Diamond-like carbon films from a hydrocarbon helium plasma

• US 5,569,501 A
• Filed: 06/07/1995
• Issued: 10/29/1996
• Est. Priority Date: 01/07/1993
• Status: Expired due to Term

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Bailey, Fredric D., Lustig, Naftali E., Flagello, Donis G., Latulipe, Douglas C. Jr., Clearfield, Howard M., Scherpereel, Christopher M., Hovel, Harold J., Callegari, Alessandro C., Purushothaman, Sampath, Seeger, David E., Buchanan, Douglas A., Doany, Fuad E., Pomerene, Andrew T. S., Shaw, Jane M.
• Primary Examiner(s): King, Roy V.
• Application Number:
  US08/483,685
• Time in Patent Office: 510 Days
• Field of Search: 427/577, 427/249, 427/122, 427/573, 216/81, 428/408, 423/446
• US Class Current: 427/577
• CPC Class Codes: C23C 16/26 Deposition of carbon only
• CPC Class Codes: G02B 1/105 Protective coatings
• CPC Class Codes: G02B 1/111 using layers comprising organic materials
• CPC Class Codes: G02B 1/14 Protective coatings, e.g. hard coatings
• CPC Class Codes: G11B 5/255 comprising means for protection against wear in thin film structures G11B5/3106
• CPC Class Codes: Y10S 427/104 Utilizing low energy electromagnetic radiation, e.g. microwave, radio wave, IR, UV, visible, actinic laser
• CPC Class Codes: Y10S 427/106 Utilizing plasma, e.g. corona, glow discharge, cold plasma
• CPC Class Codes: Y10T 428/30 Self-sustaining carbon mass or layer with impregnant or other layer

Abstract

The present invention relates to an improved method of depositing a diamond-like carbon film onto a substrate by low temperature plasma-enhanced chemical vapor deposition (PECVD) from a hydrocarbon/helium plasma. More specifically, the diamond-like carbon films of the present invention are deposited onto the substrate by employing acetylene which is heavily diluted with helium as the plasma gas. The films formed using the process of the present invention are characterized as being amorphous and having dielectric strengths comparable to those normally observed for diamond films. More importantly, however is that the films produced herein are thermally stable, optically transparent, absorbent in the ultraviolet range and hard thus making them extremely desirable for a wide variety of applications.

Claims

1. A method of depositing a diamond-like carbon film onto a substrate by plasma-enhanced chemical vapor deposition which comprises the steps of:

(a) admixing a gas of a hydrocarbon and helium, wherein a gas mixture, comprising from about 50 to about 1% by volume, hydrocarbon and from about 50 to about 99%, by volume, helium, is formed;

(b) providing a plasma chamber containing a substrate; and

(c) introducing said gas mixture into said plasma chamber to deposit a diamond-like carbon film on said substrate, wherein said diamond-like carbon film has an optical density in the range of from about 1 to about 3 at a wavelength of from about 200 nm to about 365 nm and is thermally stable at a temperature of about 590°

C.

2. The method of claim 1 wherein the hydrocarbon is an unsaturated or saturated compound.

3. The method of claim 2 wherein the saturated hydrocarbon is an alkane compound.

4. The method of claim 3 wherein the alkane compound is methane, ethane, propane or butane.

5. The method of claim 4 wherein the alkane is methane.

6. The method of claim 2 wherein the unsaturated hydrocarbon is an alkene or alkyne compound.

7. The method of claim 6 wherein the alkene compound is ethane, propene or n-butane.

8. The method of claim 6 wherein the alkyne compound is acetylene, propyne, 1-butyne or 2-butyne.

9. The method of claim 8 wherein the alkyne compound is acetylene.

10. The method of claim 1 wherein the admixing gas has a partial pressure of hydrocarbon:

helium from about 1;

100 to about 50;

50.

11. The method of claim 1 wherein the hydrocarbon and helium gases are essentially pure.

12. The method of claim 11 wherein the hydrocarbon and helium are from about 98.5% to about 99.99% pure.

13. The method of claim 1 wherein said diamond-like carbon film has a thickness of about 100 to about 10,000 Å

.

14. The method of claim 1 wherein the diamond-like carbon film has a Youngs Modulus Hardness of about 213/22.8 to about 278/38.4 GPa.

15. The method of claim 1 wherein the substrate is loaded onto a capacitively coupled rf cathode in said plasma chamber.

16. The method of claim 1 wherein the substrate to be coated with said diamond-like carbon film is a plastic, glass, metal, magnetic head, electronic chip, electronic circuit board or a semiconductor device.

17. The method of claim 1 wherein the admixture is introduced at a rate from about 1 to about 1000 sccm.

18. The method of claim 1 wherein the deposition of the diamond-like carbon film is conducted at a pressure range from about 1 to about 1000 m Torr.

19. The method of claim 1 wherein the diamond-like carbon film is deposited on said substrate at a rate from about 5 to about 50 Å

/min.

20. The method of claim 1 wherein said diamond-like carbon film is deposited on said substrate at a temperature of about 25 to about 300°

C.

21. The method of claim 1 wherein the diamond-like carbon film has a dielectric strength of about 10 MV/cm.

22. The method of claim 1 wherein the diamond-like carbon film has an optical density of about 1.0 to about 1.5 at 248 nm.

23. The method of claim 1 wherein the diamond-like carbon film is a ultraviolet inhibiting antireflective coating.

24. The method of claim 1 wherein the diamond-like carbon film deposited on said substrate is patterned by oxygen reactive ion etching to form a patterned layer for use as an attenuated phase shift mask.

25. The method of claim 24 wherein the substrate is quartz.

26. The method of claim 1 wherein the diamond-like carbon film is a scratch resistant coating.

27. The method of claim 1 wherein the diamond-like carbon film deposited on said substrate is removed by oxygen reactive ion etching to form an antireflective coating for a patterned single layer UV photoresist.

28. A method for depositing a diamond-like carbon film onto a substrate utilizing plasma-enhanced chemical vapor deposition which comprises the steps of:

(a) admixing acetylene and helium, wherein a gas mixture comprising from about 50 to about 1%, by volume, acetylene and from about 50 to about 99%, by volume, helium is formed;

(b) providing a plasma chamber containing a substrate; and

(c) introducing said acetylene/helium gas mixture into said chamber to deposit a diamond-like carbon film on said substrate, said diamond-like carbon film having an optical density in the range from about 1 to about 3 at a wavelength of from about 200 nm to about 365 nm and is thermally stable at a temperature of about 590°

C.