Optical three-dimensional shape measuring apparatus having a device for accurately positioning and measuring an object

• US 5,548,405 A
• Filed: 12/20/1994
• Issued: 08/20/1996
• Est. Priority Date: 12/22/1993
• Status: Expired due to Term

• Current Assignee: Nikon Corporation, Nikon Engineering Co. Ltd. (Nikon Corporation)
• Original Assignee: Nikon Corporation, Nikon Engineering Co. Ltd. (Nikon Corporation)
• Inventors: Motosugi, Kazutoshi
• Primary Examiner(s): Rosenberger, Richard A.
• Assistant Examiner(s): KIM, ROBERT H
• Application Number:
  US08/360,040
• Time in Patent Office: 609 Days
• Field of Search: 356/376, 356/375, 356/377, 356/384, 356/385, 250/561, 250/560, 250/563, 250/559.21, 250/559.22, 250/559.24
• US Class Current: 356/601
• CPC Class Codes: G01B 11/005 coordinate measuring machines
• CPC Class Codes: G01B 11/24 for measuring contours or curvatures

Abstract

An apparatus for measuring a three-dimensional shape of an object to be measured provided with a fitting portion, comprises: a body base; a rotation stage set on the base; an XY stage set on the rotation stage and provided with a fitting portion, the XY stage being movable in a predetermined horizontal direction and in a horizontal direction perpendicular thereto independently of rotation of the rotation stage; a drive control device for independently driving and controlling the rotation stage and XY stage; a holding device for holding the object to be measured, the holding device being provided with a fit portion to fit with the fitting portion of the XY stage, and a fit portion to fit with the fitting portion of the object to be measured; an R stage set above the holding device, the R stage being movable in a horizontal direction and in a direction of the diameter of the rotation stage; a first optical displacement gage provided on a lower surface of the R stage so that an optical axis thereof becomes parallel to a rotational axis of the rotation stage; a Z stage provided beside the holding device, the Z stage being movable in a direction parallel to the rotational axis; and a second optical displacement gage provided on a side surface of the Z stage so that an optical axis thereof becomes perpendicular to the rotational axis of the rotation stage.

Claims

1. An apparatus for measuring a three-dimensional shape of an object to be measured provided with a fitting portion, comprising:

a body base;

a rotation stage set on said base;

an XY stage set on said rotation stage and provided with a fitting portion, said XY stage being movable in a predetermined horizontal direction and in a horizontal direction perpendicular thereto independently of rotation of said rotation stage;

drive control means for independently driving and controlling said rotation stage and XY stage;

holding means for holding said object to be measured, said holding means being provided with a fit portion to fit with said fitting portion of said XY stage, and a fit portion to fit with said fitting portion of said object to be measured;

an R stage set above said holding means, said R stage being movable in a horizontal direction and in a direction of the diameter of said rotation stage;

a first optical displacement gage provided on a lower surface of said R stage so that an optical axis thereof becomes parallel to a rotational axis of said rotation stage;

a Z stage provided beside said holding means, said Z stage being movable in a direction parallel to said rotational axis; and

a second optical displacement gage provided on a side surface of said Z stage so that an optical axis thereof becomes perpendicular to the rotational axis of said rotation stage.

2. An apparatus according to claim 1, wherein said optical displacement gage is a laser displacement gage.

3. An apparatus according to claim 1, wherein said object to be measured is a tooth model.

4. An apparatus for measuring a three-dimensional shape of an object to be measured provided with a plurality of recesses on a surface thereof, comprising:

a body base;

a rotation stage set on said base;

an XY stage set on said rotation stage, said XY stage being movable in a predetermined horizontal direction and a horizontal direction perpendicular thereto independently of rotation of said rotation stage, said XY stage being provided with a positioning pin on an upper surface thereof;

drive control means for independently driving and controlling said rotation stage and XY stage;

holding means for holding said object to be measured, said holding means comprising a cast base plate detachably mounted on said XY stage in a fitting state with said positioning pin, a cast base set on said cast base plate, and a gypsum block set on said cast base and provided with a plurality of projections to fit with said recesses of said object to be measured;

an R stage set above said holding means, said R stage being movable in a horizontal direction and in a direction of the diameter of said rotation stage;

a first laser displacement gage provided on a lower surface of said R stage so that an optical axis thereof becomes parallel to a rotational axis of said rotation stage;

a Z stage provided beside said holding means, said Z stage being movable in a direction parallel to said rotational axis; and

a second laser displacement gage provided on a side surface of said Z stage so that an optical axis thereof becomes perpendicular to the rotational axis of said rotation stage.

5. An apparatus according to claim 4, wherein said object to be measured is a tooth model.