Method for fabricating a monolithic semiconductor device with integrated surface micromachined structures
First Claim
1. A method of manufacturing a monolithic semiconductor device with an integrated surface micromachined structure comprising the steps of:
- providing a semiconductor substrate;
forming at least one conductive microstructure, wherein the at least one conductive microstructure overlies said semiconductor substrate within a sensor area, wherein said at least one conductive microstructure is sealed;
forming at least one semiconductor device subsequent to the step of forming said at least one conductive microstructure, wherein said at least one semiconductor device, including conductively doped regions, is formed within an integrated circuit area;
performing a thermal anneal subsequent to the forming of said at least one semiconductor device;
unsealing said at least one conductive microstructure, wherein said at least one conductive microstructure is suspended; and
electrically coupling said at least one conductive microstructure to said at least one semiconductor device.
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Accused Products
Abstract
A method for fabricating a monolithic semiconductor device with integrated surface micromachined structures is provided. A semiconductor substrate (10) has an interconnection layer (14) and a first sacrificial layer (16) overlying the substrate (10). Sensor areas (30) and IC areas (40) are formed by patterning the first sacrificial layer (16). A patterned sensor structural layer (32) is formed within sensor area (30) and protected by second sacrificial layer (34) and seal layer (36) while IC elements are formed in IC area (40). Subsequent to IC processing a RTA anneal is performed to relieve stress in sensor layer (32). Sensor area (30) is electrically coupled to IC area (40) and sacrificial layers (16, 34) removed to free sensor elements in sensor areas (40).
53 Citations
21 Claims
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1. A method of manufacturing a monolithic semiconductor device with an integrated surface micromachined structure comprising the steps of:
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providing a semiconductor substrate; forming at least one conductive microstructure, wherein the at least one conductive microstructure overlies said semiconductor substrate within a sensor area, wherein said at least one conductive microstructure is sealed; forming at least one semiconductor device subsequent to the step of forming said at least one conductive microstructure, wherein said at least one semiconductor device, including conductively doped regions, is formed within an integrated circuit area; performing a thermal anneal subsequent to the forming of said at least one semiconductor device; unsealing said at least one conductive microstructure, wherein said at least one conductive microstructure is suspended; and electrically coupling said at least one conductive microstructure to said at least one semiconductor device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 21)
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12. A method of fabricating a monolithic semiconductor device with integrated surface micromachined sensor structures comprising the steps of:
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providing a semiconductor substrate having a top surface; forming an interconnection layer overlying said top surface; forming a first sacrificial layer overlying said interconnection layer; patterning said first sacrificial layer, wherein an integrated circuit area and a sensor area are defined and wherein selected portions of said first sacrificial layer are removed in said sensor area to form at least one anchor opening exposing said interconnection layer; forming a structural layer, wherein said structural layer overlies said first sacrificial layer and couples to said interconnection layer through said at least one anchor opening; patterning said structural layer to form at least one sensor structural element within said sensor area; forming a second sacrificial layer overlying said sensor area; forming a sealing layer overlying said sensor area; then forming semiconductor device structures, including conductively doped regions, within said integrated circuit area; performing a rapid thermal anneal; forming a passivation layer overlying said IC area; removing said sealing layer, first sacrificial layer and said second sacrificial layer, wherein said at least one sensor structural element is suspended; and electrically coupling said at least one sensor structural element and said semiconductor device structures. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification