Extended drain resurf lateral DMOS devices

• US 5,548,147 A
• Filed: 01/05/1995
• Issued: 08/20/1996
• Est. Priority Date: 04/08/1994
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Mei, Chia-Cu P.
• Primary Examiner(s): WOJCIECHOWICZ, EDWARD JOSEPH
• Application Number:
  US08/369,973
• Time in Patent Office: 593 Days
• Field of Search: 257/347, 257/408, 257/333-336, 257/344, 257/346, 257/389-395, 437/15, 437/43, 437/44, 437/235, 437/913
• US Class Current: 257/333
• CPC Class Codes: H01L 29/66659 with asymmetry in the channel direction, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
• CPC Class Codes: H01L 29/7835 with asymmetrical source and drain regions, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs

Abstract

A high voltage PMOS or NMOS transistor 7 has improved on-resistance by truncating gate field oxide 43 so that drain region 42 may be implanted closer to channel region 49 than possible otherwise. By shortening the physical distance d2 between drain 42 and channel region 49, the drain to source on-resistance of the high voltage device is reduced and the performance of high voltage device 7 is thereby improved.

Claims

1. A method for making a high voltage metal oxide semiconductor, MOS, device, comprising the steps of:

providing a high voltage MOS device having a lightly doped drift region;

growing a thick field oxide feature such that a width of the thick gate field oxide feature is equal to a minimum growing feature size;

removing a portion of the grown thick gate field oxide feature to expose a portion of the lightly doped drift region, such that the resultant width of the thick gate field oxide feature is smaller than the minimum grown feature size of the thick gate field oxide feature; and

forming a drain in the exposed portion of the lightly doped drift region such that an extended portion of the drain is adjacent to the thick gate oxide feature.

2. The method of claim 1, wherein:

the step of providing a high voltage MOS device provides a high voltage PMOS device.

3. The method of claim 1, wherein:

the step of providing a high voltage MOS device provides a device having a channel region adjacent to the lightly doped drift region; and

the step of removing a portion of the thick gate field oxide is controlled so that the extended portion of the drain adjacent to gate field oxide feature is a predetermined distance from the channel region which is a minimum distance to prevent voltage breakdown of the drift region by an operating voltage in the range of approximately 15 to 100 volts.

4. A high voltage metal oxide semiconductor, MOS, device comprising:

a thick gate field oxide feature overlying a lightly doped drift region;

a channel region adjacent to the lightly doped drift region and spaced apart from the thick gate region by a portion of the lightly doped drift region;

a gate electrode which overlies a portion of the channel region and a portion of the thick gate field oxide and being insulated from the channel region by a thin gate oxide, the gate electrode having a first edge which is near the channel region and a second edge which is opposite the first edge such that the second edge is above the thick field oxide feature, the second edge being a first distance from the intersection of the lightly doped drift region and the channel region; and

a highly doped drain region which extends below the thick gate field oxide feature such that an edge of the drain region is a second distance from the intersection of the lightly doped drift region and the channel region, such that the second distance is less than the first distance, whereby R_ds(on) of the high voltage MOS device is reduced.

5. The high voltage MOS device of claim 4, wherein:

the second distance is approximately a minimum distance required to prevent an operating voltage in the range of approximately 15 to 100 volts applied across the source and drain from causing voltage breakdown in the drift region.