Dual cathode sputter coating apparatus

• US 5,558,751 A
• Filed: 02/08/1995
• Issued: 09/24/1996
• Est. Priority Date: 04/20/1994
• Status: Expired due to Fees

• Current Assignee: Leybold Aktiengesellschaft
• Original Assignee: Leybold Aktiengesellschaft
• Inventors: Gesche, Roland, Scherer, Michael, Mahler, Peter, Stang, Wolfgang
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): MCDONALD, RODNEY GLENN
• Application Number:
  US08/385,521
• Time in Patent Office: 594 Days
• Field of Search: 204/298.08, 204/298.11, 204/298.12, 204/298.18, 204/298.26, 204/298.06, 204/192.12
• US Class Current: 204/298.26
• CPC Class Codes: H01J 37/34 operating with cathodic sputtering H01J37/36 takes precedence ; methods of cathodic sputtering C23C14/34
• CPC Class Codes: H01J 37/3414 Targets

Abstract

In a coating apparatus, a sputter cathode (1) has, directly side by side, two electrodes (2, 3) connected in common to a high-frequency generator and having each a target (9, 10). The targets (9, 10) of both electrodes (2, 3) abut one another each with a straight edge (11, 12). A dark space shield surrounds both electrodes (2, 3) and targets (9, 10) together.

Claims

1. Sputter coating apparatus comprising

a pair of side by side electrodes at common potential connected to a common power supply,

a pair of electrically non-conductive targets soldered to respective electrodes, each having a straight edge which abuts the straight edge of the other target, and

a common dark space shield surrounding both of said electrodes and said targets together.

2. Sputter coating apparatus as in claim 1 wherein said electrodes each comprise a rectangular plate having an edge which faces the edge of the other plate, said targets extending beyond the edges of the electrode plates.

3. Sputter coating apparatus as in claim 1 further comprising

a coating chamber comprising a wall having aperture means therethrough,

a pair of lead-throughs electrically connected to respective electrodes opposite from said targets, said lead-throughs extending through said aperture means, and

connecting means which electrically connect said lead-throughs outside of said coating chamber.