Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical material analysis

• US 5,561,523 A
• Filed: 02/10/1995
• Issued: 10/01/1996
• Est. Priority Date: 02/17/1994
• Status: Expired due to Term

• Current Assignee: Vaisala OY
• Original Assignee: Vaisala OY
• Inventors: Lehto, Ari, Blomberg, Martti, Orpana, Markku
• Primary Examiner(s): Turner, Samuel A.
• Assistant Examiner(s): MERLINO, AMANDA H
• Application Number:
  US08/386,773
• Time in Patent Office: 599 Days
• Field of Search: 356/352
• US Class Current: 356/454
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

An electrostatically tunable Fabry-Perot interferometer produced by surface micromechanical techniques is used in optical material analysis as an optical sweeping filter in which the optical measurement wavelength is centered at a wavelength λ. The Fabry-Perot interferometer based sensor structure comprises a body block, two essentially parallel mirrors bonded to the body block, of which mirrors at least one is partially transmitting and movable relative to the body block. The mirrors are spaced maximally by a few half-wavelengths, λ/2, from each other, and both of the mirror structures include integral electrode structures capable of effecting an electrostatic force between the mirror structures. The movable mirror structure is provided with structurally weakened regions surrounding the optical area of the mirror so as to facilitate keeping the optical area at a maximum degree of flatness. At least one of the electrode structures surrounds the optical area so as to achieve a mechanical lever action and avoid galvanic contact between the electrode of the movable mirror structure and the electrode of the fixed mirror structure.

Claims

1. An electrostatically tunable Fabry-Perot interferometer comprising:

a body block;

a first mirror structure mounted on said body block, said first mirror structure being semitransmitting and movable relative to said body block, said first mirror including an optical area and structurally weakened regions adjacent to a periphery of said optical area, wherein said structurally weakened regions result in said optical area maintaining an initial shape during movement of said first mirror structure;

a second mirror structure mounted on said body block, said second mirror being parallel to and spaced from said first mirror structure;

a first electrode structure, integral with said first mirror structure; and

a second electrode structure, integral with said second mirror structure, wherein at least one of said first and second electrode structures includes an electrode outside said optical area.

2. A Fabray-Perot interferometer as defined in claim 1, wherein an electrode of said first electrode structure surrounds said optical area.

3. A Fabry-Perot interferometer as defined in claim 1, wherein said electrode of said at least one of said first and second electrode structures is a ring electrode with a circular shape.

4. A Fabry-Perot interferometer as defined in claim 1, wherein an electrode of said second electrode structure surrounds said optical area.

5. A Fabry-Perot interferometer as defined in claim 3, further comprising a center electrode inside said ring electrode, and a region inside said ring electrode surrounding said optical area, said region including an isolating region and a conducting region wherein said isolating region separates said ring electrode from said conducting region which is connected to the potential of said center electrode.

6. A Fabry-Perot interferometer as defined in claim 1, wherein said structurally weakened regions are annular thinned regions.

7. A Fabry-Perot interferometer as defined in claim 5, wherein said isolating region is undoped or weakly doped polysilicon.

8. A Fabry-Perot interferometer as defined in claim 5, wherein said control electrode is doped polysilicon and said isolating region is undoped or weakly doped polysilicon.

9. A Fabry-Perot interferometer as defined in claim 1, wherein said electrode of said at least one of said first and second electrode structures outside said optical area completely surrounds said optical area.

10. A Fabry-Perot interferometer as defined in claim 1, wherein said first electrode structure is part of said optical area.

11. A Fabry-Perot interferometer as defined in claim 1, wherein said at least one of said first and second electrode structures surrounds said structurally weakened regions.

12. A Fabry-Perot interferometer as defined in claim 1, wherein said initial shape is planar.

17. A Fabry-Perot interferometer as defined in claim 1, wherein said optical area has a diameter of at least approximately 0.5 mm.

13. A method of maintaining an initial shape of an optical area of a movable mirror in a Fabry-Perot interferometer during deflection of said movable mirror comprising the steps of:

providing structurally weakened regions adjacent to a periphery of said optical area;

positioning another mirror having another optical area parallel to and spaced away from said movable mirror;

surrounding at least one of said optical area and said another optical area with an electrode;

applying a voltage to said electrode; and

bending said movable mirror at said structurally weakened regions in response to said applying, thereby moving said optical area relative to said another optical area while maintaining an initial shape of said optical area.

14. The method as defined in claim 13, wherein said surrounding further comprises surrounding said structurally weakened regions.

15. The method as defined in claim 13, further comprising providing a center electrode in at least one of said optical area and said another optical area.

16. The method as defined in claim 15, further comprising isolating said center electrode and said electrode.