Sensor using piezoelectric elements
First Claim
1. A force sensor using piezoelectric elements comprising:
- a substrate having flexibility wherein an origin is defined at a point within said substrate and an X-axis and a Y-axis extending in a direction in parallel to a principle surface of said substrate are defined, said X-axis and said Y-axis crossing perpendicular to each other at the origin to fore an XY coordinate system;
four detection elements composed of a piezoelectric element in a plate form, an upper electrode formed on an upper surface of said piezoelectric element and a lower electrode formed on a lower surface of said piezoelectric element, respective one of said upper electrode and said lower electrode being fixed to said substrate;
a working body having a function for transmitting, to the origin, a force produced on the basis of a physical action exerted from an external source and;
a sensor casing to which an outside peripheral portion of the substrate is fixed;
wherein a first detection element, a second detection element, a third detection element and a fourth detection element are respectively arranged in a negative region on the X-axis, in a positive region on the X-axis, in a negative region on the Y-axis and in a positive region on the Y-axis, respectively;
wherein a force relating to the X-axis direction produced in the working body is detected on the basis of charges produced in the first detection element and the second detection element, and a force relating to the Y-axis direction produced in the working body is detected on the basis of charges produced in the third detection element and the fourth detection element.
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Abstract
The periphery of a disk having flexibility is fixed to a sensor casing, and a force applied to the central portion is detected. A doughnut disk-shaped piezoelectric element is positioned on the upper surface of the disk, and upper electrode layers indicated by patterns of D1 to D6 are formed on the upper surface of the piezoelectric element. Further, lower electrode layers similarly having pattern of D1 to D6 are formed on the lower surface of the piezoelectric element, and the lower surface of the lower electrode layer is fixed on the upper surface of the disk. Six detection elements D1 to D6 are formed each of which is constituted by a pair of upper and lower electrode layers and a portion of piezoelectric element put therebetween. Thus, force component s exerted at an origin defined in the central portion of the disk in respective axes directions of X, Y, Z can be detected based on charges produced in detection elements D1, D2, detection elements D3, D4, and detection elements D5, D6, respectively.
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Citations
17 Claims
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1. A force sensor using piezoelectric elements comprising:
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a substrate having flexibility wherein an origin is defined at a point within said substrate and an X-axis and a Y-axis extending in a direction in parallel to a principle surface of said substrate are defined, said X-axis and said Y-axis crossing perpendicular to each other at the origin to fore an XY coordinate system; four detection elements composed of a piezoelectric element in a plate form, an upper electrode formed on an upper surface of said piezoelectric element and a lower electrode formed on a lower surface of said piezoelectric element, respective one of said upper electrode and said lower electrode being fixed to said substrate; a working body having a function for transmitting, to the origin, a force produced on the basis of a physical action exerted from an external source and; a sensor casing to which an outside peripheral portion of the substrate is fixed; wherein a first detection element, a second detection element, a third detection element and a fourth detection element are respectively arranged in a negative region on the X-axis, in a positive region on the X-axis, in a negative region on the Y-axis and in a positive region on the Y-axis, respectively; wherein a force relating to the X-axis direction produced in the working body is detected on the basis of charges produced in the first detection element and the second detection element, and a force relating to the Y-axis direction produced in the working body is detected on the basis of charges produced in the third detection element and the fourth detection element. - View Dependent Claims (2, 15, 16, 17)
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3. A force sensor using piezoelectric elements comprising:
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a substrate having flexibility wherein an origin is defined at a point within said substrate, an X-axis and a Y-axis extending in a direction in parallel to a principle surface of said substrate are defined, said X-axis and said Y-axis crossing perpendicular to each other at the origin to form an XY coordinate system, a Z-axis passing through the origin and perpendicular to an XY-plane passing through the origin is defined, and a fourth axis passing through the origin and extending along the XY-plane is defined; six detection elements composed of a piezoelectric element in a plate form, an upper electrode formed on an upper surface of said piezoelectric element and a lower electrode formed on a lower surface of said piezoelectric element, respective one of said upper electrode and said lower electrode being fixed to said substrate; a working body having a function for transmitting, to the origin, a force produced on the basis of a physical action exerted from an external source and; a sensor casing to which an outside peripheral portion of the substrate is fixed; wherein a first detection element, a second detection element, a third detection element a fourth detection element, a fifth detection element and a sixth detection element are respectively arranged in a negative region on the X-axis, in a positive region on the X-axis, in a negative region on the Y-axis, in a positive region on the Y-axis, in a negative region on the fourth axis and in a positive region on the fourth axis, respectively; wherein a force relating to the X-axis direction produced in the working body is detected on the basis of charges produced in the first detection element and the second detection element, a force relating to the Y-axis direction produced in the working body is detected on the basis of charges produced in the third detection element and the fourth detection element and a force relating to the Z-axis direction produced in the working body is detected on the basis of charges produced in the fifth detection element and sixth detection element. - View Dependent Claims (4, 5, 6, 7)
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8. A force sensor using piezoelectric elements comprising:
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a substrate having flexibility wherein an origin is defined at a point within said substrate and an X-axis and a Y-axis extending in a direction in parallel to a principle surface of said substrate are defined, said X-axis and said Y-axis crossing perpendicular to each other at the origin to form an XY coordinate system; four detection elements composed of a piezoelectric element in a plate form, an upper electrode formed on an upper surface of said piezoelectric element and a lower electrode formed on a lower surface of said piezoelectric element, respective one of said upper electrode and said lower electrode being fixed to said substrate; a working body having a function for transmitting, to an outside peripheral portion of the substrate, a force produced on the basis of a physical action exerted from an external source and; a sensor casing to which said origin is fixed; wherein a first detection element, a second detection element, a third detection element and a fourth detection element are respectively arranged in a negative region on the X-axis, in a positive region on the X-axis, in a negative region on the Y-axis and in a positive region on the Y-axis, respectively; wherein a force relating to the X-axis direction produced in the working body is detected on the basis of charges produced in the first detection element and the second detection element, and a force relating to the Y-axis direction produced in the working body is detected on the basis of charges produced in the third detection element and the fourth detection element. - View Dependent Claims (9)
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10. A force sensor using piezoelectric elements comprising:
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a substrate having flexibility wherein an origin is defined at a point within said substrate, an X-axis and a Y-axis extending in a direction in parallel to a principle surface of said substrate are defined, said X-axis and said Y-axis crossing perpendicular to each other at the origin to form an XY coordinate system, a Z-axis passing through the origin and perpendicular to an XY-plane passing through the origin is defined, and a fourth axis passing through the origin and extending along the XY-plane is defined; six detection elements composed of a piezoelectric element in a plate form, an upper electrode formed on an upper surface of said piezoelectric element and a lower electrode formed on a lower surface of said piezoelectric element, respective one of said upper electrode and said lower electrode being fixed to said substrate; a working body having a function for transmitting, to an outside peripheral portion of the substrate, a force produced on the basis of a physical action exerted from an external source and; a sensor casing to which said origin is fixed; wherein a first detection element, a second detection element, a third detection element a fourth detection element, a fifth detection element and a sixth detection element are respectively arranged in a negative region on the X-axis, in a positive region on the X-axis, in a negative region on the Y-axis, in a positive region on the Y-axis, in a negative region on the fourth axis and in a positive region on the fourth axis, respectively; wherein a force relating to the X-axis direction produced in the working body is detected on the basis of charges produced in the first detection element and the second detection element, a force relating to the Y-axis direction produced in the working body is detected on the basis of charges produced in the third detection element and the fourth detection element and a force relating to the Z-axis direction produced in the working body is detected on the basis of charges produced in the fifth detection element and sixth detection element. - View Dependent Claims (11, 12, 13, 14)
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Specification