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Capacitance type accelerometer

  • US 5,559,290 A
  • Filed: 06/01/1995
  • Issued: 09/24/1996
  • Est. Priority Date: 11/15/1988
  • Status: Expired due to Fees
First Claim
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1. A capacitance type accelerometer comprising:

  • a first plate made of silicon and formed with a movable electrode part which is supported by a silicon beam and is moved in accordance with acceleration, the movable electrode part of the first plate having a lead-out part;

    a pair of second plates respectively having fixed electrodes thereon disposed so as to respectively face the movable electrode part with a certain separation distance, the fixed electrode plates of the pair of second plates having respective lead-out parts; and

    a signal processing circuit for processing an electric signal generated between the lead-out part of first plate and the lead-out parts of the pair of second plates due to the acceleration;

    wherein the first plate and the pair of second plates are laminated, and the lead-out part of the movable electrode part of the first plate and the lead-out parts of the pair of second plates are diced so as to have a common side plane and are electrically connected to the signal processing circuit.

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