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Capacitive transducer with electrostatic actuation

  • US 5,576,483 A
  • Filed: 11/14/1994
  • Issued: 11/19/1996
  • Est. Priority Date: 10/01/1993
  • Status: Expired due to Term
First Claim
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1. A high precision force and displacement transducer comprising:

  • a. a pair of capacitive transducers, each transducer including a separate drive plate, and a shared pick-up plate positioned between the separate drive plates; and

    be means for selectively imparting a force on a remote object via the pick-up plate.

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