×

Dual cathode sputter coating apparatus

  • US 5,558,751 A
  • Filed: 02/08/1995
  • Issued: 09/24/1996
  • Est. Priority Date: 04/20/1994
  • Status: Expired due to Fees
First Claim
Patent Images

1. Sputter coating apparatus comprisinga pair of side by side electrodes at common potential connected to a common power supply,a pair of electrically non-conductive targets soldered to respective electrodes, each having a straight edge which abuts the straight edge of the other target, anda common dark space shield surrounding both of said electrodes and said targets together.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×