Infrared-spectrometric sensor for gases
First Claim
1. An infrared sensor for gases, the sensor comprising:
- a single-piece shaped part having a micropattern body, the shaped part comprising a base plate, a mirror grating, a connection for injecting multi-frequency IR radiation, and at least one connection for extracting single-frequency IR radiation;
a free space which contains a gas to be tested, the free space being disposed between the mirror grating and the respective connections for injecting multi-frequency IR radiation and extracting single frequency IR radiation;
a cover plate above the free space, said cover plate being joined to the shaped part in a sealing manner so as to cover the free space; and
orifices for introducing the gas to be tested into the free space and discharging the gas therefrom.
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Abstract
Gases can be selectively detected by the utilization of a infrared spectrometer via their specific absorption in the infrared spectral range. The sensor of the present invention is developed for continuously controlling a gaseous stream or a space filled with gas with the sensor being a single-piece shaped part manufactured as a microstructured body. The space filled with gas to be tested is between a mirror grating and entrance and exit slits for IR-radiation. The sensor is compact and robust, suitable for portable instruments, and can be manufactured at low cost and in large numbers. The sensor can also be made of metal and can be used even at an increased temperature. By using the sensor of the present invention, the safety of systems in which flammable, toxic or other gases are contained or may occur can be considerably increased in an economic manner.
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Citations
17 Claims
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1. An infrared sensor for gases, the sensor comprising:
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a single-piece shaped part having a micropattern body, the shaped part comprising a base plate, a mirror grating, a connection for injecting multi-frequency IR radiation, and at least one connection for extracting single-frequency IR radiation; a free space which contains a gas to be tested, the free space being disposed between the mirror grating and the respective connections for injecting multi-frequency IR radiation and extracting single frequency IR radiation; a cover plate above the free space, said cover plate being joined to the shaped part in a sealing manner so as to cover the free space; and orifices for introducing the gas to be tested into the free space and discharging the gas therefrom. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification