Patent Office: 679 Days
• Field of Search: 250/339.02, 250/339.12, 250/339.13, 250/343, 250/345, 250/349, 250/373, 356/437, 356/438, 356/411, 356/414, 356/416, 356/419, 356/436, 356/439, 359/509, 359/512
• US Class Current: 250/339.13
• CPC Class Codes: G01N 33/0011 Sample conditioning in general G01N1/28
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array electrochemical electrode arrays G01N27/27
• CPC Class Codes: G01N 33/0037 for NOx
• CPC Class Codes: G01N 33/004 for CO, CO2
• CPC Class Codes: Y02A 50/20 Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

Abstract

An in-situe chemical gas or fluid analyzer for vehicles, industrial, environmental and process control applications. As applied to a vehicle (1) having an internal combustion engine, the analyzer includes: (i) a source of electromagnetic radiation (14, 16); and (ii) a sampling cell (12) which collects emission gases of interest and which is capable of withstanding hostile environments while preserving a "clear" optical path between the sensor sampling cell and the source of radiation. The analyzer further includes: (iii) a solid state sensor (24, 26, 28, 30, 32 ) of monolithic construction which selectively detects electromagnetic radiation that is absorbed or emitted by one or more chemical species of interest, that compensates for temporal and spatial variations in illumination level provided by the source, and that provides an electrical signal output, in either analog or digital format, that is related to the measured concentrations. The sensor includes, in combination, a plurality of highly sensitive electromagnetic radiation detectors (26), spectral filters (24) which may utilize multiple layers of deposited dielectric thin films and/or selectively absorbing layers, and low noise electronics which performs a variety of functions including amplification (28), multiplexing (30), analog to digital (A/D) conversion (33), signal processing (32), and input/output (I/O). In a presently preferred embodiment each radiation detector is a thermopile detector that is integrated upon a common substrate with the support electronics and an associated optical bandpass filter.

Claims

1. A vehicle that generates a gas comprised of a plurality of different chemical species, the vehicle comprising:

means for sampling at least a portion of the gas, said sampling means having an optical input port and an optical output port;

an optical source having an output coupled to said optical input port of said sampling means, said optical source generating electromagnetic radiation having wavelengths that are absorbed by predetermined ones of the chemical species; and

a plurality of radiation detector means individual ones of which have an input coupled to said optical output port of said sampling means, individual ones of said radiation detector means comprising an integral input filter for passing wavelengths within a band of wavelengths and being responsive to the band of wavelengths, that includes wavelengths that are absorbed by at least one of the predetermined ones of the chemical species, for determining an amount of the electromagnetic radiation, within the band of wavelengths, that is transmitted through the gas within said sampling means, wherein individual ones of said input filters are deposited upon a radiation receiving surface of an associated one of said radiation detector devices.

2. A vehicle as set forth in claim 1 and further comprising processor means having an input coupled to an output of said plurality of radiation detector means for determining a concentration of the predetermined ones of the chemical species within the gas.

3. A vehicle as set forth in claim 1 wherein individual ones of said radiation detector means are comprised of a radiation detector device that is fabricated within or upon a surface of a substrate, and further comprising a plurality of amplifier circuits individual ones of which have an input coupled to an output of one of said radiation detector devices, said plurality of amplifier circuits being fabricated within or upon the surface of said substrate.

4. A vehicle as set forth in claim 1 wherein individual ones of said integral input filters is comprised of a multi-layered filter that is deposited upon said radiation receiving surface of said radiation detector device.

5. A vehicle as set forth in claim 3 wherein individual ones of said radiation detector means are further comprised of a selectively absorbing film deposited upon a radiation receiving surface of said detector device.

6. A vehicle as set forth in claim 1 wherein individual ones of said radiation detector means are comprised of a thermopile radiation detector that is fabricated within or upon a surface of a substrate.

7. A vehicle as set forth in claim 1 wherein said optical source generates electromagnetic radiation having wavelengths within a least one spectral band selected from the group consisting of the ultraviolet spectral band, the visible spectral band, the infrared spectral band, and the far infrared spectral band.

8. A vehicle as set forth in claim 1 and further comprising means, coupled to said output port, for diffusing electromagnetic radiation passing through said output port.

9. A vehicle as set forth in claim 1 wherein said sampling means is comprised of a sampling cell having at least one window that is substantially transparent to the electromagnetic radiation having wavelengths that are absorbed by predetermined ones of the chemical species.

10. A vehicle as set forth in claim 9 and further comprising means for retarding an accumulation of an emission gas constituent upon said window.

11. A vehicle as set forth in claim 1 wherein said sampling means has a plurality of apertures for forming said input port and said output port.

12. A vehicle as set forth in claim 1 wherein said optical source and at least said plurality of radiation detector means are located within said sampling means.

13. A vehicle that generates a gas comprised of a plurality of different chemical species, the vehicle comprising:

means for sampling at least a portion of the gas, said sampling means having an optical input port and an optical output port;

an optical source having an output coupled to said optical input port of said sampling means, said optical source generating electromagnetic radiation having wavelengths that are absorbed by predetermined ones of the chemical species; and

a plurality of radiation detector means individual ones of which have an input coupled to said optical output port of said sampling means, individual ones of said radiation detector means being responsive to a band of wavelengths that includes wavelengths that are absorbed by at least one of the predetermined ones of the chemical species for determining an amount of the electromagnetic radiation, within the band of wavelengths, that is transmitted through the gas within said sampling means;

wherein said sampling means is comprised of a sampling cell having at least one window that is substantially transparent to the electromagnetic radiation having wavelengths that are absorbed by predetermined ones of the chemical species; and

further comprising means for removing an accumulation of an emission gas constituent from said window.

14. A spectroscopic system, comprising:

means for sampling a gas or a liquid that is comprised of a plurality of different chemical species, said sampling means having an optical input port and an optical output port;

an optical source having an output coupled to said optical input port of said sampling means, said optical source generating electromagnetic radiation having wavelengths that are absorbed by predetermined ones of the chemical species; and

a plurality of radiation detector means individual ones of which have an input coupled to said optical output port of said sampling means, individual ones of said radiation detector means being responsive to a band of wavelengths that includes wavelengths that are absorbed by at least one of the predetermined ones of the chemical species for determining an amount of the electromagnetic radiation, within the band of wavelengths, that is transmitted through the sample within said sampling means, wherein individual ones of said radiation detector means are comprised of a radiation detector device that is fabricated within or upon a surface of a common substrate, and further comprising a plurality of amplifier circuits individual ones of which have an input coupled to an output of one of said radiation detector devices, said plurality of amplifier circuits also being fabricated within or upon the surface of said common substrate; and

wherein individual ones of said radiation detector means are further comprised of an input filter for passing wavelengths within the band of wavelengths, said input filter being a multi-layered filter that is deposited upon a radiation receiving surface of said radiation detector device.

15. A spectrographic system as set forth in claim 14 wherein individual ones of said radiation detector means are comprised of a thermopile radiation detector that is fabricated within or upon a surface of the common substrate.

16. A spectrographic system as set forth in claim 14 and further comprising:

a multiplexer circuit having a plurality of inputs individual ones of which are coupled to an output of one of said amplifier circuits;

an analog to digital converter having an input coupled to an output of said multiplexer circuit; and

processor means having an input coupled to an output of said analog to digital converter for determining a concentration of the predetermined ones of the chemical species within the sample, wherein

at least said multiplexer circuit and said analog to digital converter are fabricated within or upon the surface of the common substrate.

17. A spectrographic system as set forth in claim 14 wherein said optical source generates electromagnetic radiation having wavelengths within a least one spectral band selected from the group consisting of the ultraviolet spectral band, the visible spectral band, the infrared spectral band, and the far infrared spectral band.

18. A spectrographic system as set forth in claim 14 and further comprising means, coupled to said output port, for diffusing the electromagnetic radiation that passes through said output port.

19. A spectrographic system as set forth in claim 14 wherein said sampling means includes at least one window that is substantially transparent to the electromagnetic radiation having wavelengths that are absorbed by predetermined ones of the chemical species.

20. A spectrographic system as set forth in claim 19 and further comprising means for retarding an accumulation of a constituent of said gas or liquid upon said at least one window.

21. A spectrographic system comprising:

means for sampling a gas or a liquid that is comprised of a plurality of different chemical species, said sampling means having an optical input port and an optical output port;

an optical source having an output coupled to said optical input port of said sampling means, said optical source generating electromagnetic radiation having wavelengths that are absorbed by predetermined ones of the chemical species; and

a plurality of radiation detector means individual ones of which have an input coupled to said optical output port of said sampling means, individual ones of said radiation detector means being responsive to a band of wavelengths that includes wavelengths that are absorbed by at least one of the predetermined ones of the chemical species for determining an amount of the electromagnetic radiation, within the band of wavelengths, that is transmitted through the sample within said sampling means, wherein individual ones of said radiation detector means are comprised of a radiation detector device that is fabricated within or upon a surface of a common substrate, and further comprising a plurality of amplifier circuits individual ones of which have an input coupled to an output of one of said radiation detector devices, said plurality of amplifier circuits also being fabricated within or upon the surface of said common substrate;

wherein said sampling means includes at least one window that is substantially transparent to the electromagnetic radiation having wavelengths that are absorbed by predetermined ones of the chemical species;

and further comprising means for removing an accumulation of a constituent of said gas or liquid from said at least one window.

22. An electronic component for use in detecting a concentration of individual ones of a plurality of chemical species, comprising:

an optical input port;

a substrate;

a plurality of radiation detector means individual ones of which have an input coupled to said optical input port, individual ones of said radiation detector means being responsive to a band of wavelengths that includes wavelengths that are absorbed by at least one of the predetermined ones of the chemical species, individual ones of said radiation detector means being comprised of a radiation detector device that is fabricated within or upon a surface of the substrate; and

a plurality of amplifier circuits individual ones of which have an input coupled to an output of one of said radiation detector devices, said plurality of amplifier circuits also being fabricated within or upon the surface of said substrate;

wherein individual ones of said radiation detector means are further comprised of an input filter for passing wavelengths within the band of wavelengths, said input filter being a multi-layered filter that is deposited upon a radiation receiving surface of said radiation detector device.

23. An electronic component as set forth in claim 22 wherein individual ones of said radiation detector means are further comprised of a selectively absorbing film for absorbing incident electromagnetic radiation.

24. An electronic component as set forth in claim 22 wherein individual ones of said radiation detector means are comprised of a thermopile radiation detector that is fabricated within or upon a surface of the substrate.

25. An electronic component as set forth in claim 22 and further comprising:

a multiplexer circuit having a plurality of inputs individual ones of which are coupled to an output of one of said amplifier circuits;

an analog to digital converter having an input coupled to an output of said multiplexer circuit; and

processor means having an input coupled to an output of said analog to digital converter for determining a concentration of the predetermined ones of the chemical species within a sample, wherein at least said multiplexer circuit and said analog to digital converter are fabricated within or upon the surface of the substrate.

26. An electronic component as set forth in claim 22 wherein individual ones of said radiation detector means are responsive to electromagnetic radiation having wavelengths within a spectral band selected from the group consisting of the ultraviolet spectral band, the visible spectral band, the infrared spectral band, and the far infrared spectral band.

27. An electronic component as set forth in claim 22 wherein at least one of said radiation detector means is responsive to electromagnetic radiation that is absorbed by CO.

28. An electronic component as set forth in claim 22 wherein at least one of said radiation detector means is responsive to electromagnetic radiation that is absorbed by hydrocarbons.

29. An electronic component as set forth in claim 22 wherein at least one of said radiation detector means is responsive to electromagnetic radiation that is absorbed by CO₂.

30. An electronic component as set forth in claim 22 wherein at least one of said radiation detector means is responsive to electromagnetic radiation that is absorbed by NO.

31. An electronic component as set forth in claim 22 wherein at least one of said radiation detector means is responsive to electromagnetic radiation that is absorbed by H₂ O.

32. An electronic component as set forth in claim 22 wherein at least one of said radiation detector means is responsive to electromagnetic radiation that is not strongly absorbed by any of the plurality of chemical species.

33. An electronic component as set forth in claim 22 and further comprising a plurality of input/output terminals, at least one of said terminals being coupled to means for providing a data output from said electronic component, the data output being expressive of an amount of electromagnetic radiation that is detected by individual ones of said plurality of radiation detector means.

34. A multispectral sensor system for sensing one or more different chemical species within a flow, comprising:

means for sampling at least a portion of the flow, said sampling means having an optical input port and an optical output port;

an optical source having an output coupled to said optical input port of said sampling means, said optical source generating electromagnetic radiation having wavelengths that are absorbed by predetermined ones of the chemical species; and

a monolithic sensor assembly comprised of a plurality of radiation detector means individual ones of which have an input coupled to said optical output port of said sampling means, individual ones of said radiation detector means being responsive to a band of wavelengths that includes wavelengths that are absorbed by at least one of the predetermined ones of the chemical species for determining an amount of the electromagnetic radiation, within the band of wavelengths, that is transmitted through the sampled portion of the flow;

wherein individual ones of said radiation detector means are fabricated upon or within a surface of a common substrate and are comprised of a radiation detector device having an integral input filter for passing wavelengths within the band of wavelengths, said integral input filter being deposited upon a radiation receiving surface of said radiation detector device.

35. A sensor system as set forth in claim 34 and further comprising processor means having an input coupled to an output of said plurality of radiation detector means for determining a concentration of predetermined ones of the chemical species.

36. A sensor system as set forth in claim 34, and further comprising a plurality of amplifier circuits individual ones of which have an input coupled to an output of one of said radiation detector devices, said plurality of amplifier circuits being fabricated within or upon the surface of said common substrate.

37. A sensor system as set forth in claim 34 wherein individual ones of said integral input filters are a multi-layered filter that is deposited upon said radiation receiving surface of said radiation detector device.

38. A sensor system as set forth in claim 34 wherein individual ones of said radiation detector means are further comprised of a multilayer selectively absorbing dark film.

39. A sensor system as set forth in claim 34 wherein individual ones of said radiation detector means are comprised of a thermopile radiation detector that is fabricated within or upon a surface of said common substrate.

40. A sensor system as set forth in claim 34 wherein said optical source generates electromagnetic radiation having wavelengths within a least one spectral band selected from the group consisting of the ultraviolet spectral band, the visible spectral band, the infrared spectral band, and the far infrared spectral band.

41. A sensor system as set forth in claim 34 and further comprising means, coupled to said output port, for diffusing electromagnetic radiation that passes through said output port.

42. A sensor system as set forth in claim 34 wherein said sampling means is comprised of a sampling cell having at least one window that is substantially transparent to the electromagnetic radiation having wavelengths that are absorbed by predetermined ones of the chemical species.

43. A sensor system as set forth in claim 42 and further comprising means for retarding an accumulation of a flow constituent upon said window.

44. A sensor system as set forth in claim 34 wherein said sampling means has a plurality of apertures for forming said input port and said output port.

45. A sensor system as set forth in claim 34 wherein said optical source and at least said plurality of radiation detector means are located within said sampling means.

46. A multispectral sensor system for sensing one or more different chemical species within a flow, comprising:

means for sampling at least a portion of the flow, said sampling means having an optical input port and an optical output port;

an optical source having an output coupled to said optical input port of said sampling means, said optical source generating electromagnetic radiation having wavelengths that are absorbed by predetermined ones of the chemical species; and

a monolithic sensor assembly comprised of a plurality of radiation detector means individual ones of which have an input coupled to said optical output port of said sampling means, individual ones of said radiation detector means being responsive to a band of wavelengths that includes wavelengths that are absorbed by at least one of the predetermined ones of the chemical species for determining an amount of the electromagnetic radiation, within the band of wavelengths, that is transmitted through the sampled portion of the flow;

wherein said sampling means is comprised of a sampling cell having at least one window that is substantially transparent to the electromagnetic radiation having wavelengths that are absorbed by predetermined ones of the chemical species;

and further comprising means for removing an accumulation of a flow constituent from said window.