System for evaluating probing networks

• US 5,561,377 A
• Filed: 04/14/1995
• Issued: 10/01/1996
• Est. Priority Date: 04/14/1995
• Status: Expired due to Term

• Current Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Gleason, K. Reed, Strid, Eric W., Schappacher, Jerry B., Carlton, Dale E.
• Primary Examiner(s): Nguyen, Vinh P.
• Application Number:
  US08/422,439
• Time in Patent Office: 536 Days
• Field of Search: 324/158.1, 324/73.1, 324/750, 324/757, 324/761, 324/765, 324/72.5, 324/754, 439/482, 333/246, 333/248
• US Class Current: 324/750.02
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: G01R 1/06705 Apparatus for holding or moving single probes for moving multiple probe heads or ICs under test G01R31/2886
• CPC Class Codes: G01R 1/06772 High frequency probes
• CPC Class Codes: G01R 1/073 Multiple probes
• CPC Class Codes: G01R 31/2886 Features relating to contacting the IC under test, e.g. probe heads; chucks G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06
• CPC Class Codes: G01R 35/00 Testing or calibrating of apparatus covered by the other groups of this subclass
• CPC Class Codes: G01R 35/005 Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references G01R33/0035, G01R35/002 take precedence

Abstract

An interconnect assembly for evaluating a probe measurement network includes a base, respective inner and outer probing areas in mutually coplanar relationship on the upper face of the base, a reference junction, and a high-frequency transmission structure connecting the probing areas and the reference junction so that high-frequency signals can be uniformly transferred therebetween despite, for example, variable positioning of the device-probing ends of the network on the probing areas. A preferred method for evaluating the signal channels of the network includes connecting a reference unit to the reference junction and successively positioning each device-probing end that corresponds to a signal channel of interest on the inner probing area. Because the transmission structure uniformly transfers signals, the relative condition of the signals as they enter or leave each end will substantially match the condition of the signals as measured or presented by the reference unit, thereby enabling calibration of the network in reference to the device-probing ends. The assembly is particularly well-adapted for the evaluation of probe measurement networks of the type used for testing planar microelectronic devices.

Claims

1. An assembly for use in evaluating signal conditions in a probe measurement network, said probe measurement network being of the type having spaced-apart first and second device-probing ends, said assembly comprising:

(a) a base having an upper face including a dielectric area;

(b) respective first and second conductive planar probing areas located on said upper face in spaced-apart, mutually coplanar relationship to each other, said first and second conductive planar probinq areas being insulated from each other by means of said dielectric area and arranged so that said first and second device-probing ends can be simultaneously placed on said first and second conductive planar probing areas, respectively;

(c) a reference junction; and

(d) a high-frequency transmission structure connecting said first and second conductive planar probing areas to said reference junction such that for each position that said device-probing ends can occupy while on the corresponding areas, a transmission line of substantially constant high-frequency transmission characteristic is provided by said transmission structure between said device-probing ends and said reference junction.

2. The assembly of claim 1 adapted for use when said probe measurement network includes at least three device-probing ends in predetermined spaced-apart arrangement, said second conductive planar probing area being arranged relative to said first conductive planar probing area such that when any one of said ends is positioned on said first conductive planar probing area, the other ones of said ends are simultaneously positioned automatically on said second conductive planar probing area.

3. The assembly of claim 1 Wherein said first and second device-probing ends can be simultaneously placed on said first and second conductive planar probing areas, respectively, in at least two positions on said areas.

4. The assembly of claim 1 wherein the size of said first conductive planar probing area approximately corresponds to that of said device-probing end.

5. The assembly of claim 1 further including at least one high-frequency adapter provided adjacent said reference junction, said adapter enabling detachable connection of a reference channel to said reference junction.

6. The assembly of claim 1 further including a high-frequency adapter provided adjacent said reference junction and having spaced-apart first and second conductors, said first and second conductors being connected by said reference junction to said first and second conductive planar probing areas, respectively.

7. The assembly of claim 1 wherein said second conductive planar probing area surrounds said first conductive planar probing area.

8. The assembly of claim 1 wherein said second conductive planar probing area forms a shield about said transmission line that substantially prevents radiation from entering said transmission line from any source adjacent said upper face other than said first device-probing end.

9. The assembly of claim 1 wherein said high-frequency transmission structure is at least partially embedded in said base.

10. The assembly of claim 1 in combination with a support for supporting a device-under-test and further in combination with a positioning mechanism that enables said device-probing ends to be shifted back and forth between a first probing position on the corresponding areas and a second probing position on said device-under-test free of any requirement for removal of said device-under-test from said support.

11. The assembly of claim 10 wherein said support defines an imaginary reference plane and further including an adjustment mechanism enabling adjustable positioning of said base relative to said support so that said probing areas extend in adjustable parallel relationship to said imaginary reference plane.

12. The assembly of claim 10 wherein said base is mounted in adjoining relationship to said support.