Main valve

• US 5,560,586 A
• Filed: 05/16/1995
• Issued: 10/01/1996
• Est. Priority Date: 05/25/1994
• Status: Expired due to Fees

• Current Assignee: Anelva Corporation (Canon Inc.)
• Original Assignee: Anelva Corporation (Canon Inc.)
• Inventors: Aruga, Yoshiki, Suzuki, Naoyuki
• Primary Examiner(s): NGUYEN, HOANG M
• Application Number:
  US08/442,164
• Time in Patent Office: 504 Days
• Field of Search: 251/129.03, 251/129.11, 251/335.3, 251/14, 251/129.01, 251/31, 251/318, 251/298, 251/266, 79/424.8 VA
• US Class Current: 251/298
• CPC Class Codes: F16K 31/04 using a motor
• CPC Class Codes: F16K 31/50 with screw-spindle or internally threaded actuating means
• CPC Class Codes: H01L 21/67 Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere processes per se H01L21/30, H01L21/46, H01L23/00; simple temporary support means, e.g. using adhesives, electric or magnetic means H01L21/68, H01L21/302; apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto H01L24/74;

Abstract

A bridge-type main valve located at a connecting outlet between a vacuum chamber and a main vacuum pump, and having a rod of an electric cylinder driven by a stepper motor connected to a valve seat for opening and dosing the connecting outlet so that the driving direction and a closing surface of the valve seat form a right angle. A piston may be attached to the rod, and a cylindrical housing fitted in the piston so that the piston and the cylindrical housing form a pressurized air pumping chamber for moving the rod and the valve seat in the outlet closing direction. The valve can achieve fine pressure adjustment without any variable orifice by stopping a valve seat at an arbitrary (not stepwise) position.

Claims

1. A main valve located at an opening for connecting a vacuum chamber and a main vacuum pump, said main valve comprising:

a valve seat for opening and closing said opening, said valve seat being larger than said opening;

at least one cylinder connectable to said valve seat for raising and lowering said valve seat; and

a driving source for driving said cylinder,

said cylinder comprising a cylindrical housing, a rod having one end extending through s aid cylindrical housing and being connectable to said valve seat and at another end a piston housed in said cylindrical housing, a nut coupled to said piston, a ball screw having a threaded portion coupled within said nut and a lower portion connectable to said driving source for rotating said ball screw which drives said nut, said piston, said rod, and said valve seat forward and backward to open and close said opening,

wherein said rod has a cavity therein and a part of said threaded portion of said ball screw projects through said nut and said piston and is housed in said cavity in said rod.

6. A main valve according to claim 1, wherein a chamber formed by said cylindrical housing and said piston of said cylinders includes a port through which pressurized fluid may be injected to move said valve seat for closing said opening.

7. The main valve of claim 1 wherein said at least one cylinder comprises two cylinders connectable to opposite ends of said valve seat.

8. The main valve of claim 1 wherein said valve seat has a lower surface, said lower surface comprising a pair of slots having O-rings therein to form a seal between said valve seat and the opening when said opening is closed.

9. The main valve of claim 1 wherein said rod is axially sealed by a bellows for vacuum sealing the vacuum chamber.

10. The main valve of claim 1 wherein said driving source is a motor.

11. The main valve of claim 1 wherein said cylinder is electric.

12. The main valve according to claim 1 wherein said cylinder further comprises a bellows operatively coupled to said piston on at least one side of said vacuum chamber.

13. The main valve of claim 1 wherein said cylinder further comprises a whirl stopper connected to said nut and said cylindrical housing to prevent rotation of the nut.

2. A main valve located at an opening for connecting a vacuum chamber and a main vacuum pump, said main valve comprising:

a valve seat for opening and closing said opening, said valve seat being larger than said opening;

at least one cylinder connectable to said valve seat for raising and lowering said valve seat; and

a driving source for driving said cylinder,

said cylinder comprising a cylindrical housing, a rod having one end extending through said cylindrical housing and being connectable to said valve seat and at another end a piston housed in said cylindrical housing, a nut coupled to said piston, a ball screw having a threaded portion coupled within Said nut and a lower portion connectable to said driving source for rotating said ball screw which drives said nut, said piston, said rod, and said valve seat forward and backward to open and close said opening,

wherein said cylinder is connectable to one end of said valve seat and another end of said valve seat is connectable to an edge of said opening.

3. The main valve of claim 2 wherein a bar is connected to said one end of said valve seat and said cylinder is connected to said bar via a pin inserted through the rod of said cylinder and said bar.

4. The main valve of claim 3 wherein said bar has a hole in which said rod is inserted.

5. The main valve of claim 3 wherein a second bar is connected to the other end of said valve seat and said second bar is connected to the edge of said opening via a block mounted on the edge and a pin through the block and the second bar, whereby said valve seat rotates open when the rod of said cylinder drives upward.

14. The main valve of claim 2 wherein said cylinder further comprises a whirl stopper connected to said nut and said cylindrical housing to prevent rotation of the nut.