Two-dimensional optical scanner

• US 5,579,148 A
• Filed: 11/28/1994
• Issued: 11/26/1996
• Est. Priority Date: 11/29/1993
• Status: Expired due to Term

• Current Assignee: Nippondenso Co., Ltd. (DENSO Corporation)
• Original Assignee: Nippondenso Co., Ltd. (DENSO Corporation)
• Inventors: Nishikawa, Hideaki, Koumura, Tsukasa
• Primary Examiner(s): PITTS, HAROLD I
• Application Number:
  US08/354,015
• Time in Patent Office: 729 Days
• Field of Search: 235/472, 359/214
• US Class Current: 359/214.1
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129

Abstract

A two-dimensional optical scanner not affected by acceleration disturbances. The two-dimensional optical scanner includes a mirror section having at least one mirror surface formed thereon. A first frame is provided outside the mirror section with a first clearance therebetween. First springs connect the mirror section and the first frame and torsionally vibrating about an axis passing through the center of gravity of the mirror section. A second frame is provided outside the first frame with a second clearance therebetween, and second springs connect the first frame and the second frame. The second springs torsionally vibrate about an axis passing through the center of gravity of mirror section. Piezoelectric bimorphs 21, 22, 23, and 24 drive the optical scanner to impart a torsional oscillation to the first springs and the second springs.

Claims

1. A two-dimensional optical scanner comprising:

a mirror section including at least one reflective surface for reflecting light;

a first retainer being a rigid body provided with a first given clearance around said mirror section;

a first torsional vibrating member connecting said mirror section and said first retainer, said first torsional vibrating member being formed of an elastic material so as to torsionally rotate in a first direction when affected by a first specific cyclical external force and to generate rotational torque in a second direction reverse to said first direction, said first torsional vibrating member forcibly oscillating said mirror section about a first center axis passing through a first center of gravity of said mirror section;

a second retainer formed of a rigid body provided with a second given clearance around said first retainer;

a second torsional vibrating member connecting said first retainer and said second retainer, said second torsional vibrating member being made of an elastic material so that it torsionally rotates in a third direction when affected by a second specific cyclical external force and generates rotational torque in a fourth direction reverse to said third direction, said second torsional vibrating member forcibly oscillating said mirror section through said first retainer about a second axis passing through a second center of gravity of said mirror section and said first retainer, said second axis crossing said first axis;

a third torsional vibrating member connected to said second retainer and oscillating about a third axis crossing said first axis and said second axis when affected by a third specific cyclical external force; and

an electrically operated oscillating means for imparting said third specific external force to said third torsional vibrating member, said third specific external force causing said first specific cyclical external force and said second specific cyclical external force.

2. The two-dimensional optical scanner according to claim 1, wherein said electrically operated oscillating means comprises:

a first signal generator for generating a first signal corresponding to said first specific cyclical external force to said first torsional vibrating member;

a second signal generator for generating a second signal corresponding to said second specific cyclical external force to said second torsional vibrating member;

adding means for receiving said first signal and said second signal, for adding said received first signal and second signal, and for outputting said added signal; and

driving means for generating said third specific cyclical external force to be applied to said third torsional vibrating member according to said added signal output from said adding means.

3. The two-dimensional optical scanner according to claim 1, wherein:

specific cycles in which said first specific cyclical external force and said second specific cyclical external force are applied to said first torsional vibrating member and said second torsional vibrating member, respectively, correspond to a moment of inertia on an axis of torsional movement and an elastic constant of said first torsional vibrating member, said second torsional vibrating member, and said third torsional vibrating member.

4. The two-dimensional optical scanner according to claim 1, wherein:

said second center of gravity of said mirror section and said first retainer coincides with said first center of gravity of said mirror section;

said first axis, said second axis, and said third axis cross each other at said first center of gravity;

said first axis and said second axis cross perpendicularly; and

said third axis crosses equi-angularly to said first axis and said second axis.

5. A two-dimensional optical scanner comprising:

a mirror section having at least one reflective surface for reflecting light;

a first torsional vibrating member and a second torsional vibrating member operatively connected with said mirror section, said first torsional vibrating member and said second torsional vibrating member torsionally rotating by specific cyclical external forces around respective first and second axes intersecting with each other, said first torsional vibrating member and said second torsional vibrating member generating rotational torque in proportion to said torsional rotation to rotate said mirror section at said generated rotational torque;

a retainer for holding said first torsional vibrating member and said second torsional vibrating member so that said first torsional vibrating member and said second torsional vibrating member can torsionally vibrate around said first axis, which passes through at least a center of gravity of said mirror section; and

a single oscillating means for applying said specific cyclical external forces to said first torsional vibrating member and said second torsional vibrating member.

6. The two-dimensional optical scanner according to claim 5, wherein:

said first torsional vibrating member and said second torsional vibrating member are torsionally rotated around said respective first and second axes when actuated by an external force in different cycles.

7. The two-dimensional optical scanner according to claim 6, wherein:

said oscillating means can cause torsional vibration about said first and second axes selectively and simultaneously when applying said specific cyclical external forces to said first torsional vibrating member and said second torsional vibrating member.

8. The two-dimensional optical scanner according to claim 5, wherein:

said oscillating means imparts said specific cyclical external forces to said first torsional vibrating member and said second torsional vibrating member through said retainer.

9. The two-dimensional optical scanner according to claim 5, wherein:

said oscillating means imparts said specific cyclical external forces to said first torsional vibrating member and said second torsional vibrating member through said mirror section.

10. A two-dimensional optical scanner comprising:

a light source for generating a light beam;

a mirror section for reflecting said light beam;

torsional vibrating means for rotating said mirror section about first and second perpendicularly crossing axes, said first and second perpendicularly crossing axes passing through a center of gravity of said mirror section;

imparting means for imparting driving forces to said torsional vibrating means; and

a single driving circuit for driving said imparting means.

11. The two-dimensional optical scanner according to claim 11, wherein:

said light source is a laser.

12. The two-dimensional optical scanner according to claim 11, wherein said torsional vibrating means comprises:

a first retainer disposed with a given clearance around said mirror section and having a hexagonal shape; and

a first member connecting said mirror section with said first retainer, said first member being formed of an elastic material so as to torsionally rotate in a first direction around said first axis when affected by a first specific cyclical external force and to generate rotational torque in a second direction reverse to said first direction, said first member forcibly oscillating said mirror section using said first axis as a center axis.

13. The two-dimensional optical scanner according to claim 12, wherein said torsional vibrating means further comprises:

a second retainer disposed with a second given clearance around said first retainer and having a square shape; and

a second member connecting said first retainer with said second retainer, said second member being formed of an elastic material so as to torsionally rotate in a third direction when affected by a second specific cyclical external force and generate rotational torque in a fourth direction reverse to said third direction, said second member using said second axis as a center axis.

14. The two-dimensional optical scanner according to claim 13, wherein said torsional vibrating means further comprises:

a third retainer disposed with a third given clearance around said second retainer and having a square shape, said third member connecting said second retainer with said third retainer;

said imparting means including piezoelectric bimorphs disposed on said third retainer.

15. The two-dimensional optical scanner according to claim 14, wherein:

said first and second axes extend diagonally in said third retainer crossing each other perpendicularly;

said third member is disposed alond a third axis extending equiangularly from said first and second axes; and

said bimorphs are disposed on opposite sides of said third axis.

16. A two-dimensional optical scanner comprising:

a mirror section including at least one light reflective surface;

a first retainer disposed around said mirror section;

a first tortional vibrating member extending in a first direction and connecting said mirror section and said first retainer, said first tortional vibrating member being made of a material capable of torsionally rotating around a first axis in said first direction when an external force is applied;

a second retainer disposed around said first retainer;

a second tortional vibrating member extending in a second direction which is perpendicular to said first direction and connecting said first retainer and said second retainer, said second tortional vibrating member being made of a material capable of tortionally rotating around a second axis in said second direction when said external force is applied; and

oscillating means for causing a rotational oscillation around a third axis which extends equi-angularly from said first axis and said second axis, said rotational oscillation applying said external force to said first torsional vibrating member and said second torsional vibrating member.

17. The two-dimensional optical scanner according to claim 16, wherein:

said second retainer is shaped in a rectangular form; and

said third axis of said rotational oscillation extends diagonally to said second retainer.

18. The two-dimensional optical scanner according to claim 16, wherein:

said second retainer is shaped in a rectangular form;

said first direction and said second direction are diagonal to said second retainer; and

said oscillating means includes;

a permanent magnet attached to said mirror section, and

a solenoid disposed adjacent to said permanent magnet.

19. The two-dimensional optical scanner according to claim 16, further comprising:

a third retainer disposed around said second retainer; and

a link extending in a direction of said third axis and connecting said second retainer and said third retainer;

wherein all of said mirror section, said first retainer, said second retainer, said third retainer, said first tortional vibrating member, said second tortional vibrating member, and said link are made of a thin elastic sheet material.

20. The two-dimensional optical scanner according to claim 19, wherein said oscillating means includes:

a plurality of bimorphs attached to said third retainer symmetrically with respect to said third axis.

21. The two-dimensional optical scanner according to claim 20, wherein said oscillating means further includes:

signal generating means for applying an electric signal to said plurality of bimorphs, said electric signal being a composite of a first signal and a second signal respectively defining a first torsional rotation of said first tortional vibrating member and a second tortional rotation of said second torsional vibrating member.

22. The two-dimensional optical scanner according to claim 19, wherein:

said first retainer is shaped in a hexagonal form;

said second retainer and said third retainer are each shaped in a rectangular form; and

said first tortional vibrating member and said second tortional vibrating member extend diagonally to said second retainer and said third retainer.