Optical waveguide device and manufacturing method of the same

• US 5,546,494 A
• Filed: 12/15/1994
• Issued: 08/13/1996
• Est. Priority Date: 07/08/1992
• Status: Expired due to Fees

• Current Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Original Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Inventors: Eda, Kazuo
• Primary Examiner(s): Ullah, Akm E.
• Application Number:
  US08/356,086
• Time in Patent Office: 607 Days
• Field of Search: 385/12, 385/14, 385/129, 385/130, 385/131
• US Class Current: 385/129
• CPC Class Codes: G02B 2006/12097 Ridge, rib or the like
• CPC Class Codes: G02B 2006/1215 Splitter
• CPC Class Codes: G02B 2006/12159 Interferometer
• CPC Class Codes: G02B 2006/12176 Etching
• CPC Class Codes: G02B 6/125 Bends, branchings or intersections
• CPC Class Codes: G02B 6/13 Integrated optical circuits characterised by the manufacturing method

Abstract

An optical waveguide device comprises a first transparent dielectric substrate having a predetermined index of refraction and a predetermined coefficient of thermal expansion, and a second transparent dielectric substrate having the same index of refraction and coefficient of thermal expansion as the first transparent dielectric substrate. An intervening layer having an index of refraction smaller than the index of refraction of the first and second transparent dielectric substrates is interposed between the first and second transparent dielectric substrates. An optical waveguide path is formed in at least either of the first and second transparent dielectric substrates.

Claims

1. An optical waveguide device comprising:

a glass substrate having a predetermined index of refraction, said glass substrate having opposite first and second surfaces;

a transparent monocrystalline dielectric substrate having an index of refraction larger than said glass substrate, said transparent monocrystalline dielectric substrate having opposite first and second surfaces;

said first surface of said glass substrate being directly bonded onto said first surface of said transparent monocrystalline dielectric substrate with coupling of hydrogen or hydroxyl group; and

an optical waveguide path formed in said transparent monocrystalline dielectric substrate, wherein light is confined by the difference of refractive indexes between said glass substrate and said transparent monocrystalline dielectric substrate.

2. An optical waveguide in accordance with claim 1, wherein said transparent monocrystalline dielectric substrate is made of electrooptical material.

3. An optical waveguide in accordance with claim 2, wherein said transparent monocrystalline dielectric substrate is made of lithium niobate or lithium tantalate.

4. An optical waveguide in accordance with claim 1, further comprising:

a thicker portion provided in said transparent monocrystalline dielectric substrate, wherein light is three-dimensionally confined.

5. An optical waveguide device comprising:

a glass substrate having a predetermined index of refraction, said glass substrate having opposite first and second surfaces;

a transparent monocrystalline dielectric substrate having an index of refraction larger than said glass substrate, said transparent monocrystalline dielectric substrate having opposite first and second surfaces;

said first surface of said glass substrate being directly bonded onto said first surface of said transparent monocrystalline dielectric substrate with coupling of oxygen and component atoms of said glass substrate and said transparent monocrystalline dielectric substrate; and

an optical waveguide path formed in said transparent monocrystalline dielectric substrate, wherein light is confined by the difference of refractive indexes between said glass substrate and said transparent monocrystalline dielectric substrate.

6. An optical waveguide in accordance with claim 5, wherein said transparent monocrystalline dielectric substrate is made of electrooptical material.

7. An optical waveguide in accordance with claim 6, wherein said transparent monocrystalline dielectric substrate is made of lithium niobate or lithium tantalate.

8. An optical waveguide in accordance with claim 5, further comprising:

a thicker portion provided in said transparent monocrystalline dielectric substrate, wherein light is three-dimensionally confined.

9. An optical waveguide device comprising:

a glass substrate having a predetermined index of refraction, said glass substrate having opposite first and second surfaces;

a transparent monocrystalline dielectric substrate having an index of refraction larger than said glass substrate, said transparent monocrystalline dielectric substrate having opposite first and second surfaces, said first surface of said transparent monocrystalline dielectric substrate having a non-monocrystalline intervening layer having an index of refraction smaller than said index of refraction of said transparent monocrystalline dielectric substrate;

said first surface of said glass substrate being directly bonded onto an opposite surface of said non-monocrystalline intervening layer on said first surface of said transparent monocrystalline dielectric substrate with coupling of hydrogen or hydroxyl group; and

an optical waveguide path formed at a portion adjacent to said non-monocrystalline intervening layer in said transparent monocrystalline dielectric substrate, wherein light is confined by the difference of refractive indexes among said glass substrate, said transparent monocrystalline dielectric substrate and said non-monocrystalline intervening layer.

10. An optical waveguide in accordance with claim 9, wherein said transparent monocrystalline dielectric substrate is made of electrooptical material.

11. An optical waveguide in accordance with claim 10, wherein said transparent monocrystalline dielectric substrate is made of lithium niobate or lithium tantalate.

12. An optical waveguide in accordance with claim 9, wherein said non-monocrystalline intervening layer is made of metallic oxide.

13. An optical waveguide in accordance with claim 9, wherein said non-monocrystalline intervening layer includes silicon.

14. An optical waveguide in accordance with claim 9, wherein said non-monocrystalline intervening layer is made of silicon dioxide or silicon nitride.

15. An optical waveguide in accordance with claim 9, further comprising:

a thicker portion provided in said transparent monocrystalline dielectric substrate, wherein light is three-dimensionally confined.

16. An optical waveguide in accordance with claim 9, wherein said non-monocrystalline intervening layer has a thickness more than one wavelength of light to be confined.

17. An optical waveguide device comprising:

a glass substrate having a predetermined index of refraction, said glass substrate having opposite first and second surfaces;

a transparent monocrystalline dielectric substrate having an index of refraction larger than said glass substrate, said transparent monocrystalline dielectric substrate having opposite first and second surfaces, said first surface of said transparent monocrystalline dielectric substrate having a non-monocrystalline intervening layer having an index of refraction smaller than said index of refraction of said transparent monocrystalline dielectric substrate;

said first surface of said glass substrate being directly bonded onto an opposite surface of said non-monocrystalline intervening layer on said first surface of said transparent

said first surface of said glass substrate being directly bonded onto an opposite surface of said non-monocrystalline intervening layer on said first surface of said transparent monocrystalline dielectric substrate with coupling of oxygen and component atoms of said glass substrate and said nonmonocrystalline intervening layer; and

an optical waveguide path formed at a portion adjacent to said non-monocrystalline intervening layer in said transparent monocrystalline dielectric substrate, wherein light is confined by the difference of refractive indexes among said glass substrate, said transparent monocrystalline dielectric substrate and said non-monocrystalline intervening layer.

18. An optical waveguide in accordance with claim 17, wherein said transparent monocrystalline dielectric substrate is made of electrooptical material.

19. An optical waveguide in accordance with claim 18, wherein said transparent monocrystalline dielectric substrate is made of lithium niobate or lithium tantalate.

20. An optical waveguide in accordance with claim 17, wherein said non-monocrystalline intervening layer is made of metallic oxide.

21. An optical waveguide in accordance with claim 17, wherein said non-monocrystalline intervening layer includes silicon.

22. An optical waveguide in accordance with claim 17, wherein said non-monocrystalline intervening layer is made of silicon dioxide or silicon nitride.

23. An optical waveguide in accordance with claim 17, wherein said non-monocrystalline intervening layer is made of glass.

24. An optical waveguide in accordance with claim 17, further comprising:

a thicker portion provided in said transparent monocrystalline dielectric substrate, wherein light is three-dimensionally confined.

25. An optical waveguide in accordance with claim 17, wherein said non-monocrystalline intervening layer has a thickness more than one wavelength of light to be confined.