Inspection apparatus and method

• US 5,550,583 A
• Filed: 10/03/1994
• Issued: 08/27/1996
• Est. Priority Date: 10/03/1994
• Status: Expired due to Term

• Current Assignee: Bell Semiconductor, LLC (Hilco Inc. (d/b/a Hilco Global))
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Amir, Israel, Higgins, Frank P.
• Primary Examiner(s): Chin, Tommy P.
• Assistant Examiner(s): Le, Vu
• Application Number:
  US08/316,745
• Time in Patent Office: 694 Days
• Field of Search: 348/86, 348/87, 348/88, 348/92, 348/125, 348/126, 348/80, 348/91, 348/89, 348/93, 348/94, 348/95, 348/127-133
• US Class Current: 348/126
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01R 31/309 of printed or hybrid circuits or circuit substrates
• CPC Class Codes: H04N 7/183 for receiving images from a single remote source

Abstract

Human inspection of an object (12) having a light-reflective areas (20) thereon arrayed in individual arrays (21) is enhanced by first capturing the image of selected portions of the arrays via one or more image capture devices (34). The images are processed to create a single image frame in which like portions of like arrays of light-reflective are uniformly spaced and oriented in a two-dimensional array having large scale regularity. The single image frame is then displayed on a display (48) for observation by a human operator (29). Because the displayed image frame of the light-reflective areas has large scale regularity, the operator bility to detect defects associated with missing or misaligned light-reflective areas will be enhanced.

Claims

1. A method of facilitating inspection of an object having a generally planar surface containing a plurality of light-reflective area arranged in individual arrays, comprising the steps of:

(a) capturing an image of each of a plurality selected portions of each array of light-reflective areas;

(b) arranging the images of like portions of like arrays in a single frame such that the light-reflective areas in the frame are oriented and arranged separately in a two-dimensional array having large scale regularity to de-randomize and de-locate the arrays of light-reflective areas so that the light-reflective areas lie in at least one row and generally exhibit the same orientation from row-to-row; and

(c) displaying the frame on a display device for observation and inspection by a human operator to detect which if any light-reflective areas are defective, missing or misaligned.

2. The method according to claim 1 wherein the steps (b) and (c) are repeated until the selected portions of the arrays have all been displayed for inspection.

3. The method according to claim 1 wherein at least some of the arrays are comprised of rows of light-reflective areas arranged orthogonally to each other and wherein the selected portion of each area whose image is captured corresponds to one of the rows of said array.

4. The method according to claim 1 further including the step of storing the images in a memory.

5. The method according to claim 1 wherein the step of capturing the image of each of a plurality of selected portions of each array comprises the steps of:

training at least one television camera onto the object; and

imparting a relative movement between the object and the camera in accordance with the locations of the arrays of light-reflective areas so that each selected portion of each array lines up within a field of view of the camera.

6. The method according to claim 1 wherein the light-reflective areas in the frame are displayed simultaneously.

7. The method according to claim 1 wherein the light-reflective areas in the frame are displayed in succession.

8. The method according to claim 1 wherein the images in the frame are two-dimensional images.

9. The method according to claim 1 wherein the images in the frame are three-dimensional images.

10. The method according to claim 1 wherein the display is scrolled.

11. Apparatus for facilitating inspection of an object having a generally planar surface containing light-reflective areas arranged in individual arrays, comprising:

at least one image-capture device for capturing the image of at least one selected portion of at least one array of light-reflective array;

means for imparting a relative motion between the image-capture device and the object so that the image capture device captures successive selected portions of successive arrays of light-reflective arrays;

means for arranging the images captured by the image-capture device so that the images of like portions of like arrays are oriented and arranged separately in a single-image frame in which the light-reflective areas are arrayed in a two-dimensional array having large scale regularity to de-randomize and de-locate the arrays of light-reflective areas so that the light-reflective areas lie in at least one row and generally exhibit the same orientation from row-to-row; and

a display coupled to the means for arranging the images for displaying the single image frame for observation by an operator.

12. The apparatus according to claim 11 wherein there are four image-capture devices, each trained on one of four sides of the object.

13. The apparatus according to claim 11 wherein the means for arranging the images comprises:

frame-processing means under the control of a control program which, when executed, classifies, sorts, orients and groups images to yield the single image frame; and

a frame buffer for storing the single image frame generated by the frame buffer.