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Capacitive accelerometer sensor and method for its manufacture

  • US 5,569,852 A
  • Filed: 12/14/1994
  • Issued: 10/29/1996
  • Est. Priority Date: 01/05/1994
  • Status: Expired due to Term
First Claim
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1. A capacitive accelerometer sensor having a structure etched out of a conductive monocrystalline layer arranged on a substrate, comprising:

  • a seismic mass movable in a longitudinal direction in a plane of the seismic mass in response to an occurrence of an acceleration;

    suspension segments coupling the seismic mass to the substrate, the suspension segments being coupled at first ends to the seismic mass and at second ends to the substrate, the suspension segments being coupled such that the seismic mass is movable in the longitudinal direction;

    parallel, plate-like first fingers extending from the seismic mass at substantially right angles to the longitudinal direction;

    plate-like second fingers, running parallel and opposed to the first fingers, and being coupled at first ends to the substrate;

    an isolation strip electrically isolating the second fingers and the suspension segments from a surrounding layer of the conductive monocrystalline layer;

    a passivation layer extending over the isolation strip and at least partially over the surrounding layer; and

    conductors arranged on the passivation layer and running across the isolation strip, the conductors being coupled to the second fingers and the suspension segments.

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