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TFT matrix liquid crystal device having data source lines and drain means of etched and doped single crystal silicon

  • US 5,546,204 A
  • Filed: 05/26/1994
  • Issued: 08/13/1996
  • Est. Priority Date: 05/26/1994
  • Status: Expired due to Term
First Claim
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1. An active matrix for a liquid crystal display comprising:

  • a substrate;

    a plurality of parallel data source lines disposed on said substrate;

    a plurality of drain means disposed proximate to said data source lines, wherein the plurality of data source lines and drain means are formed from a layer of single crystal silicon which has been etched and selectively doped;

    a transparent insulating layer disposed over said data source lines, said substrate and a portion of said drain means;

    a plurality of parallel gate lines disposed over the insulating layer so as to intersect said data source lines and said drain means to form a plurality of contactless thin film transistors (TFT'"'"'s); and

    a plurality of transparent electrodes disposed over the insulating layer, each of the transparent electrodes in electrical contact with one of the plurality of drain means.

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