Micromachined measuring cell with arm supported sensor

• US 5,551,294 A
• Filed: 01/27/1995
• Issued: 09/03/1996
• Est. Priority Date: 11/23/1992
• Status: Expired due to Term

• Current Assignee: Colibrys SA (Safran SA)
• Original Assignee: CSEM Centre Suisse D'Electronique et de Microtechnique SA
• Inventors: Hermann, Jean
• Primary Examiner(s): NOT, DEFINED
• Assistant Examiner(s): NOT, DEFINED
• Application Number:
  US08/380,144
• Time in Patent Office: 585 Days
• Field of Search: 73/514.32, 73/514.24, 73/493, 73/497, 73/514.16, 437/180, 437/209
• US Class Current: 73/514.32
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 7/0048 between the MEMS die and the substrate
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends

Abstract

A micromachined measuring cell is adapted to be mounted on a support and has a measuring sensor (121) and an assembly structure (120) distinct from one another and associated with each other by a connecting arm (128). At least one part element (103b) of the assembly structure, one part (133) of the connecting arm and one part (103a) of the sensor (121) are produced as one single piece. The assembly structure (120) of this measuring cell is preferably in the shape of a frame surrounding the sensor (121).

Claims

1. A micromachined measuring cell adapted to be mounted on a support and having a sensor comprising a first member, a third member and a second member interposed between said first and third members, said second member comprising a frame and a movable body fixed to said frame by at least one first suspension arm, at least one of said members comprising an electrically conducting element, and said measuring cell comprising an assembly structure separate from said sensor and connected to one side of said sensor by a second suspension arm adapted to support said sensor and extending longitudinally across a space separating all other sides of said sensor from said assembly structure, at least a part of the assembly structure, a part of the second suspension arm and a part of the sensor being connected together to provide an integral piece of said measuring cell.

2. A measuring cell according to claim 1 wherein said part of the sensor, said part of the second suspension arm and said part of the assembly structure are made of an electrically conducting material.

3. A measuring cell according to claim 1 wherein said sensor is a capacitive sensor.

4. A measuring cell according to claim 3 wherein said movable body forms part of a second electrode and is displaceable under the effect of a force, and a first electrode and a third electrode which are fixed to one another and to said second electrode which is interposed between the first and the third electrodes;

and wherein two residual spaces are respectively provided between said first and second electrodes and between said second and third electrodes to permit displacement of said movable body.

5. A measuring cell according to claim 4 wherein said measuring cell is an accelerometric cell.

6. A measuring cell according to claim 4 wherein said capacitive sensor comprises three conducting plates insulated from one another, at least two of said plates each comprising an elongated part which together form said second suspension arm.

7. A measuring cell according to claim 6 wherein a single one of said three plates is in electrical contact with said assembly structure.

8. A measuring cell according to claim 1 wherein said assembly structure is shaped like a frame which at least partially surrounds said sensor.

9. A measuring cell according to claim 8 wherein said assembly frame totally surrounds said sensor with the exception of an opening provided in one of the sides of the assembly frame.

10. A measuring cell according to claim 1 wherein said second member is enclosed within said first and third members to prevent harmful materials from being introduced between said members during manufacture of said measuring cell.

11. A measuring cell according to claim 1 wherein said part of the second suspension arm and said part of the sensor are different portions of a single piece of material.

12. A measuring cell according to claim 11 wherein said part of the second suspension arm, said part of the sensor and said part of the assembly structure are different portions of a single piece of material.

13. A measuring cell according to claim 8 wherein at least a portion of said second suspension arm connects the frame of said second member to said assembly frame.