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Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical material analysis

  • US 5,561,523 A
  • Filed: 02/10/1995
  • Issued: 10/01/1996
  • Est. Priority Date: 02/17/1994
  • Status: Expired due to Term
First Claim
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1. An electrostatically tunable Fabry-Perot interferometer comprising:

  • a body block;

    a first mirror structure mounted on said body block, said first mirror structure being semitransmitting and movable relative to said body block, said first mirror including an optical area and structurally weakened regions adjacent to a periphery of said optical area, wherein said structurally weakened regions result in said optical area maintaining an initial shape during movement of said first mirror structure;

    a second mirror structure mounted on said body block, said second mirror being parallel to and spaced from said first mirror structure;

    a first electrode structure, integral with said first mirror structure; and

    a second electrode structure, integral with said second mirror structure, wherein at least one of said first and second electrode structures includes an electrode outside said optical area.

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