Method and system for analyzing plasma data
First Claim
1. A method for analyzing data derived from a plasma including a plurality of gaseous species, said method comprising:
- inputting said data into a computer;
indicating to said computer a gaseous specie to be assumed present in said plasma;
automatically calibrating via said computer said data based on said indicated gaseous specie; and
identifying at least one of said plurality of gaseous species.
1 Assignment
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Accused Products
Abstract
Analysis of plasma data indicative of gaseous species therein, such as Optical Emission Spectroscopy (OES) data, is aided through the interactive use of a computer. OES data may be calibrated by the computer with minimal input from the user regarding a gas the user knows or suspects is present. The computer then assumes the presence of that gas and assigns relative intensity peaks to known wavelengths for that gas, allowing calibration to take place. Selective identification of particular gases from the data is also possible. Used in conjunction with selective identification, a learning function allows the system to improve the accuracy of future gaseous species identification. Certain characteristics of a particular gas over time, such as intensity at a particular wavelength or at all wavelengths, may also be automatically plotted.
46 Citations
39 Claims
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1. A method for analyzing data derived from a plasma including a plurality of gaseous species, said method comprising:
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inputting said data into a computer; indicating to said computer a gaseous specie to be assumed present in said plasma; automatically calibrating via said computer said data based on said indicated gaseous specie; and identifying at least one of said plurality of gaseous species. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A method for identifying gaseous species in a plasma, comprising:
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performing a plasma process, wherein a plasma comprising a plurality of gaseous species is created; obtaining data from said plasma process; inputting said data into a computer; indicating to said computer a gaseous specie to be assumed present in said plurality of gaseous species; automatically calibrating via said computer said data based on said indicated gaseous specie; and identifying at least one of said plurality of gaseous species. - View Dependent Claims (25, 26, 27, 28)
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29. A system for assisting an analyst with analyzing data derived from a plasma including a plurality of gaseous species, said system comprising:
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a computer; means for inputting said data into said computer; means for indicating to said computer a gaseous specie to be assumed present in said plurality of gaseous species; means for automatically calibrating said data based on said indicated gaseous specie; and means for automatically identifying at least one of said plurality of gaseous species. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A method for analyzing data derived from a plasma including a plurality of gaseous species, said data including wavelength data and at least one data peak, said method comprising:
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inputting said data into a computer; indicating to said computer one of a gaseous specie and a wavelength to be associated with said at least one data peak; automatically calibrating via said computer said data based on said indicated one of a gaseous specie and a wavelength; and identifying at least one of said plurality of gaseous species.
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Specification