×

Micro-machined accelerometer array with shield plane

  • US 5,551,293 A
  • Filed: 06/07/1995
  • Issued: 09/03/1996
  • Est. Priority Date: 10/12/1990
  • Status: Expired due to Term
First Claim
Patent Images

1. An accelerometer array comprising:

  • a plurality of deflection elements, each one of said deflection elements comprisingan inertial mass, andat least one hinge supporting said inertial mass in a normal position, deflection of said inertial mass occurring as movement of said inertial mass in a first direction out of said normal position by a force applied thereto, said movement storing energy in said at least one hinge,at least one component selected from the group consisting of said inertial mass and said at least one hinge being different from one of said deflection elements to another in said accelerometer array so that said force applied to said inertial masses by simultaneous acceleration of said plurality of deflection elements deflects some of said inertial masses, respective discrete ranges of acceleration causing the deflection of different respective combinations of said inertial masses;

    an electrical circuit for detecting which combinations of said inertial masses deflect and for producing a sensible output representative thereof; and

    a shield plane between said electrical circuit and said plurality of deflection elements.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×