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Method and apparatus for calibration of a transducer flying height measurement instrument

  • US 5,567,864 A
  • Filed: 06/22/1994
  • Issued: 10/22/1996
  • Est. Priority Date: 02/04/1993
  • Status: Expired due to Fees
First Claim
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1. A method for calibrating a flying height measurement instrument having a measurement disk, using a calibration slider having a dominant surface having at least three support structures apart sufficiently to support the calibration slider of the flying height measurement instrument, including the steps of:

  • (a) measuring the height of the each support structure of a calibration slider;

    (b) installing a first calibration slider into the flying height measurement instrument;

    (c) placing the first calibration slider on the measurement disk;

    (d) measuring the distance between the dominant surface of the calibration slider and the surface of the measuring disk of the flying height measurement instrument;

    (e) replacing the first calibration slider with a second calibration slider;

    (f) measuring the distance between the dominant surface of the second calibration slider and the measurement disk;

    (g) generating a map such that for a plurality of values output by the flying height measurement instrument during a dynamic measurement of a conventional slider, there is a corresponding value that is essentially equal to an actual distance between the conventional slider and the measurement disk.

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