Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits

• US 5,574,410 A
• Filed: 11/09/1994
• Issued: 11/12/1996
• Est. Priority Date: 06/27/1991
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Hartlage, Robert P., Buchberger, Douglas A. II, Collins, Kenneth S., Pinson, Jay D. II, Trow, John, Roderick, Craig A., Shel, Viktor
• Primary Examiner(s): GENSLER, PAUL L
• Application Number:
  US08/336,873
• Time in Patent Office: 734 Days
• Field of Search: 333/17.3, 333/32, 333/174, 334/64, 334/71, 334/77, 334/12
• US Class Current: 333/17.3
• CPC Class Codes: H01F 2029/143 with control winding for generating magnetic bias
• CPC Class Codes: H01F 29/146 Constructional details
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32146 Amplitude modulation, includes pulsing
• CPC Class Codes: H01J 37/32165 Plural frequencies
• CPC Class Codes: H01J 37/32183 Matching circuits
• CPC Class Codes: H01J 37/32458 Vessel
• CPC Class Codes: H01J 37/32522 Temperature
• CPC Class Codes: H01J 37/32688 Multi-cusp fields
• CPC Class Codes: H01J 37/32706 Polarising the substrate
• CPC Class Codes: H01J 37/32871 Means for trapping or directing unwanted particles
• CPC Class Codes: H01L 21/31116 by dry-etching
• CPC Class Codes: H03H 11/30 Automatic matching of source impedance to load impedance
• CPC Class Codes: H03H 7/40 Automatic matching of load impedance to source impedance
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence

Abstract

The disclosure discusses impedance matching circuits based on parallel-resonant L-C tank circuits, and describes a low-loss design for an adjustable inductance element suitable for use in these parallel tank circuits. The application of an impedance matching circuit to a plasma process is also disclosed; in this context, a local impedance transformation circuit is used to improve power transfer to the plasma source antenna.

Claims

1. An impedance matching network having a first and a second terminal for connecting a variable load therebetween and an electrical signal generator which produces a driving signal on said first terminal, wherein during operation said impedance matching network is connected to a control circuit that generates first and second control signals that are responsive to changes in said variable electrical load, said impedance matching network comprising

a first tank circuit comprising a variable inductance element responsive to said first control signal and a fixed capacitance element, said first tank circuit connected between said first terminal and a grounded node,

a second tank circuit comprising a variable inductance element responsive to said second control signal and a fixed capacitance element, said second tank circuit connected between said second terminal and said grounded node.

2. The network of claim 1, wherein each of said variable inductance elements in said first and second tank circuits comprises:

a rod-type core manufactured of a material having a non-linear relationship between magnetic field intensity H and magnetic flux density B,

control means for generating a low-frequency electrical control current,

a first control winding bearing said control current and generating magnetic fields in said core, and

a signal coil coupled between said first and second signal terminals bearing said high-frequency electrical signal current and generating magnetic fields in said core.

3. The network of claim 1 wherein

said tank circuits are parallel LC tank circuits and comprise a capacitor in parallel with a variable inductance element.

4. The network of claim 1 wherein

said tank circuits are series LC tank circuits and comprise a capacitor in series with a variable inductance element.

5. An impedance matching network having an input and an output terminal for connection between an electrical signal generator which produces a driving signal on said input terminal and a variable electrical load which receives said driving signal at said output terminal, wherein during operation said impedance matching network is connected to a control circuit that generates first and second control signals that are responsive to changes in said variable electrical load, said impedance matching network comprising:

a first tank circuit, including a variable inductance element responsive to said first control signal, and a fixed capacitance element, said first tank circuit connected between said input terminal and a grounded node;

a second tank circuit including a variable inductance element responsive to said second control signal, and a fixed capacitance element, said second tank circuit connected between said output terminal and said grounded node; and

an impedance element connected between said input terminal and said output terminal.

6. The impedance matching network of claim 5, wherein said impedance element connected between said input terminal and said output terminal is a fixed impedance element.

7. The network of claim 6 wherein said fixed impedance element is a fixed-value inductor.

8. The network of claim 7 adapted to drive a plasma process via an electrically short source antenna.

9. The network of claim 7 adapted to drive a plasma process via a bias electrode.

10. The network of claim 7 adapted to drive a plasma process via an electrically short source antenna, wherein

said tank circuits are parallel LC tank circuits and comprise a capacitor in parallel with a variable inductance element,

said signal generator has an output frequency of substantially 2.0 MHz and an output impedance of substantially 50Ω

,

said fixed-value inductor has an inductance of substantially 4.0 μ

H,

said variable inductor of said first tank circuit has a maximum inductance of substantially 2.8 μ

H and said capacitor of said first tank circuit has a capacitance of substantially 6.1 nF,

said variable inductor of said second tank circuit has a maximum inductance of substantially 2.4 μ

H and said capacitor of said second tank circuit has a capacitance of substantially 6.3 nF.

11. The network of claim 10 wherein

at an operating frequency of 2.0 MHz, said electrically short antenna when coupled to said plasma has an impedance of substantially (12+j200)Ω

,

said first capacitor has a capacitance of substantially 4.4 nF,

said second capacitor has a capacitance of substantially 440 pF.

12. The network of claim 7 adapted to drive a plasma process via an electrically short source antenna which comprises a coil connected between a first and a second terminal, said network further comprising

a local impedance transforming circuit coupled to said electrically short source antenna to allow improved power coupling between a transmission line connected to said first terminal and said antenna, comprising

a first capacitor connected between said first terminal of said antenna and a grounded node, and

a second capacitor connected between said second terminal of said antenna and said grounded node.

13. The network of claim 7 adapted to drive a plasma process via a bias electrode, wherein

said tank circuits are parallel LC tank circuits and comprise a capacitor in parallel with a variable inductance element,

said signal generator has an output frequency of substantially 1.8 MHz and an output impedance of substantially 50Ω

,

said fixed-value inductor has an inductance of substantially 2.8μ

H,

said variable inductor of said first tank circuit has a maximum inductance of substantially 2μ

H and said capacitor of said first tank circuit has a capacitance of substantially 11 nF,

said variable inductor of said second tank circuit has a maximum inductance of substantially 1.7 μ

H and said capacitor of said second tank circuit has a capacitance of substantially 11 nF.

14. The network of claim 6 wherein said fixed impedance element is a fixed-value capacitor.

15. The network of claim 6 wherein

said tank circuits are parallel LC tank circuits and comprise a capacitor in parallel with a variable inductance element.

16. The network of claim 15 wherein said variable inductance elements comprise

a rod-type core manufactured of a material having a non-linear relationship between magnetic field intensity H and magnetic flux density B,

a signal coil wound around said core bearing a high-frequency electrical signal current generating magnetic fields in said core,

a first control winding wound around said core bearing a low-frequency electrical control current generating magnetic fields in said core.

17. The network of claim 6 wherein

said tank circuits are series LC tank circuits and comprise a capacitor in series with a variable inductance element.

18. The network of claim 17 wherein said variable inductance elements comprise

a rod-type core manufactured of a material having a non-linear relationship between magnetic field intensity H and magnetic flux density B,

a signal coil wound around said core bearing a high-frequency electrical signal current generating magnetic fields in said core,

a first control winding wound around said core bearing a low-frequency electrical control current generating magnetic fields in said core.

19. The network of claim 6, wherein each of said variable inductance elements in said first and second tank circuits comprises:

a rod-type core manufactured of a material having a non-linear relationship between magnetic field intensity H and magnetic flux density B,

control means for generating a low-frequency electrical control current,

a first control winding bearing said control current and generating magnetic fields in said core, and

a signal coil coupled between said first and second signal terminals bearing said high-frequency electrical signal current and generating magnetic fields in said core.

20. The network of claim 6, wherein the fixed impedance element is selected from the group of discrete circuit elements consisting of a capacitor and an inductor.