LC element and semiconductor device
First Claim
1. An LC element comprising:
- two inductor electrodes formed in a spiral shape respectively having predetermined inductances disposed essentially in parallel, anda pn junction layer functioning as a capacitor by using in a reverse bias state, formed on a semiconductor substrate along said two inductor electrodes and comprising a p region and an n region electrically connected over their entire length respectively to one and the other of said two inductor electrodes, whereininductors respectively formed by said two inductor electrodes and the capacitor formed by said pn junction layer along said two inductor electrodes exist as distributed constants, andat least one of said two inductor electrodes is used as a signal transmission line.
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Accused Products
Abstract
An LC element with a pn junction layer formed near the surface of a p-Si substrate by forming an n+ region having a predetermined shape and in a portion thereof additionally forming a p+ region having the same shape, and with first and second electrodes formed over entire length on the surface of this pn junction layer; wherein the two electrodes respectively function as inductors and by using the pn junction layer with reverse bias, a distributed constant type capacitor is formed between these inductors, thereby providing excellent attenuation characteristics over a wide band, a semiconductor device including the LC element, and a method of manufacturing the LC element.
This LC element and semiconductor device can be easily manufactured; in the case of manufacturing as a portion of an IC or LSI device, component assembly work in subsequent processing can be abbreviated, and by changing the capacitance of the distributed constant type capacitor according to requirements, the characteristics can be changed.
26 Citations
72 Claims
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1. An LC element comprising:
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two inductor electrodes formed in a spiral shape respectively having predetermined inductances disposed essentially in parallel, and a pn junction layer functioning as a capacitor by using in a reverse bias state, formed on a semiconductor substrate along said two inductor electrodes and comprising a p region and an n region electrically connected over their entire length respectively to one and the other of said two inductor electrodes, wherein inductors respectively formed by said two inductor electrodes and the capacitor formed by said pn junction layer along said two inductor electrodes exist as distributed constants, and at least one of said two inductor electrodes is used as a signal transmission line. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An LC element comprising:
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two inductor electrodes formed in a spiral shape respectively having predetermined inductances disposed essentially in opposition, and a pn junction layer functioning as a capacitor by using in a reverse bias state, formed on a semiconductor substrate between said two inductor electrodes and comprising a p region and an n region electrically connected over their entire length respectively to one and the other of said two inductor electrodes, wherein inductors respectively formed by said two inductor electrodes and the capacitor formed by said pn junction layer between said two inductor electrodes exist as distributed constants, and at least one of said two inductor electrodes is used as a signal transmission line. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. An LC element comprising:
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two inductor electrodes formed in a meander shape respectively having predetermined inductances disposed essentially in parallel, and a pn junction layer functioning as a capacitor by using in a reverse bias state, formed on a semiconductor substrate along said two inductor electrodes and comprising a p region and an n region electrically connected over their entire length respectively to one and the other of said two inductor electrodes, wherein inductors respectively formed by said two inductor electrodes and the capacitor formed by said pn junction layer along said two inductor electrodes exist as distributed constants, and at least one of said two inductor electrodes is used as a signal transmission line. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
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28. An LC element comprising:
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two inductor electrodes formed in a meander shape respectively having predetermined inductances disposed essentially in opposition, and a pn junction layer functioning as a capacitor by using in a reverse bias state, formed on a semiconductor substrate between said two inductor electrodes and comprising a p region and an n region electrically connected over their entire length respectively to one and the other of said two inductor electrodes, wherein inductors respectively formed by said two inductor electrodes and the capacitor formed by said pn junction layer between said two inductor electrodes exist as distributed constants, and at least one of said two inductor electrodes is used as a signal transmission line. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36)
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37. An LC element comprising:
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two inductor electrodes formed in a curved line respectively having predetermined inductances disposed essentially in parallel, and a pn junction layer functioning as a capacitor by using in a reverse bias state, formed on a semiconductor substrate along said two inductor electrodes and comprising a p region and an n region electrically connected over their entire length respectively to one and the other of said two inductor electrodes, wherein inductors respectively formed by said two inductor electrodes and the capacitor formed by said pn junction layer along said two inductor electrodes exist as distributed constants, and at least one of said two inductor electrodes is used as a signal transmission line. - View Dependent Claims (38, 39, 40, 41, 42, 43, 44, 45)
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46. An LC element comprising:
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two inductor electrodes formed in a curved line respectively having predetermined inductances disposed essentially in opposition, and a pn junction layer functioning as a capacitor by using in a reverse bias state, formed on a semiconductor substrate between said two inductor electrodes and comprising a p region and an n region electrically connected over their entire length respectively to one and the other of said two inductor electrodes, wherein inductors respectively formed by said two inductor electrodes and the capacitor formed by said pn junction layer between said two inductor electrodes exist as distributed constants, and at least one of said two inductor electrodes is used as a signal transmission line. - View Dependent Claims (47, 48, 49, 50, 51, 52, 53, 54)
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55. An LC element comprising:
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two inductor electrodes formed in a straight line respectively having predetermined inductances disposed essentially in parallel, and a pn junction layer functioning as a capacitor by using in a reverse bias state, formed on a semiconductor substrate along said two inductor electrodes and comprising a p region and an n region electrically connected over their entire length respectively to one and the other of said two inductor electrodes, wherein inductors respectively formed by said two inductor electrodes and the capacitor formed by said pn junction layer along said two inductor electrodes exist as distributed constants, and at least one of said two inductor electrodes is used as a signal transmission line. - View Dependent Claims (56, 57, 58, 59, 60, 61, 62, 63)
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64. An LC element comprising:
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two inductor electrodes formed in a straight line respectively having predetermined inductances disposed essentially in opposition, and a pn junction layer functioning as a capacitor by using in a reverse bias state, formed on a semiconductor substrate between said two inductor electrodes and comprising a p region and an n region electrically connected over their entire length respectively to one and the other of said two inductor electrodes, wherein inductors respectively formed by said two inductor electrodes and the capacitor formed by said pn junction layer between said two inductor electrodes exist as distributed constants, and at least one of said two inductor electrodes is used as a signal transmission line. - View Dependent Claims (65, 66, 67, 68, 69, 70, 71, 72)
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Specification