Drive control device for an ultrasonic motor

• US 5,563,478 A
• Filed: 12/27/1994
• Issued: 10/08/1996
• Est. Priority Date: 08/18/1992
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Suganuma, Ryoichi
• Primary Examiner(s): BUDD, MARK OSBORNE
• Application Number:
  US08/364,011
• Time in Patent Office: 651 Days
• Field of Search: 310/316, 310/317, 310/319, 310/323, 318/116
• US Class Current: 318/116
• CPC Class Codes: H02N 2/142 Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
• CPC Class Codes: H02N 2/147 Multi-phase circuits
• CPC Class Codes: H02N 2/163 Motors with ring stator

Abstract

Based upon the output signals from two detector electrodes provided in positions which differ from those of input electrodes on a piezoelectric transducer element, it is detected in what order resonance frequency band the drive frequency of an ultrasonic motor is included, and the drive frequency of the ultrasonic motor is controlled so as to be within a predetermined frequency band.

Further, the resonance frequency band for the ultrasonic motor is switched over to any one of several resonance frequency bands, and, based upon the output signals from the two detector electrodes provided on the piezoelectric transducer element, it is detected in what order resonance frequency band the drive frequency is included, and the drive frequency of the ultrasonic motor is controlled so as to be within the resonance frequency band which has been switched over to.

Claims

1. A drive control device for an ultrasonic motor, in which two AC signals having a fixed phase difference are supplied to two input electrode groups on an electromagnetic energy to mechanical energy conversion element, and which drives a movable element by generating a progressive wave in a fixed element by said electromagnetic energy to mechanical energy conversion element, wherein at least two detector electrodes are provided on said electromagnetic energy to mechanical energy conversion elements, and comprising a frequency band control means which, based upon a phase difference between the output signals from said detector electrodes, performs control so as to bring the frequency of said two AC signals to be within a desired order resonance frequency band among a plurality of resonant frequency bands.

2. A drive control device for an ultrasonic motor, in which two AC signals having a fixed phase difference are supplied to two input electrode groups on an electromagnetic energy to mechanical energy conversion element, and which drives a movable element by generating a progressive wave in a fixed element by said electromagnetic energy to mechanical energy conversion element, comprising:

a frequency band control means which, based upon a phase difference between the output signals from at least two detector electrodes provided on said electromagnetic energy to mechanical energy conversion element, performs control so as to bring the frequency of said two AC signals to be within a desired order resonance frequency band among a plurality of resonant frequency bands; and

a drive frequency control means which, after the frequency of said two AC signals has reached the frequency of the desired order resonance frequency band, controls said frequency of said two AC signal to be a predetermined drive frequency.

3. A drive control device for an ultrasonic motor which drives a movable element by generating a progressive wave in a fixed element by an electromagnetic energy to mechanical energy conversion element, comprising:

(a) a frequency setting means which sets the drive frequency of said ultrasonic motor;

(b) a resonance order detection means which detects in which order of resonance frequency band the drive frequency of said ultrasonic motor lies, based upon the output signals from at least two detector electrodes which are provided on said electromagnetic energy to mechanical energy conversion element;

(c) a frequency band control means which controls said frequency setting means so as to bring the drive frequency of said ultrasonic motor to the frequency of a predetermined order resonance frequency band, based upon the order of resonance frequency band detected by said resonance order detection means;

(d) a phase shifting oscillator means, which generates two AC signals with the drive frequency set by said frequency setting means, having a fixed phase difference between them; and

;

(e) a power amplifier means which amplifies said two AC signals which are generated by said phase shifting oscillator means, and supplies them to two input electrode groups which are provided on said electromagnetic energy to mechanical energy conversion element.

4. A drive control device for an ultrasonic motor according to claim 3, wherein said resonance order detection means comprises a phase difference detection device which compares the phases of the output voltages from said two detector electrodes and outputs a voltage according to their phase difference, and a plurality of comparators which output resonance order detection signals when the output voltage of said phase difference detection device reaches voltages set according to resonance orders.

5. A drive control device for an ultrasonic motor according to claim 3, wherein a common electrode is provided on said electromagnetic energy to mechanical energy conversion element as a said detector electrode.

6. A drive control device for an ultrasonic motor according to claim 3, wherein a common electrode is provided on said electromagnetic energy to mechanical energy conversion element and is divided into a plurality of portions, of which at least one portion serves as a said detector electrode.

7. A drive control device for an ultrasonic motor according to claim 3, wherein said two detector electrodes are positioned within one wavelength of said progressive wave apart.

8. A drive control device for an ultrasonic motor according to claim 3, wherein said frequency setting means, after said drive frequency of said ultrasonic motor has reached the frequency of a predetermined resonance frequency band, controls said drive frequency to lie within said predetermined resonance frequency band.

9. A drive control device for an ultrasonic motor according to claim 3, wherein said power amplifier means when starting said ultrasonic motor supplies driving voltage to one only of said two input electrode groups, and, after in this state it has performed control so as to bring the drive frequency of said ultrasonic motor to the frequency of said predetermined resonance frequency band according to said frequency band control means, supplies driving voltage to the other one of said two input electrode groups as well, and thereby starts said ultrasonic motor.

10. A drive control device for an ultrasonic motor according to claim 3, wherein said electromagnetic energy to mechanical energy conversion element is a piezoelectric transducer element.

11. A drive control device for an ultrasonic motor which drives a movable element by generating a progressive wave in a fixed element by an electromagnetic energy to mechanical energy conversion element, comprising:

(a) a frequency setting means which sets the drive frequency of said ultrasonic motor;

(b) a frequency band switchover means which switches over the resonance frequency band of said ultrasonic motor to any one of a plurality of resonance frequency bands;

(c) a resonance order detection means which detects in which order of resonance frequency band the drive frequency of said ultrasonic motor lies, based upon the output signals from at least two detector electrodes which are provided on said electromagnetic energy to mechanical energy conversion element;

(d) a frequency band control means which controls said frequency setting means so as to bring the drive frequency of said ultrasonic motor to the frequency of the resonance frequency band switched over to by said frequency band switchover means, based upon the order of resonance frequency band detected by said resonance order detection means;

(e) a phase shifting oscillator means which generates two AC signals with the drive frequency set by said frequency setting means, having a fixed phase difference between them; and

;

(f) a power amplifier means which amplifies said two AC signals which are generated by said phase shifting oscillator means, and supplies them to two input electrode groups which are provided on said electromagnetic energy to mechanical energy conversion element.

12. A drive control device for an ultrasonic motor according to claim 11, wherein said resonance order detection means comprises a phase difference detection device which compares the phases of the output voltages from said two detector electrodes and outputs a voltage according to their phase difference, and a plurality of comparators which output resonance order detection signals when the output voltage of said phase difference detection device reaches voltages set according to resonance orders.

13. A drive control device for an ultrasonic motor according to claim 11, wherein said phase shifting oscillator means sets the phase difference between said two AC signals according to the resonance frequency band switched over to by said frequency band switchover means.

14. A drive control device for an ultrasonic motor according to claim 11, wherein said power amplifier means sets the voltage of said two AC signals according to the resonance frequency band switched over to by said frequency band switchover means.

15. A drive control device for an ultrasonic motor according to claim 11, further comprising an inductance insertion means which inserts, between said power amplifier means and said two input electrode groups provided on said electromagnetic energy to mechanical energy conversion element, an inductance value which depends upon the resonance frequency band switched over to by said frequency band switchover means.

16. A drive control device for an ultrasonic motor according to claim 11, wherein a common electrode is provided on said electromagnetic energy to mechanical energy conversion element as a said detector electrode.

17. A drive control device for an ultrasonic motor according to claim 11, wherein a common electrode is provided on said electromagnetic energy to mechanical energy conversion element and is divided into a plurality of portions, of which at least one portion serves as a said detector electrode.

18. A drive control device for an ultrasonic motor according to claim 11, wherein said two detector electrodes are positioned within one wavelength of said progressive wave apart.

19. A drive control device for an ultrasonic motor according to claim 11, wherein said frequency setting means, after said drive frequency of said ultrasonic motor has reached the frequency of the resonance frequency band switched over to by said frequency band switchover means, controls said drive frequency to lie within said resonance frequency band.

20. A drive control device for an ultrasonic motor according to claim 11, wherein said electromagnetic energy to mechanical energy conversion element is a piezoelectric transducer element.

21. A drive control device for an ultrasonic motor, in which two AC drive signals having a fixed phase difference are supplied to two input electrode groups on an electromagnetic energy to mechanical energy conversion element, and which drives a movable element by generating a progressive wave in a fixed element by said electromagnetic energy to mechanical energy conversion element, comprising:

a resonance order detection means that detects the order of the resonance frequency band of the AC drive signals based upon output signals from at least two detector electrodes that are provided on said electromagnetic energy to mechanical energy conversion element; and

a frequency band control means that controls the frequency of said two AC drive signals to be within a predetermined order resonance frequency band, based upon the order of the resonance frequency band of the AC drive signals detected by said resonance order detection means.

22. A drive control device for an ultrasonic motor, in which two AC drive signals having a fixed phase difference are supplied to two input electrode groups on an electromagnetic energy to mechanical energy conversion element, and which drives a movable element by generating a progressive wave in a fixed element by said electromagnetic energy to mechanical energy conversion element, comprising:

a resonance order detection means that detects the order of the resonance frequency band of the AC drive signals based upon output signals from at least two detector electrodes that are provided on said electromagnetic energy to mechanical energy conversion element;

a frequency band control means that controls the frequency of said two AC drive signals to be within a predetermined order resonance frequency band based upon the order of the resonance frequency band of the AC drive signals detected by said resonance order detection means; and

a drive frequency control means which, after the frequency of said two AC drive signals has reached the frequency of the predetermined order resonance frequency band, controls said frequency of said two AC drive signals to be a predetermined drive frequency.