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Exposure control apparatus including a spatial light modulator

  • US 5,546,128 A
  • Filed: 03/10/1995
  • Issued: 08/13/1996
  • Est. Priority Date: 08/20/1991
  • Status: Expired due to Fees
First Claim
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1. An exposure control apparatus comprising:

  • a lens system;

    a spatial light modulator receiving light passing through said lens system and having a plurality of controllable elements;

    a photoelectric conversion device for converting said received light reflected from said spatial light modulator into an electrical signal; and

    control means for controlling, individually and simultaneously, the plurality of controllable elements of said spatial light modulator on the basis of the output from said photoelectric conversion device, in order to switch the states of the controllable elements between a first state, in which at least a portion of said received light is guided to said photoelectric conversion device, and a second state in which said received light is not guided to said photoelectric conversion device.

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