Ceramic electrostatic chuck with built-in heater
First Claim
1. A ceramic electrostatic chuck having a built-in heater comprising a supporting substrate of an electrically insulating ceramic having first and second opposing surfaces and a side surface, an electrode of an electroconductive ceramic bonded to the first surface of the substrate, a heat generating layer of an electroconductive ceramic bonded to the second and the side surfaces, and a covering layer of an electrically insulating ceramic covering said electrodes and heat generating layer.
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Accused Products
Abstract
The ceramic electrostatic chuck with built-in heater of the present invention is disclosed having electrodes for electrostatic chuck made from an electroconductive ceramic bonded to a surface of a supporting substrate made from an electrically insulating ceramic, a heat generating layer made from an electroconductive ceramic is bonded to the other surface and the side surface and a covering layer made from an electrically insulating ceramic is provided thereon.
25 Citations
10 Claims
- 1. A ceramic electrostatic chuck having a built-in heater comprising a supporting substrate of an electrically insulating ceramic having first and second opposing surfaces and a side surface, an electrode of an electroconductive ceramic bonded to the first surface of the substrate, a heat generating layer of an electroconductive ceramic bonded to the second and the side surfaces, and a covering layer of an electrically insulating ceramic covering said electrodes and heat generating layer.
Specification