Method of calibrating a sensor

• US 5,559,431 A
• Filed: 10/07/1994
• Issued: 09/24/1996
• Est. Priority Date: 10/08/1993
• Status: Expired due to Term

• Current Assignee: Micro-Epsilon Messtechnik GmbH & Co., KG
• Original Assignee: Micro-Epsilon Messtechnik GmbH & Co., KG
• Inventors: Sellen, Martin
• Primary Examiner(s): O'Shea, Sandra L.
• Assistant Examiner(s): Phillips, Roger
• Application Number:
  US08/319,882
• Time in Patent Office: 718 Days
• Field of Search: 324/202, 324/228, 324/234, 324/239-243, 324/235-237, 324/225, 364/571.01-571.07, 73/1 R, 73/1 J
• US Class Current: 324/202
• CPC Class Codes: G01D 18/008 with calibration coefficients stored in memory
• CPC Class Codes: G01N 27/9046 by analysing electrical signals

Abstract

To suppress and compensate influences of disturbance variables, a method of calibrating a sensor is disclosed, in which at most as many so-called influence variables influencing the measuring result are considered as measurable quantities are detected by the sensor, the set of the influence variables being composed of at least one disturbance variable influencing the measurement and at least one target quantity to be determined from the measurable quantities. The method in accordance with the invention is characterized in that several values of the target quantity and several states characterized by the disturbance variable are defined, that for all combinations of defined values of the target quantity with defined states the corresponding values of the measurable quantities are acquired, that from one each of the defined values of the target quantity and the corresponding values of the measurable quantity respectively a set of coefficients is determined for all defined states, and that the sets of coefficients are associated each to the corresponding value of the target quantity and stored.

Claims

1. A method of calibrating a sensor, in which at most as many influence variables affecting the measuring results are considered as measurable quantities are detected by the sensor, the number of influence variables being composed of at least one disturbance variable influencing the measurement and at least one target quantity to be determined from the measurable quantities, and comprising the steps of:

defining several values of the at least one target quantity and defining several values of the at least one disturbance variable for each of the defined values of the at least one target quantity;

detecting the corresponding values of the measurable quantities for all combinations of defined values of the at least one target quantity with corresponding defined Values of the at least one disturbance variable;

determining from each of the defined values of the at least one target quantity and the corresponding detected values of the measurable quantities a respective set of coefficients;

associating each of the sets of coefficients to the corresponding defined values of the at least one target quantity; and

storing the sets of coefficients,

wherein for determining an unknown value of the at least one target quantity the corresponding values of the measurable quantities are detected, wherein the detected values of the measurable quantities for the corresponding unknown value of the at least one target quantity are multiplied with each of the stored sets of coefficients and added up to a subtotal for each set of coefficients, the subtotal being associated to the same defined value of the at least one target quantity as the respective set of coefficients, and that a range of values between two successive defined values of the at least one target quantity is determined as a range of values for the unknown target quantity, the deviation from the corresponding subtotal being positive for one of these two defined values of the at least one target quantity, whereas the deviation from the corresponding subtotal is negative for the other of these two defined values of the at least one target quantity.

2. The method as in claim 1, the differences between the defined values of the at least one target quantity and the corresponding subtotals are interpreted as values of an error function dependent on the at least one target quantity, and that the unknown value of the at least one target quantity is estimated as the value of the at least one target quantity at the zero passage of the error function.

3. The method as in claim 2, wherein an interpolation of the error function is carried out to determine its zero passage.

4. The method as in claim 3, wherein a linear interpolation of the error function is carried out to determine its zero passage.

5. The method as in claim 3, wherein a spline interpolation of the error function is carried out to determine its zero passage.

6. The method as in claim 2, wherein an approximation of the error function is carried out to determine its zero passage.

7. The method as in claim 6, wherein an approximation is carried out in the meaning of the smallest error squares.

8. A method of calibrating a sensor, in which at most as many influence variables affecting the measuring results are considered as measurable quantities are detected by the sensor, the number of influence variables being composed of at least one disturbance variable influencing the measurement and at least one target quantity to be determined from the measurable quantities, and comprising the steps of:

defining several values of the at least one target quantity and defining several values of the at least one disturbance variable for each of the defined values of the at least one target quantity;

detecting the corresponding values of the measurable quantities for all combinations of defined values of the at least one target quantity with corresponding defined values of the at least one disturbance variable;

determining from each of the defined values of the at least one target quantity and the corresponding detected values of the measurable quantities a respective set of coefficients;

associating each of the sets of coefficients to the corresponding defined values of the at least one target quantity; and

storing the sets of coefficients;

wherein said sensor is an eddy current sensor having at least one measuring coil, with the distance d between the eddy current sensor and a target forming the at least one target quantity, the electric conductivity and the effective permeability of the target forming the at least one disturbance variable, and the real and imaginary parts of the impedance of the measuring coil at different frequencies being acquired as measurable quantities M_l (l=1, . . . , m) and wherein several distance values d_i (i=1, . . . , n) and several values ZK_j (j=1, . . . , k) of the electric conductivity and the effective permeability of the target are defined, wherein for all combinations of distance values d_i with combinations of values ZK_j the corresponding measurable quantities M_l are detected, wherein from each one of the distance values d_i and the corresponding values of measurable quantities M_l for all combinations of values ZK_j a set of coefficients k_i (k_i =(k_i1, . . . , k_im) is determined, and that the sets of coefficients k_i are associated each to the corresponding distance value d_i and stored.

9. The method as in claim 8, wherein at least six measurable quantities M_l are used (m≧

6), i.e., the real and imaginary parts of the impedance of the measuring coil are detected at at least three different calibration frequencies.

10. The method as in claim 8, wherein the combinations of values ZK_j are selected from an expected range of physically useful combinations of values, and that more combinations of values ZK_j are selected from the ranges of low electric conductivities and effective permeability than from ranges of higher electric conductivities and effective permeabilities.

11. The method as in claim 8, wherein the number k of combinations of values ZK_j is selected larger than twice the number of employed calibration frequencies.

12. The method as in claim 8, wherein the number k of combinations of values ZK_j is selected all the smaller the higher the employed calibration frequencies are.

13. The method as in claim 8, wherein the distance values d_i are selected equidistant.

14. The method as in claim 8, characterized in that for improving the measuring result the number n of distance values d_i is increased.

15. The method of detecting and evaluating the measuring data of a sensor calibrated as in claim 8 wherein the detection of the measurable quantities for determining the sets of coefficients k_i is carried out at the same measuring frequencies as the detection of the measurable quantities for determining the distance d.

16. A method of calibrating a sensor, in which at most as many influence variables affecting the measuring results are considered as measurable quantities are detected by the sensor, the number of influence variables being composed of at least one disturbance variable influencing the measurement and at least one target quantity to be determined from the measurable quantities, and comprising the steps of:

defining several values of the at least one target quantity and defining several values of the at least one disturbance variable for each of the defined values of the at least one target quantity;

detecting the corresponding values of the measurable quantities for all combinations of defined values of the at least one target quantity with corresponding defined values of the at least one disturbance variable;

determining from each of the defined values of the at least one target quantity and the corresponding detected values of the measurable quantities a respective set of coefficients;

associating each of the sets of coefficients to the corresponding defined values of the at least one target quantity; and

storing the sets of coefficients;

wherein said sensor is an eddy-current sensor having at least one measuring coil, wherein the distance d between the eddy current sensor and a target is considered as the at least one disturbance variable, the electric conductivity and the effective permeability of the target form the at least one target quantity, and the real and imaginary parts of the impedance of the measuring coil are detected at different frequencies as measurable quantities M_l (l=1, . . . , m).

17. The method as in claim 16, wherein it is employed for testing the target material.

18. The method as in claim 16, wherein the method is employed for testing the homogeneity of the target material or for detecting damage in the structure of the surface of a target.