Angular velocity sensor
First Claim
1. A semiconductor angular velocity sensor, comprising:
- a substrate;
a first vibratory member supported on said substrate and parallel thereto through a first support beam for vibration in a lateral direction relative to said substrate;
a second vibratory member supported in axial alignment with the support axis of said first support beam and supported on said first vibratory member and parallel thereto through a second support beam for vibrating in the lateral direction and also in a perpendicular direction relative to the face of said substrate;
a vibration generating means vibrating said first vibratory member and second vibratory member in the lateral direction relative to said substrate; and
a displacement detection means detecting the extent of displacement of said second vibratory member in the perpendicular direction while the second vibratory member is vibrated by the vibration generating means.
1 Assignment
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Accused Products
Abstract
An angular velocity sensor arranged to minimize the influence of viscous resistance of gases in association with a vibratory member, and to enhance the sensitivity of angular velocity detection through reduction of noises. The angular velocity sensor includes a first vibratory member supported on a first support beam for vibration in horizontally lateral direction perpendicular to the support axis, a second vibratory member horiztonally supported through a second support beam at a position on the support axis and inward of the first vibratory member for vibrations in the horizontally lateral direction and at the same time in the vertical direction to the face of an upper substrate, and a vibration generating means for imparting vibrations to the first and second vibratory members in the horizontally lateral direction. With these arrangements, when a turning moment about the support axis is applied, the second vibratory member is displaced in the vertical direction under the influence of Coriolis force, and an angular velocity signal indicative of this displacement is produced by a displacement detector.
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Citations
11 Claims
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1. A semiconductor angular velocity sensor, comprising:
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a substrate; a first vibratory member supported on said substrate and parallel thereto through a first support beam for vibration in a lateral direction relative to said substrate; a second vibratory member supported in axial alignment with the support axis of said first support beam and supported on said first vibratory member and parallel thereto through a second support beam for vibrating in the lateral direction and also in a perpendicular direction relative to the face of said substrate; a vibration generating means vibrating said first vibratory member and second vibratory member in the lateral direction relative to said substrate; and a displacement detection means detecting the extent of displacement of said second vibratory member in the perpendicular direction while the second vibratory member is vibrated by the vibration generating means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A semiconductor angular velocity sensor, comprising:
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a substrate; a first vibratory member in the shape of a frame having a central opening, supported on said substrate and parallel thereto through a first support beam for vibration in a lateral direction relative to said substrate; a second vibratory member supported in axial alignment with the support axis of said first support beam and supported within the frame of said first vibratory member and parallel thereto through a second support beam for vibration in the lateral direction and also in a perpendicular direction relative to the face of said substrate; a vibration generating means vibrating said first vibratory member and said second vibratory member in the lateral direction relative to said substrate; and a displacement detection means detecting the extent of displacement of said second vibratory member in the perpendicular direction while the second vibratory member is vibrated by the vibration generating means.
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Specification