Microfabricated acoustic source and receiver

• US 5,569,968 A
• Filed: 09/14/1994
• Issued: 10/29/1996
• Est. Priority Date: 06/04/1993
• Status: Expired due to Fees

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Lal, Amit, White, Richard M.
• Primary Examiner(s): Dougherty, Thomas M.
• Application Number:
  US08/306,843
• Time in Patent Office: 776 Days
• Field of Search: 310/313 R, 310/311, 310/321, 310/322, 310/328, 310/334, 381/173, 381/113, 381/191, 381/181, 367/181, 322/334
• US Class Current: 310/322
• CPC Class Codes: A61B 17/320068 using mechanical vibrations, e.g. ultrasonic A61B17/22012 takes precedence; dental tooth drilling devices operated by vibration A61C3/03; removing intra-ocular material using mechanical vibrations A61F9/00745
• CPC Class Codes: A61B 18/14 Probes or electrodes therefor
• CPC Class Codes: A61B 18/1402 Probes for open surgery
• CPC Class Codes: A61B 2017/00345 Micromachines, nanomachines, microsystems
• CPC Class Codes: A61B 2017/0088 ceramic
• CPC Class Codes: A61B 2018/00107 Coatings on the energy applicator
• CPC Class Codes: A61B 2018/00119 with metal oxide nitride
• CPC Class Codes: B06B 1/0688 with foil-type piezoelectric elements, e.g. PVDF
• CPC Class Codes: H04R 17/00 Piezoelectric transducers; Electrostrictive transducers piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners H10N30/00
• CPC Class Codes: H04R 17/005 using a piezoelectric polymer
• CPC Class Codes: H04R 17/08 signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
• CPC Class Codes: H10N 30/2042 Cantilevers, i.e. having one fixed end
• CPC Class Codes: H10N 30/2047 Membrane type

Abstract

A microstructure that may be used as an acoustic source or receiver. It comprises a substrate having a thicker section and a thinner section, supporting a membrane. A window is formed in the thinner section. Means are provided for inputting or sensing mechanical energy in the substrate and membrane. The microstructure allows for the design of complex mechanical frequency responses for at least partly mechanical signal processing.

Claims

1. A microfabricated acoustic source or receiver structure, comprising:

a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section;

a membrane of a second material disposed on said substrate over said first and second sections;

means, mechanically coupled to said membrane, for inputting or sensing mechanical energy in said membrane and said substrate; and

wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, said preselected region having a lateral extent less than a lateral extent of said second section.

2. The structure of claim 1 wherein said first material is silicon.

3. The structure of claim 1 wherein said membrane has elasto-optic properties.

4. The structure of claim 1 wherein said inputting means includes a piezoelectric transducer.

5. The structure of claim 4 wherein said transducer means includes a zinc oxide layer and two layers of a conductive material, said zinc oxide layer disposed between said layers of a conductive material.

6. The structure of claim 1 wherein the thickness of said first section is between about 500 and 550 microns.

7. The structure of claim 6 wherein the thickness of said second section is between about 40 and 100 microns.

8. The structure of claim 6 wherein the thickness of said second section is between about 50 and 70 microns.

9. The structure of claim 1 wherein the thickness of said membrane is between about one and four microns.

10. The structure of claim 9 wherein the thickness of said membrane is about two microns.

36. The structure of claim 1 wherein said second material is silicon nitride.

11. A microfabricated acoustic source structure, comprising:

a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section;

a membrane of a second material disposed on said substrate over said first and second sections;

transducer means mechanically coupled to said membrane;

means for supplying electrical power to said transducer means to cause a flexural wave action in said second section of said substrate; and

wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, a lateral extent of said preselected region being less than a lateral extent of said second section.

12. The structure of claim 11 wherein said first material is silicon.

13. The structure of claim 11 wherein said second material is silicon nitride.

14. The structure of claim 11 wherein said transducer means includes a piezoelectric film.

15. The structure of claim 11 wherein the thickness of said first section is between about 500 and 550 microns.

16. The structure of claim 15 wherein the thickness of said second section is between about 40 and 100 microns.

17. The structure of claim 11 wherein the thickness of said membrane is between about one and four microns.

18. The structure of claim 17 wherein the thickness of said membrane is about two microns.

19. The structure of claim 11 wherein said transducer means includes a plurality of parallel finger elements of conductive material connected to said electrical power supplying means.

20. The structure of claim 11 wherein said transducer means includes first and second conductive elements wherein said first conductive element is connected to said electrical power supplying means and said second conductive element is connected in a feedback loop for controlling frequency response of the structure.

33. The structure of claim 11 wherein said plate has an open end.

34. The structure of claim 33 wherein said open end has an angled cutting edge.

35. The structure of claim 34 wherein said open end has a beak-like configuration.

21. A microfabricated acoustic receiver structure, comprising:

a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section;

a membrane of a second material disposed on said substrate over said first and second sections;

transducer means mechanically coupled to said substrate for sensing mechanical vibration in said second section to produce an electrical signal; and

wherein said second section comprises a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, said preselected region having a lateral extent less than a lateral extent of said second section.

22. The structure of claim 21 wherein said first material is silicon.

23. The structure of claim 21 wherein said second material is silicon nitride.

24. The structure of claim 21 wherein said transducer means includes a piezoelectric film.

25. The structure of claim 21 wherein the thickness of said first section is between about 500 and 550 microns.

26. The structure of claim 25 wherein the thickness of said second section is between about 40 and 100 microns.

27. The structure of claim 21 wherein the thickness of said membrane is between about one and four microns.

28. The structure of claim 21 wherein said transducer means is connected to an amplification means for amplifying the electrical signal.

29. A microfabricated acoustic receiver structure, comprising:

a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second sections;

transducer means mechanically coupled to said substrate for sensing mechanical vibration in said second section to produce an electrical signal; and

wherein said second section has a preselected region from which said first material has been removed, said preselected region having a lateral extent less than a lateral extent of said second section, said second section including a plate shaped to produce a predetermined acoustic response and said preselected region defines a notch structure that does not enclose said transducer means.

30. The structure of claim 29 wherein said notch structure includes at least one beam.

31. A microfabricated acoustic receiver structure, comprising:

a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section;

transducer means mechanically coupled to said substrate for sensing mechanical vibration in said second section to produce an electrical signal; and

wherein said second section has a preselected region from which said first material has been removed, said preselected region having a lateral extent less than a lateral extent of said second section, said second section including a plate shaped to produce a predetermined acoustic response and said preselected region defines a cantilever structure that encloses at least part of said transducer means.

32. The structure of claim 31 wherein said cantilever structure includes at least one beam.

37. A method for producing acoustic signals, comprising:

providing an acoustic source including a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section;

means, a membrane disposed on said substrate over said first and second sections, means, mechanically coupled to said membrane, for inputting mechanical energy in said substrate; and

wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, said preselected region having a lateral extent less than a lateral extent of said second section; and

activating said means for inputting mechanical energy in said substrate.

38. A method for receiving acoustic signals, comprising:

providing an acoustic receiver including a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section;

a membrane disposed on said substrate over said first and second sections;

means, mechanically coupled to said substrate, for sensing mechanical energy in said substrate; and

wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, said preselected region having a lateral extent less than a lateral extent of said second section; and

using said means for sensing mechanical energy in said substrate to sense said acoustic signals.

39. A microfabricated acoustic source or receiver structure, comprising:

a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section;

a membrane of a second material disposed on said substrate over said first and second sections;

means, mechanically coupled to said membrane, for inputting or sensing mechanical energy in said membrane and said substrate; and

wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane.