Closed cycle gas cryogenically cooled radiation detector

• US 5,552,608 A
• Filed: 06/26/1995
• Issued: 09/03/1996
• Est. Priority Date: 06/26/1995
• Status: Expired due to Fees

• Current Assignee: EDAX Incorporated (Ametek Incorporated)
• Original Assignee: Philips Electronics North America Corporation (Koninklijke Philips N.V.)
• Inventors: Nicolosi, Joseph A., Gallagher, Brian W., Barbara, Richard, Blionas, Costas
• Primary Examiner(s): Willis, Davis L.
• Assistant Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US08/494,501
• Time in Patent Office: 435 Days
• Field of Search: 250/370.15, 250/352, 250/310, 250/397, 62/51.1, 62/51.2, 62/50.7
• US Class Current: 250/370.15
• CPC Class Codes: F17C 2203/0337 Granular
• CPC Class Codes: F17C 2203/0345 Fibres
• CPC Class Codes: F17C 2203/0395 Getter
• CPC Class Codes: F17C 2205/0332 Safety valves or pressure relief valves
• CPC Class Codes: F17C 2205/0341 Filters
• CPC Class Codes: F17C 2221/014 Nitrogen
• CPC Class Codes: F17C 2223/0153 Liquefied gas, e.g. LPG, GPL
• CPC Class Codes: F17C 2223/033 Small pressure, e.g. for liquefied gas
• CPC Class Codes: F17C 2227/0353 using cryocooler
• CPC Class Codes: F17C 2227/0355 in a closed loop
• CPC Class Codes: F17C 2227/036 "Joule-Thompson" effect
• CPC Class Codes: F17C 2270/0509 "Dewar" vessels
• CPC Class Codes: F17C 2270/0518 Semiconductors
• CPC Class Codes: F17C 3/085 Cryostats
• CPC Class Codes: F25B 9/02 using Joule-Thompson effect; using vortex effect
• CPC Class Codes: F25D 19/006 Thermal coupling structure or interface
• CPC Class Codes: G01J 5/061 by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
• CPC Class Codes: H01J 2237/002 Cooling arrangements
• CPC Class Codes: H01J 2237/2442 Energy-dispersive (Si-Li type) spectrometer
• CPC Class Codes: H01J 2237/2555 Microprobes, i.e. particle-induced X-ray spectrometry
• CPC Class Codes: H01J 37/244 : Detectors; Associated components or circuits therefor

Abstract

A radiation detector having an evacuated envelope, a radiation detector on a cold finger support in the evacuated space, a closed cycle gas cooling system to cool the cold finger to provide cryogenic operation of the radiation detector, and a getter in the evacuated space to maintain an evacuated condition. The evacuated envelope includes a radiation window. The radiation detector is preferably an X-ray detector employed in an energy dispersive spectrometry system. The evacuated space is preferably held at a pressure of less than about 1 mTorr to achieve molecular flow of remaining gas molecules, minimizing parasitic heat input. The closed cycle gas cooling system employs compressed refrigerant, which is precooled in a counterflow heat exchanger and allowed to expand in proximity to the cold finger, thus absorbing heat and maintaining cryogenic temperatures. A getter material, preferably activated carbon, is provided to absorb gasses and maintain the low pressure during operation. A vibration effect attenuation system is provided to reduce effect of cooler induced reduction in detector resolution.

Claims

1. A cryogenic cooling apparatus for a radiation detector, comprising:

a Joule-Thomson closed cycle cryogenic cooler having a high pressure compressed refrigerant supply conduit, a flow limiting orifice and a refrigerant return conduit, said Joule-Thomson closed cycle cryogenic cooler producing a vibration during operation;

a thermally conductive member having a first portion and a second portion, being in thermal and mechanical communication with said Joule-Thomson closed cycle cryogenic cooler at said first portion, and having a nonunity vibration transmission function from said first portion to said second portion of said thermally conductive member; and

a cryogenic radiation detector, having a sensitivity to radiation and to vibration and having an output, mounted in thermal communication with said second portion of said thermally conductive member, said nonunity vibration transmission function modifying vibrations to which said detector is sensitive, to reduce an effect of said vibration on said output.

2. The cryogenic cooling apparatus according to claim 1, further comprising a counter flow heat exchanger between said high pressure refrigerant supply conduit and said refrigerant return conduit, allowing heat exchange between cooled returning refrigerant and said high pressure compressed refrigerant supply.

3. The cryogenic cooling apparatus according to claim 1, wherein said Joule-Thomson closed cycle cryogenic cooler reaches a minimum temperature of below about 77K.

4. The cryogenic cooling apparatus according to claim 1, wherein said Joule-Thomson closed cycle cryogenic cooler produces an undamped vibration of at least about 5 mg RMS which is attenuated to less than about 4.5 mg RMS.

5. The cryogenic cooling apparatus according to claim 1, wherein said Joule-Thomson closed cycle cryogenic cooler has a maximum thermal capacity of about 2 Watts when a temperature of said thermally conductive member is about 82K.

6. The cryogenic cooling apparatus according to claim 1, further comprising a throttle valve at said flow limiting orifice, controlling a flow of refrigerant from said high pressure supply conduit.

7. The cryogenic cooling apparatus according to claim 6, wherein said throttle valve is responsive to a temperature of said refrigerant downstream of said flow limiting orifice.

8. The cryogenic cooling apparatus according to claim 1, wherein said detector is an X-ray detector.

9. The cryogenic cooling apparatus according to claim 1, wherein said detector is a lithium drifted silicon crystal X-ray detector.

10. The cryogenic cooling apparatus according to claim 1, wherein said detector is a germanium crystal radiation detector.

11. The cryogenic cooling apparatus according to claim 1, wherein said detector is an X-ray detector of an electron microscope, achieving an energy resolution FWHM of less than or equal to about 137 eV at 5.9 keV, from an ⁵⁵ Fe source, at 1000 cps with a 40 μ

S time constant.

12. The cryogenic cooling apparatus according to claim 1, wherein said detector is an X-ray detector of an electron microscope having a spatial resolution, said vibration being attenuated to a level which causes an insignificant error in said spatial resolution.

13. The cryogenic cooling apparatus according to claim 1, wherein said detector is provided in an evacuated space.

14. The cryogenic cooling apparatus according to claim 13, wherein said cryogenic cooler, thermally conductive member and detector are housed in said evacuated space, said evacuated space being sealed with a single vacuum seal.

15. The cryogenic cooling apparatus according to claim 1, further comprising a vibration damper linked to said high pressure compressed refrigerant supply conduit.

16. The cryogenic cooling apparatus according to claim 15, further comprising a mass linked to said high pressure refrigerant supply conduit for reducing transmitted vibration from said high pressure compressed refrigerant supply to said closed cycle cryogenic cooler.

17. The cryogenic cooling apparatus according to claim 15, wherein said vibration damper comprises a relief valve at said high pressure refrigerant supply conduit.

18. The cryogenic cooling apparatus according to claim 1, wherein said thermally conductive member comprises a mechanical filter to attenuate transmitted vibrations.

19. The cryogenic cooling apparatus according to claim 1, further comprising a mechanically compliant thermal coupling between said thermally conductive member and said detector.

20. The cryogenic cooling apparatus according to claim 1, wherein said detector is provided in an evacuated space, further comprising a molecular sorption getter composition mounted in said evacuated space of sufficient quantity to achieve a molecular gas flow at cryogenic temperatures.

21. The cryogenic cooling apparatus according to claim 20, wherein said a molecular sorption getter composition is mounted in thermal communication with one or both of said cryogenic cooler and said thermally conductive member.

22. The cryogenic cooling apparatus according to claim 20, wherein said molecular sorption getter is activated carbon.

23. The cryogenic cooling apparatus according to claim 20, wherein said molecular sorption getter is preformed as an organic polymer material or a mass of biological material and subsequently converted to activated carbon.

24. The cryogenic cooling apparatus according to claim 1, further comprising an insulating conduit portion in sequence with said high pressure compressed refrigerant supply conduit, electrically isolating said cryogenic cooling apparatus.

25. The cryogenic cooling apparatus according to claim 24, wherein said insulating conduit is a tube formed of a material selected from the group consisting of glass, ceramic and Macor.

26. The cryogenic cooling apparatus according to claim 24, wherein said insulating conduit is brazed in sealed manner to a connection fitting.

27. A method of cryogenically cooling a radiation detector, comprising the steps of:

(a) providing;

a closed cycle cryogenic cooler having a high pressure compressed refrigerant supply conduit, an expansion chamber, an flow limiting orifice from said compressed refrigerant supply conduit to said expansion chamber, and a refrigerant return conduit, said closed cycle cryogenic cooler being subject to the generation of vibration during operation;

a thermally conductive member having a first portion and a second portion, being in thermal and mechanical communication with said closed cycle cryogenic cooler at said first portion, and having a nonunity vibration transmission function from said first portion to said second portion of said thermally conductive member; and

a cryogenic radiation detector, having a sensitivity to radiation and to vibration and an output, mounted in thermal communication with said second portion of said thermally conductive member, said nonunity vibration transmission function modifying vibrations to which said detector is sensitive, to reduce an effect of said vibration on said output;

(b) providing a compressed refrigerant supply to said supply conduit; and

(c) venting expanded refrigerant from said return refrigerant conduit.

28. The method according to claim 27, further comprising the step of recycling said vented expanded refrigerant.

29. The method according to claim 28, further comprising the step of compressing said vented expanded refrigerant in a compressor.

30. The method according to claims 27, further comprising the step of precooling said compressed supply refrigerant in a counterflow heat exchanger provided between said high pressure refrigerant supply conduit and said refrigerant return conduit, cooled refrigerant from said expansion chamber flowing in said refrigerant return conduit cooling said compressed supply refrigerant.

31. The method according to claim 27, further comprising the step of attenuating vibration in said high pressure compressed refrigerant supply conduit.

32. The method according to claim 27, wherein said detector is a lithium drifted silicon X-ray detector.

33. The method according to claim 27, wherein said detector is a germanium radiation detector.

34. The method according to claim 27, further comprising the step of controlling a flow of compressed refrigerant through said orifice into said expansion chamber with a throttle valve provided at said orifice.

35. The method according to claim 34, wherein said flow of compressed refrigerant is controlled based on a temperature in said expansion chamber.

36. The method according to claim 27, further comprising the step of maintaining an evacuated inner portion of a housing.

37. The method according to claim 27, further comprising the step of damping vibration from said cryogenic cooler transmitted to said detector.

38. The method according to claim 27, further comprising the step of attenuating transmitted vibration with a mechanically compliant thermal coupling between said thermally conductive member and said detector.

39. The method according to claim 27, further comprising the steps of detecting an X-ray in an electron microscope, and attenuating vibration received by said detector so that an energy resolution is achieved having an FWHM of less than or equal to about 137 eV at 5.9 keV from ⁵⁵ Fe at 1000 cps with a 40 μ

S time constant.

40. The method according to claim 27, wherein said cryogenic cooler, thermally conductive member and detector are housed in an evacuated chamber, said chamber being sealed with a single vacuum seal.

41. The method according to claim 27, further comprising the step of reducing transmitted vibration from said high pressure compressed refrigerant supply to said closed circuit cryogenic cooler by affixing a mass to said refrigerant supply conduit.

42. The method according to claim 27, wherein said cryogenic cooler, thermally conductive member and detector arc housed in an evacuated chamber, further comprising the step of gettering contaminants in said chamber with a getter material provided in sufficient quantities to achieve a molecular gas flow at cryogenic temperatures.

43. The method according to claim 42, further comprising the step of cooling a molecular sorption getter.

44. The method according to claim 43, wherein said molecular sorption getter is activated carbon.

45. The method according to claim 43, wherein said molecular sorption getter is preformed as an organic polymer or a biological material and converted to activated carbon.

46. The method according to claim 27, further comprising the step of electrically isolating said compressed refrigerant supply from said detector by passing the compressed refrigerant through an insulating conduit.

47. A cryogenic cooling apparatus for a radiation detector, comprising:

a cryogenic cooler having a vibration of operation, said vibration of operation being of at least a first level;

an uncompensated detector, having a sensitivity to radiation and to vibration, and an output, which the detector is mounted in thermal communication with said cryogenic cooler, said uncompensated detector producing an unacceptable output resolution when subject to vibration of at least said first level and producing an acceptable output resolution of at worst about 140 eV at 5.9 keV from ⁵⁵ Fe at 1000 cps with a 40 μ

S time constant when subject to vibration of at most a second level; and

a vibration compensation system reducing an effect of the vibration on said detector output so that, when said cryogenic cooler produces at least said first level of the vibration, said compensation system produces said acceptable output resolution.

48. The cryogenic cooling apparatus according to claim 47, wherein said vibration compensation system comprises a passive mechanical vibration attenuation structure.

49. The cryogenic cooling apparatus according to claim 47, wherein said vibration compensation system comprises an active electro-mechanical vibration attenuation system.

50. The cryogenic cooling apparatus according to claim 47, wherein said vibration compensation system comprises an active electronic compensation circuit at said output of said detector.

51. The cryogenic cooling apparatus according to claim 47, wherein said vibration compensation system comprises a viscous fluid link having a fluid which does not substantially support shear wave propagation in a mechanically compliant conduit.

52. The cryogenic cooling apparatus according to claim 47, wherein said vibration compensation system comprises a flexible thermally conductive link which damps transmitted vibration between said closed cycle cryogenic cooler and said detector.

53. The cryogenic cooling apparatus according to claim 47, wherein said vibration compensation system comprises one or more piezoelectric actuators.

54. The cryogenic cooling apparatus according to claim 47, wherein said vibration compensation system comprises an electronic circuit having a vibration transducer mounted to determine a vibration of said cryogenic cooling apparatus.

55. The cryogenic cooling apparatus according to claim 47, wherein said vibration compensation system comprises a transducer, an actuator and a control for driving said actuator to null an output of said transducer.

56. The cryogenic cooling apparatus according to claim 47, wherein said vibration compensation system comprises a compensation detector, having a response to said vibration having a predetermined relation to a response of said detector to said vibration.

57. The cryogenic cooling apparatus according to claim 47, wherein said vibration compensation system comprises a high temperature superconductor.

58. A detector system for measuring an energy of an X-ray, comprising:

(a) a lithium drifted silicon crystal X-ray detector system having an X-ray sensitivity and a vibration sensitivity, X-rays and vibration each causing a variation in an output current of said x-ray detector system, said x-ray detector system including an electrical amplifier circuit receiving said output current and producing an amplified signal;

(b) a support for said detector system, said support being coupled to a device subject to a mechanical vibration, said amplified signal of said x-ray detector system amplifier having a vibration-related signal component which, in the absence of compensation, increases a FWHM of said output to an amount greater than about 140 eV at 5.9 kev from ⁵⁵ Fe at 1000 cps with a 40 μ

S time constant; and

(c) means for compensating said vibration-related increase in FWHM of said x-ray detector system amplifier to an amount less than or equal to about 137 eV at 5.9 kev from ⁵⁵ Fe at 1000 cps with a 40 μ

S time constant.

59. The detector system according to claim 58, wherein said compensating means comprises a mechanical vibration attenuation device coupled with said support.

60. The detector system according to claim 58, wherein said compensating means comprises an electrical signal processing system for processing said output.

61. The detector system according to claim 60, wherein said electrical signal processing system comprises a vibration sensor and a deconvolution processor.