Lens for depositing target material on a substrate

• US 5,557,471 A
• Filed: 02/03/1995
• Issued: 09/17/1996
• Est. Priority Date: 03/05/1993
• Status: Expired due to Term

• Current Assignee: University of Puerto Rico
• Original Assignee: University of Puerto Rico
• Inventors: Fernandez, Felix E.
• Primary Examiner(s): Sugarman, Scott J.
• Application Number:
  US08/383,430
• Time in Patent Office: 592 Days
• Field of Search: 359/708, 359/709
• US Class Current: 359/709
• CPC Class Codes: C23C 14/28 by wave energy or particle radiation C23C14/32 - C23C14/48 take precedence

Abstract

A method of depositing a thin layer of a target material on a substrate is disclosed. The method comprises illuminating the material with at least one elliptical laser beam so that a desposition plume is emitted from the target material, then positioning the substrate to receive the material emitted by the deposition plume. An apparatus for practicing the method and a multi-faceted negative axicon for forming a plurality of concentric laser beams are also disclosed.

Claims

1. A lens comprising:

(a) a first substantially flat surface; and

(b) a second concave surface opposite said first surface comprising a central conic section and at least one concentric ring, said conic section defining a cone angle relative to said first surface, each of said at least one concentric rings having an inner diameter and defining an angle relative to said first surface, and the angle of each of said at least one concentric rings being greater than the cone angle of said conic section and any rings within its inner diameter each of said conic section and said at least one concentric ring being configured to separate a beam of light passing therethrough into a split beam having a hollow elliptical cross-section.

2. A lens according to claim 1, wherein said at least one concentric ring comprises a plurality of rings.

3. A lens according to claim 1, wherein said at least one concentric ring comprises two concentric rings.

4. A lens according to claim 3, wherein said central conic section and said at least one concentric ring are sized and configured so that concentric beams produced by passing light through said lens have generally similar power densities.

5. A lens according to claim 1 in combination with a beam-focusing lens.

6. A combination according to claim 5, wherein said beam-focusing lens comprises a cylindrical lens.

7. A combination according to claim 5, wherein said beam-focusing lens comprises a spheroidal-cylindrical lens.

8. A multiple-cone axicon lens, comprising:

a first substantially planar surface; and

a second concave surface opposing said planar surface having a central conic section and at least one concentric ring, said conic section defining a cone angle relative to said planar surface, each of said at least one concentric rings having an inner diameter and defining an angle relative to said planar surface, and the angle of each of said at least one concentric rings being greater than the cone angle of the conic section and any concentric rings positioned inward of its inner diameter;

wherein said central conic section and said at least one concentric ring are sized and configured so that concentric beams produced by passing light through said lens have generally similar power densities.

9. A multiple-cone axicon lens according to claim 8, wherein said at least one concentric ring comprises two concentric rings.

10. A multiple-cone axicon lens according to claim 9, wherein the inner diameter of the first concentric ring circumscribes the outer diameter of the conic section, and the inner diameter of the second concentric ring circumscribes the outer diameter of the first concentric ring.