Multi-layer composite ultrasonic transducer arrays

• US 5,548,564 A
• Filed: 04/13/1994
• Issued: 08/20/1996
• Est. Priority Date: 10/16/1992
• Status: Expired due to Fees

• Current Assignee: Duke University
• Original Assignee: Duke University
• Inventors: Smith, Stephen W.
• Primary Examiner(s): Eldred, J. Woodrow
• Application Number:
  US08/227,046
• Time in Patent Office: 860 Days
• Field of Search: 367/140, 367/155, 310/334, 310/336, 128/662.03
• US Class Current: 367/140
• CPC Class Codes: B06B 1/064 with multiple active layers
• CPC Class Codes: H04R 17/00 Piezoelectric transducers; Electrostrictive transducers piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners H10N30/00
• CPC Class Codes: H10N 30/092 Forming composite materials
• CPC Class Codes: H10N 30/50 having a stacked or multilayer structure
• CPC Class Codes: H10N 30/872 Connection electrodes of multilayer piezoelectric or electrostrictive devices, e.g. external electrodes
• CPC Class Codes: H10N 30/874 embedded within piezoelectric or electrostrictive material, e.g. via connections

Abstract

A piezoelectric transducer chip comprising a plurality of transducer elements. At least one of the transducer elements is a multi-layer element which comprises a plurality of piezoelectric layers, each of which is separated from the adjacent piezoelectric layers by an electrode layer so that a plurality of capacitive elements is electrically connected in parallel. The plurality of piezoelectric layers are comprised of a plurality of piezoelectric members separated from adjacent members by a gap to form a composite piezoelectric layer. Also disclosed is a method of making a multilayer transducer of a composite piezoelectric material. Alternate embodiments include two-dimensional ultrasonic transducer arrays having multilayer elements formed of a composite piezoelectric material.

Claims

1. A piezoelectric transducer chip comprising:

a plurality of transducer elements, at least one of said transducer elements being a multilayer element comprising a plurality of piezoelectric layers and a plurality of electrode layers forming a plurality of capacitative elements electrically connected in parallel, each of said plurality of piezoelectric layers being separated from the adjacent piezoelectric layers by one of said plurality of electrode layers, and said piezoelectric layers consisting of a first set of alternating electrode layers and a second set of alternating electrode layers interposed between said first set of alternating electrode layers; and

wherein each of said piezoelectric layers of said multilayer element is a piezoelectric composite material comprising a plurality of piezoelectric members formed between adjacent electrodes of said plurality of electrode layers each of said members being spaced apart from adjacent members to thereby form a gap between each of said plurality of piezoelectric members.

2. A piezoelectric transducer chip according to claim 1, wherein said plurality of transducer elements comprises a plurality of multilayer elements.

3. A piezoelectric transducer chip according to claim 1, wherein said piezoelectric members are PZT.

4. A piezoelectric transducer chip according to claim 1, wherein the gap between said piezoelectric members is filled with a material selected the group consisting of air and organic binders.

5. A piezoelectric transducer chip according to claim 1, wherein at least one of said transducer elements has a single piezoelectric layer.

20. An ultrasonic scanner comprising:

(a) means for producing an ultrasonic signal;

(b) an ultrasonic transducer array of claim 1 operatively connected to said means for producing an ultrasonic signal for transmitting said ultrasonic signal to a target;

(c) means for amplifying a received ultrasonic signal from a target operatively connected to said ultrasonic transducer array; and

(d) means for processing said ultrasonic signal operatively connected to said amplifying means.

6. A piezoelectric transducer chip comprising:

a plurality of transducer elements arranged in a two-dimensional array, at least one of said transducer elements being a multilayer element having an internal edge portion and comprising a plurality of piezoelectric layers and a plurality of electrode layers forming a plurality of capacitive elements electrically connected in parallel, each of said plurality of piezoelectric layers being separated from the adjacent piezoelectric layers by one of said plurality of electrode layers, and said piezoelectric layers consisting of a first set of alternating electrode layers and a second set of alternating electrode layers interposed between said first set of alternating electrode layers;

wherein each of said piezoelectric layers of said multilayer element is a piezoelectric composite comprising a plurality of piezoelectric members formed between adjacent electrodes of said plurality of electrode layers each of said members being spaced apart from adjacent members to thereby form a gap between each of said plurality of piezoelectric members;

a first via electrically connecting said first set of alternating electrode layers, said first via being electrically insulated from said second set of alternating electrode layers; and

a second via electrically connecting said second set of alternating electrode layers, said second via being electrically insulated from said first set of alternating electrode layers;

wherein at least one of said vias is an internal via.

7. A piezoelectric transducer chip according to claim 6, wherein said plurality of transducer elements comprises a plurality of multilayer elements.

8. A piezoelectric transducer chip according to claim 6, wherein said piezoelectric members are PZT.

9. A piezoelectric transducer chip according to claim 6, wherein the gap between said piezoelectric members is filled with a material selected from the group consisting of air and organic binders.

10. A piezoelectric transducer chip according to claim 6, wherein said first via is insulated from said second set of alternating electrodes by a plurality of insulating gaps.

11. A piezoelectric transducer chip according to claim 6, wherein said second via is insulated from said first set of alternating electrodes by a plurality of insulating gaps.

12. A piezoelectric transducer chip according to claim 6, wherein at least one of said transducer elements has a single piezoelectric layer.

13. An ultrasonic transducer array comprising:

(a) a connector having an upper surface, a lower surface, and an array of connector pads formed in said connector for electrically connecting said upper surface to said lower surface;

(b) a piezoelectric transducer chip having a plurality of transducer elements arranged in a two-dimensional array, at least one of said transducer elements being a multilayer element having an internal edge portion and comprising a plurality of piezoelectric layers and a plurality of electrode layers forming a plurality of capacitive elements electrically connected in parallel, each of said plurality of piezoelectric layers being separated from the adjacent piezoelectric layers by one of said plurality of electrode layers, and said piezoelectric layers consisting of a first set of alternating electrode layers and a second set of alternating electrode layers interposed between said first set of alternating electrode layers and wherein each of said piezoelectric layers of said multilayer element is a piezoelectric composite material comprising a plurality of piezoelectric members formed between adjacent electrodes of said plurality of electrode layers each of said members being spaced apart from adjacent members to thereby form a gap between each of said plurality of piezoelectric members;

(c) a first via connecting said first set of alternating electrode layers, said first via being electrically insulated from said second set of alternating electrode layers; and

(d) a second via connecting in parallel said second set of alternating electrode layers, said second via being electrically insulated from said first set of alternating electrode layers;

wherein at least one of said vias is an internal via;

(e) means for electrically connecting said first set of alternating electrodes to ground; and

(f) means for electrically connecting said second set of alternating electrodes to a corresponding one of said connector pads.

14. An ultrasonic transducer array according to claim 13, which further comprises a metallic ground sheet which overlies said piezoelectric transducer chip and is electrically connected to said means for electrically connecting said first set of alternating electrodes.

15. An ultrasonic transducer array according to claim 13, wherein said means for electrically connecting said second set of alternating electrodes comprises a bonding layer to connect to said upper surface of said connector.

16. An ultrasonic transducer array according to claim 13, wherein said piezoelectric chip comprises a plurality of multilayer elements.

17. An ultrasonic transducer array according to claim 13, wherein said piezoelectric chip comprises at least one multilayer element which includes a first internal edge and a second internal edge, and wherein said first via is an internal via, and wherein said second via is an internal via.

18. A piezoelectric transducer chip according to claim 13, wherein said piezoelectric members are PZT.

19. A piezoelectric transducer chip according to claim 13, wherein the gap between said piezoelectric members is filled with an organic binder.

21. A method of making a two-dimensional transducer chip having at least one multilayer transducer element of a piezoelectric composite material, said method comprising:

forming a first piezoelectric layer comprising a plurality of members of piezoelectric material wherein each member of said plurality of members is spaced apart from adjacent members to thereby form a gap between said piezoelectric members;

forming a second piezoelectric layer comprising a plurality of members of piezoelectric material wherein each member of said plurality of members is spaced apart from adjacent members to thereby form a gap between said piezoelectric members and wherein said piezoelectric members are positioned to form said pattern;

forming a first electrode layer on said first piezoelectric layer to electrically connect each of said piezoelectric members to the remainder of said piezoelectric members of said first piezoelectric layer; and

attaching said second piezoelectric layer to said first electrode layer such that the piezoelectric members of said first piezoelectric layer are aligned with the piezoelectric members of said second piezoelectric layer and so that each of said piezoelectric members of said second piezoelectric layer are electrically connected to the remainder of said piezoelectric members of said second piezoelectric layer and so that said first piezoelectric layer is electrically connected to said second piezoelectric layer.

22. The method of claim 21, further comprising the steps of:

positioning said piezoelectric members of said first piezoelectric layer to form a pattern; and

positioning said piezoelectric members of said second piezoelectric layer to form said pattern.

23. The method of claim 21, further comprising the step of filling the gap between said piezoelectric members with an organic binder.

24. The method of claim 21, further comprising the steps of:

forming an electrode layer on the free end of said first piezoelectric layer to electrically connect each of said piezoelectric members to the remainder of said piezoelectric members of said first piezoelectric layer; and

forming an electrode layer on the free end of said second piezoelectric layer to electrically connect each of said piezoelectric members to the remainder of said piezoelectric members of said first piezoelectric layer.

25. The method of claim 24 further comprising the step of selectively connecting said electrode layers so as to form a plurality of capacitive elements electrically connected in parallel.