Erbium-doped planar optical device

• US 5,563,979 A
• Filed: 08/31/1995
• Issued: 10/08/1996
• Est. Priority Date: 08/31/1995
• Status: Expired due to Term

• Current Assignee: Avago Technologies General IP PTE Limited (Broadcom, Inc.)
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Bruce, Allan J., Shmulovich, Joseph, Wong, Yiu-Huen, Grodkiewicz, William H., Nykolak, Gerald
• Primary Examiner(s): Lee, John D.
• Assistant Examiner(s): Palmer, Phan T. H.
• Application Number:
  US08/522,012
• Time in Patent Office: 404 Days
• Field of Search: 385/142, 385/141, 385/143, 385/144, 385/123, 385/124, 385/125, 385/126, 372/6
• US Class Current: 385/142
• CPC Class Codes: G02B 2006/12169 Annealing
• CPC Class Codes: G02B 6/136 by etching
• CPC Class Codes: H01S 3/063 Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength waveguide gas lasers H01S3/0315
• CPC Class Codes: H01S 3/1608 erbium

Abstract

An active optical device comprises a glass, waveguiding structure disposed on a substantially planar principal surface of a substrate. The structure includes a silica-based, erbium-doped active core. The active core has an absolute erbium concentration of at least about 0.5×10²⁰ atoms per cubic centimeter, and a radiative lifetime of the erbium lasing level of at least about 5 milliseconds. The active core does not contain significant amounts of alkali metals or alkaline earth metals but does contain at least two modifier metals. Also disclosed is a method for forming an active optical device, including the step of depositing an erbium-doped active core by sputtering.

Claims

1. An optical device, comprising:

a) an elongate, active glass core which extends along a longitudinal axis and comprises silicon, oxygen, and erbium, the erbium being at least partially in the form of Er³⁺ ions, the active core having a refractive index greater than about 1.5 at 633 nm;

b) a glass cladding comprising at least one layer which at least partially surrounds the active core and has a refractive index which is smaller than the core refractive index;

c) means for coupling signal radiation, having a signal wavelength, into the active core and means for coupling the signal radiation out of the active core; and

d) means for coupling pump radiation into the active core such that pump radiation of an appropriate wavelength will excite at least some of the Er³⁺ ions to a lasing level, leading to amplification of the signal radiation by stimulated emission,

CHARACTERIZED IN THAT

e) the device further comprises a substrate having a substantially planar principal surface;

f) the active core is a body that overlies a portion of the principal surface;

g) the cladding comprises a lower cladding layer disposed between the active core and the principal surface, and an upper cladding layer which overlies and partially surrounds the active core;

h) the active core further comprises modifier comprised of at least two elements, one of which is selected from the group consisting of the Group IIIB, Group IVB and Group IIIA metals from the Mendeleef Periodic Table in an effective quantity to prevent clustering of erbium atoms and wherein none of the modifier elements are alkali metal or alkaline earth metals;

i) the active core has an erbium-to-silicon atomic ratio of at least about 0.005 and an absolute erbium concentration of at least about 0.5×

10²⁰ atoms per cubic centimeter; and

j) the lasing level has a radiative lifetime of at least about 5 ms.

2. The optical device of claim 1, wherein the active glass core is adapted to guide the fundamental mode of the signal wavelength, and the means for coupling the signal radiation into and out of the active core are adapted to couple the signal radiation adiabatically.

3. The optical device of claim 2, further comprising an elongate, waveguiding, passive, glass core which extends along the longitudinal axis and is disposed between the lower cladding layer and the active core, the passive core being adapted to guide the fundamental mode of the signal radiation, means for coupling an optical signal and pump radiation into the passive core, and means for coupling signal radiation out of the passive core, wherein:

the passive core is substantially free of erbium and has a refractive index that is smaller than the active core refractive index but larger than the upper and lower cladding refractive indices,

and the means for coupling the signal radiation into and out of the active core comprises two further, tapered portions of the active core, each tapered portion extending between the central portion and an end and tapering toward the respective end such that the tapered portion is progressively constricted in at least one direction perpendicular to the longitudinal axis.

4. The optical device of claim 3, wherein the perpendicular direction is substantially parallel to the substrate principal surface.

5. The optical device of claim 3, wherein the perpendicular direction is substantially normal to the substrate principal surface.

6. The optical device of claim 3, wherein the passive core comprises phosphosilicate glass, the upper cladding layer comprises phosphosilicate glass, and the lower cladding layer comprises thermal silicon dioxide.

7. The optical device of claim 1, wherein one of the modifier elements is lathanum, wherein the amount of lanthanum in the active core is about 5 mole percent to about 40 mole percent.

8. The optical device of claim 7, wherein the second modifier element in the active core is a metal other than lathanum.

9. The optical device of claim 8 wherein the second modifier element is aluminum, present in the active core in an amount of about 5 mole percent to about 40 mole percent.

10. The optical device of claim 1, wherein the substrate comprises a silicon body.

11. The optical device of claim 1, wherein the active core has an absolute erbium concentration of at least about 1.4×

10²⁰.

12. The optical device of claim 1, wherein the concentration of Er³⁺ ions is substantially constant throughout the active core, and the active core is substantially free of radiation damage.

13. The optical device of claim 1, further comprising at least one optical feedback element, such that the device can function as a laser.

14. The optical device of claim 1, further comprising at least one optical feedback element, such that the device can function as a parametric oscillator.