Method of and system for processing halogenated hydrocarbons
First Claim
1. A method of processing a chlorofluorocarbon gas waste material comprising the steps of:
- a. mixing a hydrocarbon gas with the chlorofluorocarbon gas waste material to create a mixed gas; and
b. exciting the mixed gas to a plasma state for plasma copolymerization, generating a copolymer of molecules of the chlorofluorocarbon gas waste material and the hydrocarbon gas, the copolymer being accumulated on a fixation member, wherein a majority of chlorofluorocarbons in said chlorofluorocarbon gas waste material is prevented by said method of processing from being atmospherically released.
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Accused Products
Abstract
System for and a method of fixing chlorofluorocarbons or other halogenated hydrocarbons, for example, CHF3 or CCl2 F2 recirculated and collected or discharged from a dry etching apparatus, so as to make the chlorofluorocarbon or halogenated hydrocarbon harmless against the earth'"'"'s ozone layer. A gaseous hydrocarbon like ethane, ethylene or acetylene gas is mixed with a chlorofluorocarbon or other halogenated hydrocarbon gas in a reaction tube 61. The mixed gas is then excited to a plasma state for plasma copolymerization. A solid copolymer of the halogenated hydrocarbon and the hydrocarbon generated by the plasma copolymerization is deposited and accumulated onto the inner wall of the reaction tube 61 or on a fixation member 14.
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Citations
7 Claims
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1. A method of processing a chlorofluorocarbon gas waste material comprising the steps of:
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a. mixing a hydrocarbon gas with the chlorofluorocarbon gas waste material to create a mixed gas; and b. exciting the mixed gas to a plasma state for plasma copolymerization, generating a copolymer of molecules of the chlorofluorocarbon gas waste material and the hydrocarbon gas, the copolymer being accumulated on a fixation member, wherein a majority of chlorofluorocarbons in said chlorofluorocarbon gas waste material is prevented by said method of processing from being atmospherically released. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification