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Vacuum processing apparatus and operating method therefor

  • US 5,553,396 A
  • Filed: 05/17/1995
  • Issued: 09/10/1996
  • Est. Priority Date: 08/29/1990
  • Status: Expired due to Term
First Claim
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1. A method of operating a vacuum processing apparatus having a vacuum processing chamber for which a dry cleaning processing is effected after a substrate member to be processed has been processed under a vacuum condition, comprising the steps of:

  • measuring an intensity of a plasma light permeating through said vacuum processing chamber, so as to provide a measured value;

    judging a time for dry cleaning of said vacuum processing chamber by comparing said measured value with a predetermined value, so as to provide a dry cleaning time judgment; and

    carrying out the dry cleaning for said vacuum processing chamber in accordance with said dry cleaning time judgment.

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