Dielectric ceramic composition and package made of the same composition for packaging semiconductor

• US 5,547,908 A
• Filed: 07/20/1994
• Issued: 08/20/1996
• Est. Priority Date: 07/30/1993
• Status: Expired due to Term

• Current Assignee: Kyocera Corporation
• Original Assignee: Kyocera Corporation
• Inventors: Shikata, Kunihide, Kubota, Takeshi, Sata, Akifumi, Furuzawa, Akira
• Primary Examiner(s): BRUNSMAN, DAVID M
• Application Number:
  US08/278,175
• Time in Patent Office: 762 Days
• Field of Search: 501/136
• US Class Current: 501/136
• CPC Class Codes: C04B 35/465 based on alkaline earth metal titanates
• CPC Class Codes: H01B 3/12 ceramics
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 23/15 Ceramic or glass substrates H01L23/142, H01L23/145, H01L23/147 take precedence
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

A dielectric ceramic composition having a high dielectric constant and a coefficient of thermal expansion nearly comparable with that of alumina, and a package for packaging semiconductor. The dielectric ceramic composition contains 0.1 to 0.6 parts by weight of manganese reckoned as an oxide per 100 parts by weight of chief components of the formula xTiO₂ •yMgO•zSrO or of the formula xTiO₂ •yMgO•zCaO wherein x, y and z are numerals that lie within given ranges. The package for packaging semiconductor comprises a package body composed of alumina and having a semiconductor-mounting portion, and a capacitor made up of a dielectric layer and an electrode layer provided on said semiconductor-mounting portion, wherein the dielectric layer is composed of the TiO₂ --MgO--SrO--MnO₂ -type dielectric ceramic or the TiO₂ --MgO--CaO--MnO₂ -type dielectric ceramic.

Claims

1. A dielectric ceramic composition which contains manganese in an amount of from 0.1 to 0.6 parts by weight calculated as an oxide per 100 parts by weight of chief components which are represented in mole percent by the following formula

View Dependent Claims (2, 3, 4, 5, 6, 7)

2. A dielectric ceramic composition according to claim 1, wherein the TiO₂ content (x) in the chief components is from 57 to 99 mol %, the MgO content (y) is from 1 to 33.3 mol %, and the SrO content (z) is from 1 to 28 mol %.

3. A dielectric ceramic composition according to claim 1, wherein the TiO₂ content (x) in the chief components is from 72 to 85 mol %, the MgO content (y) is from 3 to 5 mol %, and the SrO content (z) is from 8 to 24 mol %.

4. A dielectric ceramic composition according to claim 1, wherein manganese is contained in an amount of from 0.2 to 0.4 parts by weight reckoned as an oxide per 100 parts by weight of the chief components.

5. A dielectric ceramic composition according to claim 1, wherein the TiO₂ content (x), MgO content (y) and SrO content (z) of the chief components lie within a region surrounded by the following points B, C, D, E and F,

6. A dielectric ceramic composition according to claim 1, wherein the TiO₂ content (x), MgO content (y) and SrO content (z) of the chief components lie within a region surrounded by the following points B, C, G, E and F,

7. A dielectric ceramic composition according to claim 1, wherein manganese is contained in an amount of from about 0.2 to about 0.4 parts by weight reckoned as an oxide per 100 parts by weight of chief components which comprise about 79 to about 80 mol % of TiO₂, about to about 5 mol % of MgO, and about 16 to 17 mol % of SrO.

8. A dielectric ceramic composition which contains manganese in an amount of from 0.1 to 0.6 parts by weight calculated as an oxide per 100 parts by weight of chief components which are represented in mole percent by the following formula

View Dependent Claims (9, 10, 11, 12, 13)

9. A dielectric ceramic composition according to claim 8, wherein the TiO₂ content (x) in the chief components is from 73.3 to 99 mol %, the MgO content (y) is from 1 to 33.3 mol %, and the CaO content (z) is from 1 to 16.7 mol %.

10. A dielectric ceramic composition according to claim 8, wherein the TiO₂ content (x) in the chief components is from 73.3 to 99 mol %, the MgO content (y) is from 0 to 10 mol %, and the CaO content (z) is from 1 to 16.7 mol %.

11. A dielectric ceramic composition according to claim 8, wherein manganese is contained in an amount of from 0.2 to 0.4 parts by weight reckoned as an oxide per 100 parts by weight of the chief components.

12. A dielectric ceramic composition according to claim 8, wherein the TiO₂ content (x), MgO content (y) and CaO content (z) of the chief components lie within a region surrounded by the following points B, G, E and A,

13. A dielectric ceramic composition according to claim 8, wherein manganese is contained in an amount of from about 0.2 to about 0.4 parts by weight as an oxide per 100 parts by weight of chief components comprising 83 to 99 mol % of TiO₂, 0 to 5 mol % of MgO, and 1 to 10 mol % of CaO.