Infrared-spectrometric sensor for gases

• US 5,550,375 A
• Filed: 01/04/1995
• Issued: 08/27/1996
• Est. Priority Date: 09/29/1994
• Status: Expired due to Fees

• Current Assignee: Microparts
• Original Assignee: Microparts
• Inventors: Heyde, Wolfgang A. D., Peters, Ralf-Peter, Unal, Nezih, Heinrich, Lothar, Landwehr, Dierk, Rogner, Arnd
• Primary Examiner(s): Willis, Davis L.
• Assistant Examiner(s): HANIG, RICHARD E
• Application Number:
  US08/368,634
• Time in Patent Office: 601 Days
• Field of Search: 250/343, 250/347, 250/353, 356/440
• US Class Current: 250/343
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0291 Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
• CPC Class Codes: G01J 3/1804 Plane gratings
• CPC Class Codes: G01N 21/031 Multipass arrangements

Abstract

Gases can be selectively detected by the utilization of a infrared spectrometer via their specific absorption in the infrared spectral range. The sensor of the present invention is developed for continuously controlling a gaseous stream or a space filled with gas with the sensor being a single-piece shaped part manufactured as a microstructured body. The space filled with gas to be tested is between a mirror grating and entrance and exit slits for IR-radiation. The sensor is compact and robust, suitable for portable instruments, and can be manufactured at low cost and in large numbers. The sensor can also be made of metal and can be used even at an increased temperature. By using the sensor of the present invention, the safety of systems in which flammable, toxic or other gases are contained or may occur can be considerably increased in an economic manner.

Claims

1. An infrared sensor for gases, the sensor comprising:

a single-piece shaped part having a micropattern body, the shaped part comprising a base plate, a mirror grating, a connection for injecting multi-frequency IR radiation, and at least one connection for extracting single-frequency IR radiation;

a free space which contains a gas to be tested, the free space being disposed between the mirror grating and the respective connections for injecting multi-frequency IR radiation and extracting single frequency IR radiation;

a cover plate above the free space, said cover plate being joined to the shaped part in a sealing manner so as to cover the free space; and

orifices for introducing the gas to be tested into the free space and discharging the gas therefrom.

2. A sensor according to claim 1, wherein the mirror grating is a concave reflection grating.

3. A sensor according to claim 1, wherein the mirror grating is a concave echelette grating having a matching blaze angle.

4. A sensor according to claim 1, wherein the mirror grating and the connections for the IR radiation are arranged on a Rowland circle or on a curve which is situated in a vicinity of a Rowland circle.

5. A sensor according to claim 4, wherein a side of the cover plate which faces the free space is covered with a metallic layer which reflects the IR radiation.

6. A sensor according to claim 1, wherein said connections for the IR radiation comprise slits, and wherein a radiation source is positioned outside said connection for injecting multi-frequency IR radiation, and at least one radiation receiver is positioned outside said at least one connection for extracting single-frequency IR radiation.

7. A sensor according to claim 1, further comprising:

an optical element which is positioned opposite the mirror grating and is either integrated directly into the shaped part or is inserted into corresponding recesses in the shaped part.

8. A sensor according to claim 7, wherein said optical element is a concave mirror, lens or prism.

9. A sensor according to claim 7, wherein said optical element is at least one cylindrical concave mirror which is integrated into the shaped part and permits a path of the IR radiation within the free space to be extended.

10. A sensor according to claim 1, wherein said single-piece shaped part is composed of plastic or of metal.

11. A sensor according to claim 10, wherein said plastic of said single-piece shaped part is one of poly (methyl methacrylate), polysulphone or polycarbonate, and said metal of said single-piece shaped part is one of nickel, nickel-cobalt, gold or copper.

12. A sensor according to claim 6, wherein an optical waveguide guides the IR radiation and permits the IR radiation source to be connected to the shaped part.

13. A sensor according to claim 6, wherein at least one optical waveguide guides the IR radiation and permits IR radiation receivers to be connected to the shaped part.

14. A sensor according to claim 1, wherein said single-piece shaped part is fixed to a semiconductor substrate, and an IR radiation source and at least one IR radiation receiver are positioned adjacent to said connections for the IR radiation.

15. A sensor according to claim 1, wherein said gas to be tested is gaseous hydrocarbons such as methane, ethane, propane or butane, or carbon dioxide, carbon monoxide, nitrogen oxide, water vapor, ammonia, in a gas mixture.

16. A sensor according to claim 1, wherein a testing of said gas to be tested comprises a quantitative analysis of gases or gas mixtures.

17. A sensor according to claim 1, wherein said free space defines a gas chamber.