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Zinc oxide piezoelectric crystal film on sapphire plane

  • US 5,569,548 A
  • Filed: 08/02/1994
  • Issued: 10/29/1996
  • Est. Priority Date: 08/05/1993
  • Status: Expired due to Term
First Claim
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1. A (1120)-plane zinc oxide piezoelectric crystal film being epitaxially grown on a surface of (0112) sapphire and being substantially parallel to the (0112)plane,said zinc oxide piezoelectric crystal film containing Cu in an amount of 0.4 percent to not more than 4.5 percent by weight with respect to the total content of Zn and Cu.

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