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In-situ monitoring of the change in thickness of films

  • US 5,559,428 A
  • Filed: 04/10/1995
  • Issued: 09/24/1996
  • Est. Priority Date: 04/10/1995
  • Status: Expired due to Term
First Claim
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1. A method of in-situ monitoring of the change in thickness of a conductive film on an underlying body comprising the steps of:

  • (a) inducing an eddy current in the film by producing an alternating electromagnetic field with a sensor proximate the film, the sensor including a coil, a capacitor electrically connected to the coil, and a ferrite pot core for shaping the electromagnetic field; and

    (b) detecting a change in the current due to the change in thickness of the film.

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