Apparatus for measuring, thinning and flattening silicon structures

• US 5,563,709 A
• Filed: 09/13/1994
• Issued: 10/08/1996
• Est. Priority Date: 09/13/1994
• Status: Expired due to Fees

• Current Assignee: Integrated Process Equipment Corp. (Speedfam Co., Ltd)
• Original Assignee: Integrated Process Equipment Corp. (Speedfam Co., Ltd)
• Inventors: Poultney, Sherman K.
• Primary Examiner(s): Rosenberger, Richard A.
• Application Number:
  US08/304,983
• Time in Patent Office: 756 Days
• Field of Search: 356/371, 356/376, 356/382, 156/626.1
• US Class Current: 356/613
• CPC Class Codes: G01B 11/06 for measuring thickness ; e.g. of sheet material thickness measurement by thermal means G01B21/085
• CPC Class Codes: G01B 11/306 for measuring evenness
• CPC Class Codes: G01J 9/00 Measuring optical phase difference devices or arrangements for controlling the phase of light beams G02F1/01; Determining degree of coherence; Measuring optical wavelength spectrometry G01J3/00

Abstract

A system is provided for processing wafers, such as silicon and silicon-on-insulator wafers. The processing includes thinning and flattening of the wafers at a work station located directly beneath a down looking metrology apparatus for directing light onto the wafer and measuring the light wavefronts reflected from the wafer. The metrology apparatus for flattening includes the feature of a multiple lens array for arranging the reflected wavefronts into a plurality of light spots, and a charge-coupled-device light responsive device for receiving the light spots and determining the shape of the wavefronts. The system also provides a wafer transport system for moving one or more wafers into one or more work stations beneath the metrology apparatus in a vacuum chamber.

Claims

1. A system for wafer processing comprising:

means for retaining at least one wafer to be processed;

a vacuum chamber means containing a plurality of work stations and at least one wafer processing machine;

transport means mechanically connected to said wafer retaining means for transporting said wafer into a selected one of said plurality of work stations in said vacuum chamber proximate to said wafer processing machine;

and a metrology apparatus disposed above said wafer in said work station for directing light down onto said wafer for measuring light wavefronts reflected from said wafer wherein said vacuum chamber includes means for positioning said selected work station below said metrology apparatus and said metrology apparatus includes a light source for directing a light beam onto said wafer in said work station in said vacuum chamber wherein said light beam is reflected from the surface of said wafer in the form of reflected light wavefronts; and

a

light responsive measuring means in the path of said reflected light beam wavefront including a lens array having a plurality of separate lens elements disposed for producing a plurality of light spots representative of said reflected light beam wavefronts, and means responsive to said plurality of light spots from said lens array for determining the relative spacing between said light spots.

2. A system for wafer processing according to claim 1 wherein said vacuum chamber includes a plurality of work stations and means for positioning said metrology apparatus above selected one of said plurality of work stations.

3. A system for wafer processing according to claim 1 wherein said wafer to be processed is a silicon wafer:

said wafer processing machine is a wafer flattening machine;

and said metrology apparatus is an apparatus for measuring silicon wafer flatness when said silicon wafer is in said work station in position for flattening by said wafer flattening machine.

4. A system according to claim 3 wherein said silicon wafer has a footprint or co-registration pattern made by a PACE shaper.

5. A system for wafer processing for flattening according to claim 1 wherein said light source is a laser, and wherein said metrology apparatus further includes a beam splitter device in the path of said light beam for directing said light beam onto a said wafer in said work station in said vacuum chamber wherein said light beam is reflected from the surface of said wafer back through said beam splitter device in the form of reflected light wavefronts;

and wherein said lens array of said light responsive measuring means in the path of said reflected light beam wavefronts from said wafer reflected back through said beam splitter device is provided for determining the flatness of the said surface of said wafer.

6. A system for wafer processing according to claim 5 wherein said means responsive to said plurality of light spots representative of said reflected light beam wavefronts, includes a charge-coupled-device light detector responsive to said plurality of light spots from said lens array for determining the relative spacing between said light spots representative of the flatness of said surface of said wafer.

7. A system for wafer processing according to claim 6 wherein said metrology apparatus further includes a reflective mirror structure disposed between said beam splitter device and said wafer in said work station for directing said light beam directly down onto said surface of said wafer, and for directing said light beam wavefronts reflected from said wafer surface back through said beam splitter device.

8. A system for wafer processing according to claim 7 wherein said work station includes a wafer chuck for retaining said wafer in a flat position beneath said light beam directed down onto said surface of said wafer from said metrology apparatus.

9. A system for wafer processing according to claim 7 wherein said reflective mirror structure includes an off-axis parabolic reflector for directing said light beam down onto said wafer in said work station, and for directing said light beam wavefronts reflected from said wafer surface back through said beam splitter device.

10. A system for wafer processing according to claim 1 wherein said transport means includes a motor actuated pivoted mechanical arm for said wafer in said retaining means and physically transporting said wafer and placing said wafer in said work station in said vacuum chamber.

11. A system for wafer processing according to claim 10 wherein said wafer retaining means includes means for retaining a plurality of separate wafers to be processed and wherein said vacuum chamber means includes a plurality of separate work stations;

and wherein said motor actuated pivoted mechanical arm of said transport means functions to physically transport each of said plurality of separate wafers and place each of said plurality of separate wafers in each of a separate one of said plurality of separate work stations.

12. A system for wafer processing according to claim 11 wherein said vacuum chamber includes a plurality of work stations and means for positioning said metrology apparatus above selected one of said plurality of work stations.