Integrated circuit structure including CMOS devices protected by patterned nitride passivation and method for the fabrication thereof

• US 5,561,319 A
• Filed: 08/30/1994
• Issued: 10/01/1996
• Est. Priority Date: 05/14/1993
• Status: Expired due to Term

• Current Assignee: LSI Logic Corporation (Broadcom, Inc.)
• Original Assignee: LSI Logic Corporation (Broadcom, Inc.)
• Inventors: Toutounchi, Shahin, Owens, Alexander H., Yee, Abraham, Lyu, Michael
• Primary Examiner(s): WOJCIECHOWICZ, EDWARD JOSEPH
• Application Number:
  US08/298,041
• Time in Patent Office: 763 Days
• Field of Search: 257/324, 257/391, 257/640, 257/649, 257/788, 437/40, 437/228, 437/235, 437/241, 437/913
• US Class Current: 257/649
• CPC Class Codes: H01L 23/3171 the coating being directly applied to the semiconductor body, e.g. passivation layer H01L23/3178 takes precedence
• CPC Class Codes: H01L 29/408 with an insulating layer with a particular dielectric or electrostatic property, e.g. with static charges or for controlling trapped charges or moving ions, or with a plate acting on the insulator potential or the insulator charges, e.g. for controlling charges effect or potential distribution in the insulating layer, or with a semi-insulating layer contacting directly the semiconductor surface
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/3025 Electromagnetic shielding
• CPC Class Codes: Y10S 438/953 Making radiation resistant device
• CPC Class Codes: Y10S 438/958 Passivation layer

Abstract

A CMOS integrated circuit structure is disclosed having a patterned nitride passivation layer, wherein the nitride is patterned such that it does not overlie the thin gate oxide portions of one or more of the MOS devices. When protection against the effects of external radiation is desired, the thin gate oxide areas of the PMOS devices are left uncovered by the patterned nitride passivation layer. When protection is desired against the effects of internally generated "hot electrons", the thin gate oxide areas of the NMOS devices are left uncovered by the patterned nitride passivation layer.

Claims

1. An integrated circuit structure comprising:

(a) one or more MOS devices formed in said integrated circuit structure, each of said MOS devices comprising a thin gate oxide layer therein; and

(b) a patterned silicon nitride passivation layer overlying an uppermost metallization layer of said integrated circuit structure, wherein said pattern of said patterned nitride passivation layer is formed such that openings in said patterned nitride passivation layer overlay said thin gate oxide layer of one or more of said MOS devices.

2. The integrated circuit structure of claim 1 wherein said MOS devices include PMOS devices, and said openings in said patterned nitride passivation layer overlay said thin gate oxide-layer of one or more of said PMOS devices to thereby enhance the radiation protection of said integrated circuit structure provided by said patterned nitride passivation layer.

3. The integrated circuit structure of claim 2 further comprising an additional passivation layer overlying and completely covering said patterned nitride passivation layer and MOS devices lying beneath said patterned nitride passivation layer in said integrated circuit structure.

4. The integrated circuit structure of claim 3 wherein said additional passivation layer comprises a silicon oxide passivation layer.

5. The integrated circuit structure of claim 2 further comprising an additional passivation layer completely overlying and covering said MOS devices in said integrated circuit structure and immediately underlying said patterned nitride passivation layer.

6. The integrated circuit structure of claim 5 wherein said additional passivation layer is a silicon oxide passivation layer.

7. The integrated circuit structure of claim 2 further comprising a thin layer of silicon nitride deposited over said patterned nitride passivation layer.

8. The integrated circuit structure of claim 7 wherein said thin layer of nitride deposited over said patterned nitride passivation layer ranges in thickness from about 50 to about 1000 Angstroms.

9. The integrated circuit structure of claim 1 wherein said MOS devices include NMOS devices, and said openings in said patterned nitride passivation layer overlay said thin gate oxide layer of one or more of said NMOS devices to thereby enhance protection of said integrated circuit structure against hot electrons provided by said patterned nitride passivation layer.

10. The integrated circuit structure of claim 9 further comprising an additional passivation layer overlying and completely covering said patterned nitride passivation layer and MOS devices lying beneath said patterned nitride passivation layer in said integrated circuit structure.

11. The integrated circuit structure of claim 10 wherein said additional passivation layer comprises a silicon oxide passivation layer.

12. The integrated circuit structure of claim 9 further comprising an additional passivation layer completely overlying and covering said MOS devices in said integrated circuit structure and immediately underlying said patterned nitride passivation layer.

13. The integrated circuit structure of claim 12 wherein said additional passivation layer is a silicon oxide passivation layer.

14. The integrated circuit structure of claim 9 further comprising a thin layer of silicon nitride deposited over said patterned nitride passivation layer.

15. The integrated circuit structure of claim 14 wherein said thin layer of nitride deposited over said patterned nitride passivation layer ranges in thickness from about 50 to about 1000 Angstroms.

16. An integrated circuit structure having protection therein from external radiation comprising:

(a) one or more PMOS devices and one or more NMOS devices formed in said integrated circuit structure, each of said PMOS and NMOS devices comprising a thin gate oxide layer therein; and

(b) a patterned silicon nitride passivation layer overlying an uppermost metallization layer of said integrated circuit structure, wherein said pattern of said patterned nitride passivation layer is formed such that openings in said patterned nitride passivation layer overlay said thin gate oxide layer of one or more of said PMOS devices.

17. An integrated circuit structure having protection therein from hot electrons generated therein comprising:

(a) one or more PMOS devices and one or more NMOS devices formed in said integrated circuit structure, each of said PMOS and NMOS devices comprising a thin gate oxide layer therein; and

(b) a patterned silicon nitride passivation layer overlying an uppermost metallization layer of said integrated circuit structure, wherein said pattern of said patterned nitride passivation layer is formed such that openings in said patterned nitride passivation layer overlay said thin gate oxide layer of one or more of said NMOS devices.

18. A method of fabricating an integrated circuit structure comprising:

(a) providing one or more MOS devices in said integrated circuit structure, each of said MOS devices comprising a thin gate oxide layer therein; and

(b) forming a patterned silicon nitride passivation layer over an uppermost metallization layer of said integrated circuit structure, said patterned nitride passivation layer having openings in said pattern positioned such that said openings in said patterned nitride passivation layer overlay said thin gate oxide layer of one or more of said MOS devices.

19. The method of fabricating an integrated circuit structure of claim 18 which further comprises forming an additional passivation layer comprising a silicon oxide layer overlying and completely covering said patterned nitride passivation layer and said one or more MOS devices in said integrated circuit structure.

20. The method of fabricating an integrated circuit structure of claim 18 which further comprises forming an additional passivation layer comprising a silicon oxide layer overlying and completely covering said one or more MOS devices in said integrated circuit structure, and immediately underlying said patterned nitride passivation layer.

21. The method of fabricating an integrated circuit structure of claim 18 which further comprises depositing a thin layer of silicon nitride over said patterned nitride passivation layer.

22. The method of fabricating an integrated circuit structure of claim 18 wherein said step of depositing a thin layer of silicon nitride over said patterned nitride passivation layer further comprises depositing from about 50 to about 1000 Angstroms of silicon nitride on said integrated circuit structure.

23. A method of fabricating an integrated circuit structure having protection against externally generated radiation comprising:

(a) providing one or more PMOS devices and one or more NMOS devices in said integrated circuit structure, each of said PMOS and NMOS devices comprising a thin gate oxide layer therein; and

(b) forming a patterned silicon nitride passivation layer over an uppermost metallization layer of said integrated circuit structure, said patterned nitride passivation layer having openings in said pattern positioned such that said openings in said patterned nitride passivation layer overlay said thin gate oxide layer of one or more of said PMOS devices.

24. A method of fabricating an integrated circuit structure having protection against internally generated hot electrons comprising:

(a) providing one or more PMOS devices and one or more NMOS devices in said integrated circuit structure, each of said PMOS and NMOS devices comprising a thin gate oxide layer therein; and

(b) forming a patterned silicon nitride passivation layer over an uppermost metallization layer of said integrated circuit structure, said patterned nitride passivation layer having openings in said pattern positioned such that said openings in said patterned nitride passivation layer overlay said thin gate oxide layer of one or more of said NMOS devices.

25. An integrated circuit structure comprising:

(a) one or more MOS devices formed in said integrated circuit structure, each of said MOS devices comprising a thin gate oxide layer therein defining the area in said integrated circuit structure in which said MOS device is formed; and

(b) a patterned silicon nitride passivation layer overlying said entire integrated circuit structure, wherein said pattern of said patterned nitride passivation layer is formed such that openings in said patterned nitride passivation layer, each defining an area approximately equal to the area defined by the underlying gate oxide layer, overlay said thin gate oxide layer area of one or more of said MOS devices.