Acceleration sensor
First Claim
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1. An acceleration sensor comprising:
- a substrate;
a bending element mounted to the substrate;
a seismic mass suspended from the bending element;
a plurality of movable electrodes suspended from the seismic mass and adapted to move with respect to the substrate in response to an acceleration;
a connecting beam mounted on the substrate;
a first group of fixed electrodes suspended from the connecting beam, the first group including a plurality of fixed electrodes, each of the fixed electrodes of the first group arranged on one side of a respective one of the movable electrodes; and
a second group of fixed electrodes, each of the fixed electrodes of the second group individually mounted on the substrate and arranged on another side of the respective movable electrode opposite the side of the respective movable electrode on which a respective fixed electrode of the first group is arranged;
wherein the first and second groups of fixed electrodes and the movable electrodes form at least one plate capacitor.
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Abstract
In an acceleration sensor having a multiplicity of movable electrodes, a first group of fixed electrodes is arranged on one side of the movable electrodes and a second group of fixed electrodes is arranged on the other side of the movable electrodes. The fixed electrodes of the first group are suspended from a connecting beam and are connected in parallel electrically by the latter. The fixed electrodes of the second group are anchored individually on the substrate and are connected in parallel electrically by means of a connecting conductor track.
63 Citations
6 Claims
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1. An acceleration sensor comprising:
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a substrate; a bending element mounted to the substrate; a seismic mass suspended from the bending element; a plurality of movable electrodes suspended from the seismic mass and adapted to move with respect to the substrate in response to an acceleration; a connecting beam mounted on the substrate; a first group of fixed electrodes suspended from the connecting beam, the first group including a plurality of fixed electrodes, each of the fixed electrodes of the first group arranged on one side of a respective one of the movable electrodes; and a second group of fixed electrodes, each of the fixed electrodes of the second group individually mounted on the substrate and arranged on another side of the respective movable electrode opposite the side of the respective movable electrode on which a respective fixed electrode of the first group is arranged; wherein the first and second groups of fixed electrodes and the movable electrodes form at least one plate capacitor. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification